MK

3 I = m a2 12 I = m2 2r 2 5 4.1-21

V

U06 6 7 2.5 7 12 0.8 ZP08U U08 8 9 2.5 7 12 1 Part No Type G C B D E F Y ZP10U U10 10 12 4 13 7.7 12 3 ZP10D D10 10 12 4 13 10.7 15 6 ZP13U U13 13 15 4 13 7.7 12 3 ZP16D D16 16 18 4 13 11.7 16 7 H Y Part No Type A B C D E F G ZP16U U16 16 18 4 13 8.2 12.5 3.5 ZP25D D25 25 28 4 15 15.5 20 10 ZP06B B06 6 7 2.5 7 13 3.3 9.1 4 ZP20U U20 20 23 4 15 9.5 14 4 ZP40D D40 40 43 7 18 24.2 29 17 ZP08B

LJ1H

LEC-MR-RB-12 LEC-MR-RB-12 LEC-MR-RB-12 A1 A2 B1 B2 a = 3000 a 200 L3 Mey 0 5 10 20 15 Transfer load m (kg) Refer to page 45 for deflection data.

3 Port Solenoid Valve

double solenoid. 1 to 12 stations 1 to 12 stations Valve stations D-sub connector 15 pins D-sub connector 26 pins Refer to page 19.

SFOD-OMT0009CN

11 () 12 () LE 1 800 1 1

Low Friction Cylinders Series MQ

D30 10 to 50,75,100 68.5 12 40 10 to 50,75,100 70 12 -X (Dimensions other than A and L are the same as the rod side flange type.)

Compact Manifold Regulator Series ARM5

Stations 1 2 3 4 5 6 7 8 9 M SMC 56 28 110.5 AXT100-DR-8 135.5 AXT100-DR-10 SMC SMC K K P P C C U U O O S S L L H H 160.5 AXT100-DR-12 11.5 8 185.5 AXT100-DR-14 12 12 3 210.5 AXT100-DR-16 248 AXT100-DR-19 AXT100-DR-21 273 298 AXT100-DR-23 81 16 323 AXT100-DR-25 AXT100-DR-28 360.5 33.5 14 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 18 28 52.5 39 28 12 12 5.3

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

VDC) Brown DC (+) Load Main circuit Main circuit (Analog output) 1 k Black OUT + + 12 to 24 VDC 12 to 24 VDC Blue LINE () Load Blue DC () Load Install the load either on the LINE (+) or LINE () side.

Table of Contents

F9BWV Relay, PLC 2-wire IC circuit No 5 V, 12 V 100 V or less 3-wire (NPN) IC circuit 5 V, 12 V 3-wire (PNP) IC circuit 2-wire 12 V Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 mNil (Example) M9N 3 mL (Example) M9NL 5 mZ (Example) M9NZ Solid state switches marked with are produced upon

MY1

12 12 11.5 11.5 Operating range Note) Operating range Note) Perpendicular electrical entry is not available for 50 and 63.

VQ7-6/7-8

(bottom) One-touch fitting 12 (top) One-touch fitting 12 (both sides) Mixed 02D 02U 02B 03D 03U 03B C12D C12U C12B Note) When ports are mixed, indicate piping specifications using the instructions and manifold specification sheet on pages 33 and 34.

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gom serles zPR

Pin Cylinders Series CJP2/CJP

Relay, PLC 24 V Yes Grommet 3-wire (NPN) IC circuit Diagnostic indication (2-color) 5 V, 12 V 3-wire (PNP) 12 V 2-wire A96V A96 IC circuit 5 V 3-wire (NPN equiv.)

Vacuum Unit Ejector / Vacuum Pump System

selection function Note 12) NPN 2 outputs F SI unit only Note 13) -100 to 100 H PNP Unit selection function Note 12) 2 outputs J SI unit only Note 13) K Unit selection function Note 12) NPN Pressure switch for 1 output Q SI unit only Note 13) -100 to 100 vacuum with energy R PNP Unit selection function Note 12) saving function Note 11) 1 output S SI unit only Note 13) N Without pressure

Vacuum Unit Ejector / Vacuum Pump System

Maintenance 41 8.1. Maintenance 41 8.2. Replacement Procedure 42 9. Specifications 47 10. Port Layout 52 11. Exhaust/Flow Rate Characteristics 62 11.1. Ejector Exhaust Characteristics/Flow Rate Characteristics 62 11.2. Vacuum Pump Flow Rate Characteristics 64 11.3. Vacuum Release Flow Rate Characteristics 64 12. Limitations of Use 66 13. Troubleshooting 67 -1No.

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-12 16 4 32 6 18 6 35 8 20.5 8 39 10 Series SY3000 SY5000 SY7000 Part No. 22 10 43 12 SY3000-52-2A 24 12 45.5 14 SY5000-52-2A SY3000/5000 DIN rail dimensions and weight SY7000-52-2A VZ1000-11-1Blocking disk indication stickers Refer to L dimensions Enter a number from the DIN rail dimension table below in the .

ARM10/11

VE 3 56 SMC AXT100-DR-8 110.5 28 AXT100-DR-10 135.5 SMC SMC VY1 K K P P C C U U O O S S L L H H AXT100-DR-12 160.5 8 AXT100-DR-14 185.5 12 12 G 11.5 AXT100-DR-16 210.5 AXT100-DR-19 248 PPA AXT100-DR-21 273 AXT100-DR-23 298 AL 81 AXT100-DR-25 323 AXT100-DR-28 360.5 33.5 14 16 OUT IN OUT IN ARM11BC2-08 Handle position: Bottom L2 L2-10.5 L1=(28 x n)+36 52.5 18 28 39 28 12 12 5.3 3 5.5 SMC SMC

MU

4 M8 X 1.25 Depth 13 M10 X 1.5 Depth 15 M10 X 1.5 Depth 15 M12 X 1.75 2.4-12 Plate Cylinder/Single Acting Spring Return/Extend Series MU Dimensions Axial foot (mm) ZZ 114 127 143 169 179 Y 6 8 10 11 14 X 12 16 18 21 24 LZ 23 27 31 37 48 LY 56 71 89 109 129 LX 11 12 15 18 22 LT 3.2 4.5 4.5 5 6 LS 84 95 106 126 133 LH 29 37 46 57 67 LD 5.5 6.6 9 11 13.5 Model MUL25 MUL32 MUL40 MUL50 MUL63