Modular F.R.L. Unit

27 25 28 89 114 26.5 40 83 2 Note 1) 65 29.5 3.2 2.5 50 5.5 5.5 12 33 24 41.5 30 132 143 28 50 110 28.5 64 13 4 71 7 7 14 55 35 41 0 184 146 31 50 110 30.5 10 66 4 71 7 7 14 35 55 41 187 3.5 183 36 75 145 35 74 12 4 88 9 18 9 40 50 72.5 222 3.5 185 36 75 155 74 35 4.6 12 88 9 9 18 40 77.5 50 224 3 264 43 20 186 44.5 84 16 6.4 115 11 11 20 93 50 70 3.3 303 277 43 20 191 44.5 16 84 6.4

3 Port Air Operated Valve

812 796 853 837 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1573

HRX-OM-M005

Use assistance to carry object over 20 kg.

Modular F.R.L. Unit

27 25 28 0 26 13.5 4.5 2.8 40 89 114 26.5 80 83 5.5 12 33 24 41.5 30 2 Note 1) 65 29.5 5.5 3.2 50 2.5 132 143 28 80 110 7 14 55 35 41 28.5 64 13 7 4 71 0 184 146 31 80 110 7 14 35 55 41 30.5 10 66 7 4 71 187 3.5 183 36 105 145 18 9 40 50 72.5 35 74 12 9 4 88 222 3.5 185 36 105 155 9 18 40 77.5 50 74 35 9 4.6 88 12 224 3 264 43 105 186 11 20 93 50 70 44.5 84 16 11 6.4 115 3.3 303 277

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

39.8 24 34 20 68.4 27.3 8.7 20.7 19.2 28.5 23.6 ZFC7 (10, 12, 3/8") Applicable tubing O.D. (10, 12, 3/8") IN 39.8 24 34 79.7 20 27.3 8.7 26.7 19.2 33.8 4 Series ZFC Made to Order Please contact SMC for detailed specifications, dimensions and delivery.

Compact Cylinder

A I-G04 I-G05 Y-G04 Y-G05 M14 x 1.5 42 56 14 18 22 28 30 40 12 16 14 20 42 56 16 20 22 28 M14 x 1.5 12 16 14 20 36 41.6 10 +0.058 0 18 IY-G04 IY-G05 30 40 +0.5 +0.3 M18 x 1.5 M18 x 1.5 44 50.6 14 +0.070 0 22 +0.5 +0.3 Knuckle pin and retaining ring are included.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

KP/KPQ/KPG

KPGR08-12 6 23.2 48 12 d 10 KPGR10-12 KPQR10-12 18.5 24 41 29 9 50.5 25.7 Note 1) D indicates the maximum diameter.

Refrigerated Thermo-chiller

Note 11) Mass in the dry state without circulating fluids. 88 Thermo-chiller Series HRZ Cooling Capacity HRZ010-WS/010-W1S HRZ010-W2S 12 12 HRZ010-WS/010-W1S HRZ010-W2S 10 10 Cooling capacity (kW) Cooling capacity (kW) 8 8 HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products 6 6 4 4 2 2 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) 0 10 20 30 40 50 60 Circulating

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

46 16 20 25 32 36 46 17 20 20 12 12 17 17 20 20 27 27 12 12 17 17 20 20 22 22 22 22 30 30 56 65 73 36 40 48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 0 50 342 87 435 255 100 56 4.6 106 150 4 x M10 x 1.5 23 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 6.4 120 155 4 x M12 x 1.75 28 0 219 62 285 157 60 45 4.5 80 100 2 x M8 x 1.25

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

14 23.3 28.5 35 20.5 16 20 14.5 16 20 15 16 23.5 206 264 322 42 51 59 7 8 9 37.5 47 59.5 12 16 18.5 220 280 340 5.5 6.5 8 15.5 20 23.5 Rc1/16 Rc1/16 Rc1/8 13 13 23 11 12 14 Model QQ SS UU XX 16 16 24 MY1H25 MY1H32 MY1H40 26.5 40 47 6 11 12 18 32 35 WXX WX V V R D Hole Size for Centralized Piping on the Bottom (Machine the mounting side to the dimensions below.)

