3 Port Solenoid Valve Series VQ100 1

17 stations For obtaining the flow rate, refer to page 4-1-6.

Plate Cylinder with Lock Series MLU

MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

Compact Cylinder with Air Cushion and Lock Series RLQ

Applicable bore size (mm) 32, 40 17 11 15.8 14 M8 x 1.25 8 7 6 YU-03 50, 63 17 13 19.8 18 M10 x 1.5 10 7 6 40 YU-05 15 Compact Cylinder with Air Cushion and Lock Series RLQ Auto Switches/Proper Mounting Positions and Height for Stroke End Detection D-A9 D-F9 D-F9W D-A9V D-F9V D-F9WV D-F9BAL B Approx. Hs Approx.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

. 4 stations 4 1 SOL. 5 stations 5 SOL. 6 stations 6 (b) SOL. 7 stations 7 2 SOL. 8 stations 8 SOL. 9 stations 9 Black White SOL. 10 stations 10 SOL. 11 stations 11 SOL. 12 stations 12 SOL. 13 stations 13 SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 18

AC Servo Motor Driver (Pulse input type)

Parameter Configuration using Setup software (MR Configurator2TM)17 5.1 Setup software (MR Configurator2TM) . 17 5.1.1 Installation Method .17 5.2 Basic driver set-up for Initial Test Drive . 17 5.2.1 Start up the Setup software (MR Configurator2TM) .18 5.2.2 System Settings .19 5.2.3 Model Selection .19 5.2.4 Driver ON LINE Check .20 5.2.5 Help Function .20 5.3 Parameter setting (Driver

ARM10/11

17 5.

VNC

Description VNC811-65F VNC911-80F Plate assembly Valve material i Pilot solenoid valve VN8-A3CA VN8-A3CB VN9-A3CA VN9-A3CB e FKM NBR VO301-00T-X302 (Refer to page 17-4-29 for part no.) 17-4-28 9 Series VNC Coolant Valve: Air Operated/External Pilot Solenoid How to Order Pilot Solenoid Valves Valve size 1 Valve size 2 to 9 VO301-00 T X302 SF4 1 D Z 23 Manual override Nil A B Coil rated voltage

VVXA21/22

The right side of the common port provides plug. 17-3-99 4 The VX series will be revised shortly.

VQ

Wire color Black Brown Red Orange Yellow Pink Blue Violet Gray White White Yellow Orange Yellow Pink Blue Violet Gray Orange Red Dot marking VQ 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 4 1 5 10 VQZ 16 11 20 17 VZ Multi-connector pin arrangement DIN rail mounting bracket VS White Black Black Red Red Red Black Black White Pin No. 1 SOL. 1 station SOL. 2 stations 2 SOL. 3 stations

7

Refer to back page 50 for Safety Instructions and pages 17 to 19 for 2 Port Solenoid Valve for Fluid Control Precautions.

High Vacuum Angle Valve

For details, refer to Common Option [2] Mounting position of the heater on page 17.

Bernoulli Gripper

Body material ZNC 80 Nil 80 70 27.5 17 74 84 M5 x 0.8 10 17 2.5 20 2 8.5 1.0 8.3 12 3 5 1 5.8 15.2 1.0 193 P 119 S 568 *1 The stopper, vibration suppression cover, and plug weights are not included. 14 ZNC Series Specific Product Precautions 1 Be sure to read this before handling the products. Design / Selection Mounting 1.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 101 102 100h9 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 119 120 116h9 118h9 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

17 26 31 TT 5.4 (Max. 11) 5 (Max. 11) 5 (Max. 16.5) 8 (Max. 20) 9 (Max. 25) 13 (Max. 33) 13 (Max. 38) h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 Model MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 W 5.8 5.8 6.5 8.5 10 14 14 39.5 45.5 53.5 67 83 106 129 14.6 20 24 29 35 40 52 7 10 12 14 17 20 26 58 58 70 88 104 128 152 -X 20Data With low load shock absorber + Adjusting bolt MY1W Bore size Stroke L

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Tapped on body side Compact: Height 17 x Width 20 Free piping Stopping accuracy is stable, because the guide block and the collision part of a shock absorber are one-piece construction. Compact shape is realized by the cylinder built into the linear guide block. Material of body and table is martensitic stainless steel. Piping possible in two directions: vertical or lateral.

Title not found

Teaching box (with 3 m cable) Equipment for input setting data of controller 17 Step Motor Controller (Servo/24 VDC) Servo Motor Controller (24 VDC) Series LECP6 Series LECA6 How to Order LE C P 6 N Caution Note 1) CE-compliant products q EMC compliance was tested by combining the electric actuator LEY series and the controller LEC series.

Ionizer Nozzle type IZN10 Series IZS

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5

Compact Manifold Regulator

AP100 17 735 ARM11A/B Series Pressure Switch Block 56 ARM11AW Z A 0.4 0.2 0.6 0.5 20 MPa 24 q w 0.3 0.1 1. Accessory 2.

EXxx-OMN0035CN

No.EX-OMN0035CN-A / Series EX600-DX## EX600-DY## EX600-DM## SMC 3 9 10 12 12 14 17 17 20 20 LED 25 28 28 31 34 34 36 36 LED 40 42 42 44 46 46 48 48 LED 52 54 54 56 -1No.EX-OMN0035CN-A 57 58 58 58 58 58 59 -2No.EX-OMN0035CN-A (ISO/IEC)(JIS) 1 2 *1 ISO 4414: Pneumatic fluid power -General rules relating to systems.

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7