VZM400

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

E-P HYREG

D B Valve size PVQ Sub-plate VEXD-5 VEXB-2-2 P (Port size: M5) VY1 VY1 Thread type Port size Symbol A B Port size M5 Symbol Nil F N T Thread type Rc G (7) VBA VBAT 1 8 AP100 NPT NPTF VYD-7 VEXB-4-1 Base gasket 2 4 Valve size VEX1-9-1 P VEX4-2AP Sub-plate Port size Thread type Port size Thread type Symbol A B Port size Symbol Nil F N T Thread type Rc G (7) Symbol A B C Port size Symbol Nil

High Pressure Coolant Valve: 3.5 MPa, 7.0 MPa VNH Series

Rc G NPT NPTF Nil F N T None With bracket Nil B Valve type 1 3 N.C./3.5 MPa N.C./7.0 MPa Electrical entry/With light/surge voltage suppressor D DIN terminal Seal material DZ DIN terminal with light/surge voltage suppressor A B NBR seals FKM seals Rated voltage Valve size Port size 3 2 1 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 10A 15A 20A 25A 1 2 3 4 3 8 1 2 3 4

PSE530/200

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Data 1 A single controller monitors up to 4 pressure sensors. 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 16-3-1 2 A single controller monitors up to 4 pressure sensors. 1 2 4 MPa kPa OUT1 OUT2 CH 1 2 3 4 PRESSURE SET 3 ZSE

Precision Regulator

(Note 4)The F .S. means the condition at the maximum setting pressure of the product. (F .S. 0.2MPa, IR2000) (Note 5) Repeatability: This is the reproducibility of the downstream pressure at every operation (ON/OFF) on the downstream side.

VT307

voltage suppressor 4-7-4 5 Series VT307 Manifold Specifications How to Order Manifold VT307 manifold is B mount style and available both as a common exhaust and individual exhaust model. 05 2 01 VV307 01 F V100 Mounting bracket Thread type SY VT307 manifold Nil F N T Rc G NPT NPTF SYJ Manifold valve can be easily converted from N.C.

Flow Control Equipment

Metric size 4 4 6 230 260 390 460 660 790 920 1580 1710 Controlled (Free)flow 180 Air flow (l/min(ANR)) Effective area (mm2) 2.7 3.5 4 6 7 10 12 14 24 26 Indication of air flow direction on body Note) Supply pressure: 0.5MPa, Temperature: 20C. How to Order 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 3/8 1/2 Sealant Applicable tube O.D.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Note 1) Body size AS-F AS-F With indicator Metric size Inch size 2 1/8, 1/4 3 3/8 4 1/2 Type Tubing O.D. 23 3.2 Note 2) Tubing O.D. 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" TMH 2 Elbow 04 4 06 6 08 8 10 10 12 12 16 16 ASD Control type Note) AS 0 Meter-out 1 Meter-in Indicator window direction AS-FE Note) Meter-out and meter-in types can be visually identified by color of the knob

HRX-OM-X037

Standard N *2 F *2 Chiller side 1 union Circulating fluid outlet port Filter side Rc1 NPT1 G1 CH1 Circulating fluid return port Rc1 NPT1 G1 Port size Tank drain port Rc3/4 NPT3/4 G3/4 Chiller side 3/4 union Circulating fluid outlet port Filter side Rc3/4 NPT3/4 G3/4 CH2 Circulating fluid return port Rc3/4 NPT3/4 G3/4 Tank drain port Rc1/4 NPT1/4 G1/4 1 Cooling capacity will decrease as pump

3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

N T Valve option Nil Standard type E Continuous duty type V For vacuum CE-compliant Nil CE-compliant Q Q Rated voltage CE-compliant: Electrical entry is applicable only for the DIN terminal. 1 2 100 VAC, Hz 200 VAC, Hz 50 60 50 60 3 4 5 6 110 VAC, Hz 220 VAC, Hz 24 VDC 12 VDC 7 240 VAC, Hz 50 60 50 60 Port size 50 60 Note 1) CE-compliant: Electrical entry is applicable only for the DIN

Electro-pneumatic Proportional Valve Series VEF/VEP 1

IR Repeatability 3% F .S. VEX Sensitivity 0.5% F .S.