HRX-OM-R039

-A-10, HRSE018-A-10) 8.5.2 HRSE012/018/024-A-20/23 0.14 14 0.12 12 Circulating fluid pressure [MPa] Outlet : 60Hz 10 0.10 Pump head [m] 8 0.08 Outlet : 50Hz 0.06 6 0.04 4 Available area Return port 0.02 2 0.00 0 2 4 6 8 10 12 14 16 Circulating fluid flow [L/min] Fig. 8.5-2 Pump capacity (HRSE012-A-20/23, HRSE018-A-20/23, HRSE024-A-20/23) HRSE Series Product Warranty 8-9 HRX-OM-R039 Chapter

10

F F MHL2-10D Z-X85 MHL2-16D Z-X85 1 2 1 2 MHL2-10DZ-X85 MHL2-16DZ-X85 25 25 70 60 70 60 20 20 Pressure 0.6 MPa Gripping force [N] Gripping force [N] Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 50 50 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 15 15 40 40 0.5 MPa 0.5 MPa 0.4 MPa 0.4 MPa 30 30 10 10 0.4 MPa 0.4 MPa 0.30 MPa 0.3 MPa 20 20 5 5 10 10 0 0 10 20 30 40 50 60 70 0

One-touch Fittings

Chamfer dimension of R and NPT thread with sealant, and Uni thread Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 D Rz 12.5 45 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.

Title not found

) 144 12 (6) 15 Regeneration option type 032 12 Allowable regenerative power 30 W Allowable regenerative power 100 W Confirm regeneration option to be used in Model Selection. 5 168 156 Dimensions [mm] LA 30 40 LB 119 169 LC 99 149 LD 1.6 2 Model LEC-MR-RB-032 LEC-MR-RB-12 LD LC 6 6 (20) LB 63 Incremental Type Series LECSA Absolute Type Series LECSB Servo Motor (24 VDC)/Step Motor (Servo/

JXCx-OMT0005CN

4 byte 4 10 byte 5 20 byte 6 20 byte 4 byte 7 10 byte 8 20 byte 9 36 byte 4 byte 10 10 byte 11 20 byte 125 Get/Set 2 JOG *1 IO 20 - 3IO IO Number Type Name 100 Input 101 Input 102 Input 14 110 Output 111 Output 112 Output 12 113 Output 4IO Input Assembly Instance Byte Bit 7 Bit 6 Bit 5 Bit 4 Bit 3 Bit 2 Bit 1 Bit 0 0 OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 1 ALARM ESTOP WAREA AREA INP

Air Slide Table Series MXQ

= Approx. 0.102kgf) 12 12 12 Lr = 90mm MXQ12-30 MXQ12-20 MXQ12-10 MXQ12-100 0.10 0.020 MXQ12-100 0.04 MXQ12-30 MXQ12-50 MXQ12-100 MXQ12-75 MXQ12-50 MXQ12-40 Table displacement mm Table displacement mm Table displacement mm 0.08 0.016 MXQ12-50 MXQ12-75 MXQ12-30 MXQ12-40 0.03 MXQ12-75 MXQ12-40 0.06 0.012 MXQ12-20 0.02 0.04 0.008 MXQ12-20 MXQ12-10 0.01 MXQ12-10 0.02 0.004 0 0 160 40 80 120

C95Series

'H" 'e o :" ;iC:t1 32 164 173.5 :,. 40 ' 184 196 " 50"', 202 21' 9,5 -500 22 12 10'1'" 26 12,%~ -500 12 15 25 28 :, -600 27 12 15 32 ' 21~ 63' 222 238 -600 32 16 16 1~ 20 40 x 80 266 -750 16 1 61~ 36 20 50 250 100. 01~ 290 41 -750 20 25 60 270 -ZZ+Srroke Double rear clevis / (D) U l RR Z+Stroke ZZ...

End Lock Cylinder Series CBG1

I J to 350 20 18 15.5 13 14 8 12.5 12 2 12 12 35 5 25.3 37 26 M4 x 0.7 depth 7 to 400 25 22 19.5 17 16.5 10 12.5 14 2 12 12 40 6 28.3 40 31 M5 x 0.8 depth 7.5 to 450 32 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 to 800 40 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 to 1200 50 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25 depth 16 to 1200

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Refer to pages 12 through 20 for detailed auto switch specifications.