Uniaxial Electric Actuator Series LJ1

100% Horizontal load 50% Horizontal load 100% Horizontal load 50% 50 100 200 50 100 200 20 20 10 10 5 5 Lateral load 100% Lateral load 50% Lateral load 100% Lateral load 50% 1 2 1 2 0.5 0.5 Horizontal empty weight deflection Lateral empty weight deflection Horizontal empty weight deflection Lateral empty weight deflection 0.1 0.2 0.1 0.2 100 200 300 500 1000 100 200 300 500 1000 Load point

Peltier-type Chiller Thermo-con/ Compact Type

100 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] For the high-pressure pump (Option), the cooling capacity decreases by approx. 20 W.

Refrigerated Air Dryer

AMD AMH Data A: Inlet Air Temperature Data B: Ambient Temperature Data C: Inlet Air Pressure AME Inlet air temperature Ambient temperature Inlet air pressure MPa psi Correction factor F C Correction factor AMF Correction factor IDFB3E to 37E IDFB55E, 75E 1.31 F C 77 90 95 100 104 25 32 35 37.8 40 75 100 110 120 125 150 175 200 232 0.53 0.70 0.76 0.83 0.86 1.03 1.21 1.38 1.60 1.24 0.95 ZFC

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

For 90 rotation Single vane (S): 80 to 100 adjustable Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 180 10 10 22.5 Allowable radial load (N) Size Allowable thrust load (N) Positioning pin hole 20 1 15 40 3 30 50 7 60 Adjustment bolt (A) Adjustment bolt (B) 60 20 80 Single vane (S): 170 to 190 adjustable For 180 rotation 11-5-6 6 Series MSUA Rotary Table:

Information

W 200 W 400 W 100 W 200 W 400 W Type AC servo motor (S2) AC servo motor (S3) AC servo motor (S4) AC servo motor (S6) AC servo motor (S7) AC servo motor (S8) C S1 S3 S41 SSCNET III type (For absolute encoder) Incremental S S5 S7 S81 Power supply voltage Absolute 1 2 100 to 120 VAC, 50/60 Hz 200 to 230 VAC, 50/60 Hz 1 Not applicable for Series LEY Dimensions LECSAm 40 135 2 x 6 Mounting hole

HRX-OM-R005

Ambient Ambient temperatur temperatur Heating capacityW Heating capacityW 1500 e e 1500 40 32 25 20 5 40 32 25 20 5 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-6 Heating capacity(HRS060-W-20-(BJM)) HRS Series 9.4 Cooling capacity 9-7 HRX-OM-R005 Chapter 9 Documents 9.6 Pump capacity 9.6.1

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

How to Order ZFB 100 04 IN/OUT applicable tubing O.D.

DOC1001322

Table 7.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulphate ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70

Trimmer Auto Switch

Series 10 12 16 20 25 32 40 50 63 80 100 MGP 3.5 5.0 4.5 4.5 5.5 5.5 5.5 5.5 5.5 6.0 MGZ 5.5 6.5 6.5 CA2 4.0 4.0 6.0 6.0 6.0 Sensor unit: D-F7K Air cylinder Unit: mm Tube I.D.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 12 10 8 6 4 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M50.8 6, 10, 16, 20 AS231FG-01 AS221FG-01 20, 25, 32 R 1/8 AS231FG-02 AS221FG-02 20, 25, 32, 40 R 1/4 AS331FG-02 AS321FG-02 40, 50, 63 R 1/4 AS331FG-03 AS321FG-03 40, 50, 63 R 3/8 AS431FG-04 AS421FG-04 63, 80, 100 R 1/2

VZS

VAC, 100 VDC or less.

Precision Cylinder Series MTS

MTS 8, 12, 16, 20, 25, 32, 40 Precision Cylinder How to Order Port direction Bore size Nil P Standard piping type Axial piping type 8 8mm MTS 8 A90L 20 8 MTS 20 A90L 100 12 to 40 Bore size Number of auto switches Nil S 2 pcs. 1 pc. 12 16 20 25 32 40 12mm 16mm 20mm 25mm 32mm 40mm Auto switch type Without auto switch Nil Refer to the table below for auto switch part numbers.

Series 10-MGF Guide table ø40, ø63, ø100

Series 10-MGF Guide table 40, 63, 100 How to Order 10 M G F 63 50 Y59B Number of auto switches 2 pcs. 1 pc. 10 Clean series Relief type Nil S Bore size (mm) Reed switch Type of auto switch Port type Z73 Solid state switch Y59A,Y59B Bore size Type Rc NPT G Symbol Nil TN TF 40, 63, 100 Cylinder stroke (mm) Model Cushion Bore size (mm) 40 63 100 Standard stroke (mm) Auto switch mounting Action

Plug-in/Plug Lead: Single Unit

with AMC610-10 installed ( 105 with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159(172.5) 159(172.5) 118 (135) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) 158.7 158.7 6-Rc 3/4 1(P), 5(R1), 3(R2) port 6-Rc 3/4 1(P), 5(R1), 3(R2) port 2-G1 (Electrical entry) 47.5

RB/RBL/RBQ

Suitable 20 for m and 0.7 for . 1000 ML2B 6 10 15 20 25 30 40 50 63 80 100 125 140 160 180 200 250 300 0.057 0.099 0.113 0.120 0.184 200 300 400 500 E1 4.9 J In the case of cylinder stroke at load and free horizontal impact, 0.157 0.274 0.314 0.334 0.511 C J G5-S E1 or E substitute respective figures for Data A in order to calculate E1. 100 Impact object weight m or corresponding weight

RB/RBL/RBQ

Suitable 20 for m and 0.7 for . 1000 ML2B 6 10 15 20 25 30 40 50 63 80 100 125 140 160 180 200 250 300 0.057 0.099 0.113 0.120 0.184 200 300 400 500 E1 4.9 J In the case of cylinder stroke at load and free horizontal impact, 0.157 0.274 0.314 0.334 0.511 C J G5-S E1 or E substitute respective figures for Data A in order to calculate E1. 100 Impact object weight m or corresponding weight

HRX-OM-R016

25 32 40 1500 1500 1000 1000 500 500 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz The cooling capacity will be reduced by 300W when option: T and MT are selected.

VM

1 Mechanical Valves Series VM Mechanical Valves Series VM Mechanical Valves SA VA Model VM1000 VM100 VM200 VM400 VZM500 VZM400 VFM300 VFM200 VM800 SA Dimensions (mm) Side ported 11 x 36 x 16 Bottom ported 11 x 28 x 25 Side ported 17 x 44 x 25 Bottom ported 17 x 44 x 30 25 x 40 x 52 21 x 35 x 53 18 x 28 x 87 18 x 30 x 91 26 x 35 x 94 23 x 40 x 115 30 x 40 x 57 VA VM Courtesy of Steven Engineering

Model Selection 1

VCA20/30/40 Single unit Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17-2-14 VV2CA2/3/4 Manifold N.C. VCB20/30/40 17-2-24 Single unit N.C. 17-2-32 VCL20/30/40 N.C. Single unit VV2CL2/3/4 17-2-36 N.C.

PF3W7x.eng

Excessive accumulated flow 5% of maximum rated flow [00.05] 00.05 gal/min (4 L type) [00.21] 00.21 gal/min (16 L type) [000.5] 000.5 gal/min (40 L type) [001.3] 001.3 gal/min (100 L type) [000.3] 000.3 gal/min (250 L type) Temperature upper limit exceeded The fluid temperature is above 110 oC. Reduce the fluid temperature.