Electro-pneumatic Proportional Valve Series VEF/VEP

VEF2121 VEF3121 VEF2141 VEF3141 VEF2121 VEP3121 VEP3141 AV Item 4 1 8 3 , 4 1 8 3 , 4 1 , 8 3 2 1 8 3 , 2 1 4 3 , 8 3 , 2 1 4 3 , , Port size Rc AU Fluid Air (Inert gas) 1.5 MPa 1.0 MPa Proof pressure AF Maximum operating pressure 0 to 50C (With no condensation) Ambient and fluid temperature AR 0.03 s or less 0.03 s or less 0.05 s or less 0.05 s or less Response time Hysteresis 3% F .S.

DOC1001322

G1,Symbol N: NPT1) Tank drain port Rc3/4 (Symbol F: G3/4,Symbol N: NPT3/4 Supply side pressure range MPa 0.2 to 0.5 Automatic fluid fill function (Standard) Supply side fluid temp. range 5 to 35 Automatic fluid fill port size Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Over flow port size Rc1 (Symbol F: G1, Symbol N: NPT1) Stainless steel, Copper (Brazing filler metal for the heat exchanger

JXCx-OMY0008

A B-1 Brown 2 A A-1 Red 1 Cable length (L) B B-2 Orange 6 B A-2 Yellow 5 1 1.5m COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 (3) 5 5m Shield Cable color Terminal No. Vcc B-4 Brown 12 GND A-4 Black 13 A B-5 Red 7 Actuator cable type A A-5 Black 6 B B-6 Orange 9 Nil Robotic type cable B A-6 Black 8 (4) 3 S Standard cable Signal name Terminal No.

IDX-OM-W028

3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical maintenance . 4 1 4 2 1 Cleaning of ventilation grille (suction grille) . 4 1 4 2 2 Service parts . 4 1 4 2 3 Cleaning of the bowl assembly. 4 2 Chapter 5 Troubleshooting . 5 1 5 1 Cause and countermeasure of errors . 5 1 5 2 How to reset the thermal relay and high pressure switch . 5 3 Chapter 6.

Precision Regulator

Setting spring Setting knob Flapper Diaphragm C Nozzle Diaphragm A Fixed orifice Diaphragm C SUP.side passage BLEED Exhaust valve SUP OUT Main valve Valve guide Exhaust F i x ed ori f i ce S UP F or ce N F o rce N Nozzle flapper MPa/ m Diaph.(C) m 2 Main valve MPa/ m (S) 1 1 Setting spring N/m Displ Press Press.

ISE7xG.eng

[F 3] Digital filter setting 0.00 ms [F80] Power saving mode OFF [F81] Security code OFF [F 4] Auto-preset function OFF Press the SET button between 3 and 5 sec. Press the SET button between 1 and 3 sec. 0.0% [F 6] Fine adjustment of display value [F90] Setting of all functions OFF Press the SET button once.

IDX-OM-W029

i-2-3 . i-4 i-2-4 . i-4 i-2-5 . i-4 i-2-6 . i-5 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 . i-8 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Made to Order (Refer to page 543 for details.) 542 Series AS-FG Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type How to Order AS 2 1 0 3 F G 01 06 Body size Lock nut option Nil J Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Control type AS 0 1 Meter-out Meter-in Made to Order (Refer to the below for

Series LQ3 High Purity Fluororesin Fitting

F (E) L H G F E B M L 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 9.5 12 18 20 28 36 4.8 6 9 10 14 18 10 17 22.5 24.5 27 30 3.5 4 5 6 7 8 14 20 25 29 37 49 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3T1A LQ3T2A LQ3T3A LQ3T4A LQ3T5A LQ3T6A M 1/4 (E) (E) G H L L Panel Union : LQ3P J Panel Thickness (Max. t) (mm) Inch Size H W2 W1 Model Tubing O.D.