M Series

X83 M3 Note 1) M-3G2 M5 Note 2) M-5G2 X226 Gasket material: Stainless steel 304, FKM Applicable thread Gasket part No. M3 M3G-DPH00489 X112 Gasket material: Stainless steel 316, special FKM Applicable thread Gasket part No. M5 M-5G3 Note 1) Compatible with models using M3 excluding M-3-2.

MHK2

mounting attachment) M3 x 0.5 (Finger closing port) Auto switch mounting groove (2 positions) Adjustment needle for finger speed 11.6 3 9.4 S 4 6 0 0.05 4 7 7 Note) For single acting, one port is used as a breather port. 2.3 17.5 M3 x 0.5 (Finger opening port) MHKL2-12: Long stroke type 9 2-M3 x 0.5 thread depth 5 (Mounting thread) 20 3H9 depth 3 +0.025 0 13H9 depth 1.5 +0.043 0 2-M3 x 0.5

MHK2

17.5 M3 x 0.5 (Finger opening port) MHKL2-12: Long stroke type 9 2-M3 x 0.5 thread depth 5 (Mounting thread) 20 3H9 depth 3 +0.025 0 13H9 depth 1.5 +0.043 0 2-M3 x 0.5 thread depth 6 (Mounting thread) 4-M4 x 0.7 thread depth 8 (Mounting thread) Bottom hole 3.4 through (Mounting hole) 0 0.1 5 Open 20 +1.2 0 4 8 10 0.02 41.6 30 20 3 22 43 0 0.2 Closed 9 26 3H9 depth 3 +0.025 0 15 36 13 57

Wedge Cam Operation Provides

for mounting attachment) M3 X 0.5 (Finger closing port) Groove position for auto switch mounting (2 positions) Adjustment needle for finger speed 11.6 3 9.4 S 4 6 0 -0.05 4 7 7 Note) For single acting, one port is used as bleed port. 2.3 17.5 M3 X 0.5 (Finger opening port) MHKL2-12l/Long stroke model 9 20 2-M3 X 0.5 thread depth 5 (Mounting thread) 3H9 depth 3 +0.025 0 2-M3 X 0.5 thread

3 Port Air Operated Valve Series SYJA300 1

M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

SYJA300

M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.

VQ

Dimensions Grommet VQ1l0l-lGlM5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 Mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking style manual override 30.7 28 11 A P (4.1) (5.9) (5.9) 7 5 5 5 4.9 9.7 4.9 3-M5 (M3) (18.1) ( ): M3 Broken line: locking style manual override 2.9-8 Series VQ100 Dimensions L plug connector VQ1l0l-lLlM5 (M3) (37.8) 31.4 Manual override 6.1 4.9 12.4

ZX

(VJA314) ZX1-VJ114K1, J1 q Misc. 1 2 M3 M5 M3 x 0.5 Pilot port/ External release port M5 x 0.8 ZX1-VJ3 4w K3, J2 1 2 e ZX1-VJA3 4 K8 Table (4) How to Order Ejector Assembly Air operated N.C. (ZX1A) ZX1AK6 r 05 ZX1 1 D W Table (2) How to Order Solenoid Valves Assembly no.

3 Port Solenoid Valve Series VQ100

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

P EXH V V V V PE ZQ1 1U-K1 5 6 E F F K E F F KType J1 ZQ1 1U-J1 (With L-type plug connector) Bracket A (Standard) Suction filter Vacuum pressure switch Supply valve 62.8 Pilot pressure exhaust (PE) port M3, Atmospheric release Note 4) 2 x 3.2 through (Body mounting hole) Air pressure supply (P) port M5 Note 4) 69.4 76.3 (63.1) (63.1) Vacuum (V) port (M5) Note 4) SMC PE 20.3 29.4 3 20.2 P

Air preparation filter

at outlet Note 5) Max 1mg/m3 (ANR)(0.8ppm) -12- Doc. no.

Wedge Cam Operation Gripper Series MHK2

X 0.5 thread 4 deep 15 3H9 3 deep +0.030 0 2-M3 X 0.5 thread 6 deep 13H9 1.5 deep +0.043 0 4-M4 X 0.7 thread 8 deep Bottom hole dia. 3.4 through-hole 0 -0.1 5 Open 13 +1.2 0 4 8 10 0.02 32.6 28 34 22 20 0 -0.2 Closed 9 22 3H9 3 deep +0.030 0 15 31 13 63 20 0.05 Groove position for auto switch mounting 4-M3 X 0.5 (Attachment mounting thread) M3 X 0.5 (Finger closing port) Groove position

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 35L x 40L x 45L x 50L x 55L x 60L CQ-M3 x 35L x 40L x 45L x 50L x 55L x 60L CQ-M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L CQ-M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M3 x 25L x 30L x 35L x 40L x 45L x 50L CQ-M5 x 25L x 30L x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L CQ-M5 x 30L x 35L x 40L x 45L

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 8 6.5 N x M3 x 0.5 thread depth 4.5 Note 1) Note 2) Retraction end adjuster Extension end adjuster 3 depth 3 +0.03 0 22.5 (Extension end adjuster) 3.5 6.5 4 0.7 6.5 (Extension end adjuster) 0.3 22.2 15 17 36 24 16 32 1 12 16 F 3 depth 3 +0.03 0 5 4 x M3 x 0.5 thread depth 4 2 N 1 x F 10 30 3 x M4 x 0.7 thread depth 6 M 24 14.6 KA NA x M3 x 0.5

Slider Type/Ball Bushing Bearing

CY1H25 (Nm) 64 56 50 40 30 50 40 M1 1.5 10 13 M2 2.5 16 16 M3 1.5 10 13 M1 28 56 64 M2 26 85 96 M3 28 56 64 Model CY1H25 CY1HT25 CY1HT32 Model CY1H10 CY1H15 CY1H20 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm 10 10 2 2.5 3 4 5 3 4 5 CY1H10 M3 2 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 100 300 500 1000 1000 70 M1 M2 Piston speed mm/s Piston speed mm/s Graph (3) Graph (2) Moment generated

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Male thread 100 100 Mounting 125 125 M16 x 1.5 Pad type Female thread H Heavy duty Material N S NBR Silicon rubber Urethane rubber Fluororubber U F E EPR 1190 Series ZPT Vacuum Pad: Large/Heavy Duty Type Vertical Vacuum Entry: Without Buffer ZPT H-A14 (Male thread) 40 50 ZPT H-B (Female thread) 40 50 1/8 (Rc, NPT, NPTF) M14 x 1 Width across flats 24 Hexagon width across flats 19 28 3 x M3

PF2A7H.eng

Accumulated output mode Excessive accumulated flow Lower digits Exceeds the range of the 2nd. turn of flow indication. ft3x106 ft3x103 m3x103 m3 m3 ft3 L/min L CFM ft3x106 ft3x103 m3x103 m3 m3 ft3 L/min L CFM ANR OUT ANR OUT Time Do not touch the terminals and connectors while the power is on.

Series SYJA300 3 Port Air Operated Valve

3 Port Air Operated Valve Series SYJA300 Model Compact/Lightweight Copper free Effective area (mm2) (Cv) Valve model Actuation Port size Weight (g) Pilot port size SYJA312-M3 N.C. M3 X 0.5 Body ported 0.9 (0.05) 18 There are no copper parts that come in contact with the media; suitable for copper free applications SYJA322-M3 N.O.