Compact Cylinder

26.5 Weight 57 g 29 16 24 + Stroke 26 23% volume reduction 25.5 + Stroke 29 Weight 61 g 42% weight reduction 32 Weight 106 g 36 20 40% volume reduction 30 27.5 + Stroke 34 + Stroke 36 Weight 82 g 45% weight reduction 36 Weight 150 g 40 25 40% volume reduction 30 + Stroke 33.5 37.5 + Stroke 40 Weight 135 g 33% weight reduction 43.5 1 32 Weight 202 g 49.5 35% volume reduction 32.5 + Stroke 41

Thermoelectric Bath

) 1.2 (30) 1.2 (30) 1.6 (41) 1.9 (49) 1.0 (25) 5.8 (148) 5.4 (138) 5.4 (138) 0.35 (9) (8.0 (204)) 0.59 (15) 7.8 (198) DC connector Facility water outlet Rc1/4 Facility water inlet Rc1/4 For -N spec.

Slider Type Ball Screw Drive/11-LEFS Series

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%

CLA

mmt ,-.ow "",.f I Bore size (mm) A DB BN BP BO DC 00 oE F GA GB GC GO GL GR J K LZ MM Without boot With boot 40 500 25-500 27 30 60 96 '/. y. 44 16 32 10 85 15 26 54 10 10 M8Xl.25 6 71 M14X1 .S 50 600 25-600 32 35 70 108 'I, 'I< 52 20 40 10 95 17 27 59 13 12 M8X1.25 7 80 M18xi.S 'I, 35 86 40 1 -'02 115 129 20 25 40 52 10 14 17 32 37 102 113 67 72 18 15 17 63 80 26 30 7 99 -SOO 750 32600 41

VZA2000

0 to 1.0 VZA4121, 4141 Pilot pressure range (MPa) 2 3 4 2 3 4 VZA4 21, 4 41 0.1 to 1.0 Impact/Vibration resistance (m/s2) Note) 150/50 Operating pressure Pilot pressure Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal ON and OFF .

Vacuum Unit

(Ejector system) 41 A Vacuum Unit ZK2mA Series Electrical Wiring Specifications D-sub Connector Flat Ribbon Cable Connector Triangle mark indicator position Polarity Terminal Connector terminal no. Terminal number Polarity number Connector terminal no.

Stability of suction position,

ZP3EA-YAL16 [Weight: 116.6 g] M16 x 1.5 Width across flats 22 Width across flats 19 M14 x 1 6 6 25 24.5 49.5 16 5 5 25 41 M5 x 0.8/ Effective thread depth 5 Rc1/8 14.5 9 9.9 Applicable pad part no. ZP3E-63UM ZP3E-80UM ZP3E-100UM ZP3E-125UM ZP3E-63BM ZP3E-80BM ZP3E-100BM ZP3E-125BM 7 M10 x 1 M16 x 1.5 Applicable pad part no.

ZSE30A(F)/ISE30A

Note) When the display calibration function is used, the set pressure value may change 1 digit. 41 ZSE30A(F)/ISE30A Series The F in ( ) shows the function code number. Refer to the Operation Manual for the details of operation procedures and function codes.

CRQ2

L L 13 16 22.5 24.5 28.5 Size Screw M4 M4 M6 M8 M8 10 15 20 30 40 11-8-8 9 Series CRQ2 Compact Rotary Actuator Rack & Pinion Style Proper Auto Switch Mounting Position at Rotation End Solid state switch Reed switch Rotating angle Size Operating angle ( m) Operating angle ( m) Hysteresis angle Hysteresis angle 75 (41) A 10.5 13.5 13.5 17.5 26 32 33 41 38 47.5 B 13 22.5 18 30.5 34.5 53.5 45

Rotary Cylinder Series MRQ Size: 32, 40 1

The standard angle adjustment range of 5 (one side) is changed to in this type. + 5 95 (mm) E Mounting screw Y Q Stroke 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 1 to 4 6 to 9 11 to 14 16 to 19 21 to 24 26 to 29 31 to 39 41 to 49 51 to 65 66 to 74 76 to 90 91 to 99 Size 58.5 ( 5 Stroke)/2 61 ( 10 Stroke)/2 61 ( 15 Stroke)

MVGQ

For details, refer to page 10-20-41. 10-16-20

C85

7 2C 2D e r t y u i Hard chrome plated Chromate Nickel plating (Switch type only) Nickel plating 6-11-41 41 Series C85R Dimensions [First angle projection] Double acting, Single rod Base mounting/C85RAF Y Without magnet, Built-in magnet (Band mounting type) 8 to 16 Stroke B XB G2 EE WH G1 EE SW 2-LD D D KK NA NA B LH K AM C N2 LX NA N1 NA S + Stroke H L ZZ + Stroke Head cover Y Head cover

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Use the collision speed when calculating dynamic moment. 12 28 41 MXP16 26 Symbol Unit Definition Definition Symbol Symbol Unit mm An (n = 1 to 3) V Collision speed mm/s Correction values of moment center position distance J E Va Average speed Kinetic energy mm/s J Emax W Load weight Allowable kinetic energy kg mm Ln (n = 1 to 3) Wa Allowable load weight Overhang kg Nm M (Mp, My, Mr) We

Size: 1/2, Model Combination: AW+AL, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 1/2, Model Combination: AF+AR+AL, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 1/2, Model Combination: AF+AR, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 1/2, Model Combination: AF+AR, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.O., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 1/2, Model Combination: AF+AR+AL, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -

Size: 1/2, Model Combination: AF+AR+AL, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.C., Size 31 & 41, Pressure Relief Valve: Downstream Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: Upward Handle

Size: 1/2, Model Combination: AF+AR+AL, Port Size: 1/2, Size 41, Accessory: Float Auto Drain, N.O., Size 31 & 41, Pressure Relief Valve: w/o Valve, Option: Metal Bowl w/Sight Glass, Size 31 & 41, Handle Orientation: -