Cylinder

Description MBt~~ial Q., Flange busb Resin Trul'lnionlpin Stainless ... . Mate

Possible to transfer a workpiece at low-speed.

5 q r q w r y !5 !6 i CRQ2X MSQX CRQ2X MSQX MRQ Component Parts Component Parts Description Material No. Description Material No.

Process Valve

Note 3) Vacuum pilot type CE-compliant pilot solenoid valves will become VO307VD DZ-Q. 2 1 1 2 569 A VNB Series How to Order Pilot Solenoid Valves Valve size 1/2/3/4 Valve size 5/6/7 and vacuum pilot type VO307 Q 1 5 D SF4 5 D 23 Q Body option CE-compliant CE-compliant Coil rated voltage CE-compliant Nil Q Standard Vacuum pilot Nil V CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200

Vacuum Pad

q Pad unit Dimensions Part no.

CRQ2

8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

RB/RBL/RBQ

RS Q G Basic type: RBL1411, RBL1412, RBL2015, RBL2725 With cap: RBLC1411, RBLC1412 RBLC2015, RBLC2725 RS H A Other dimensions are the same as the basic type.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

2 q u r !0 !1 e !4 !3 w !0 !

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

MTS Air pressure supplied from A operates on both surfaces q and w. (Extension) MY q w A B Piping is concentrated in the head cover. CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Air pressure supplied from B operates on surfaces e.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

8 q y !0 !4 !9 r !1 @0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @2 @5 o @4 @3 !2 Component Parts No. Description Spring pin Seal ring Bearing Inner wiper No.

Slider Type Ball Screw Drive/11-LEFS Series

q Check the actuator label for model number. This matches the controller/driver. w Check Parallel I/O configuration matches (NPN or PNP). q w * Refer to the Operation Manual for using the products.

2–4

6 q e r t !5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.

LX

Home position switch De-energized operating type 0.1 Nm 24VDC 5% 5W (at 75C) Model Static torque Rated voltage Power consumption Brake specifications LC6D-220AD-Q (Refer to page 306 details.) LC6D-507AD-Q (Refer to page 306 for details.) Applicable driver Holding plate: MB1(1 pc.), Phillips countersunk head screw M3 x 6l (1 pc.)

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i PF2D540 o !0 u !0 !2ywr e !

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Compact Cylinder Series NCQ8

Q J E D-rod Dia.

Solid State Auto Switches

CE marking Precautions Caution D-A44C Relay, PLC 100 VAC 5 to 25 mA q Built-in 2.4 V or less (Up to 20 mA)/3.5 V or less (Up to 50 mA) Red LED illuminates when turned ON. CE marking 24 VDC (3) 5 to 50 mA 200 VAC 5 to 12.5 mA 1. Use cable whose O.D. is within the size in the figure to maintain water resistant performance. 2.

NAAMS Standards Compliant

B) In the state of A), attach the upper hard stop and adjust shim q so that there is a space of about 0 mm between the upper hard stop and the hard stop. During this step, theoretically, there is no clamping force applied to the hard stop. C) In order to generate a clamping force from the state described in step B), insert an additional shim.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42 47 37 11 10 59 11-/22-MXPJ6-10 833 Air Slide Table MXP/MXPJ6 1122Dimensions: MXP6 1122Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F.

CXS

1 e q !3 y !1 q @7 MG CXSJM20 to 32 CXSJL20 to 32 CX @5 !6 i u !7 o !5 t r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 D-X 20Data Rod cover Head cover Rod cover Head cover Component Parts No. Description No. Description Material Note Material Note Hard anodized Aluminum alloy Polyurethane q !6 Housing Bumper B Hard chromium electroplated Carbon steel NBR w !