Vacuum System Peripherals:

Flow capacity (l/min (ANR)) Oil mist concentration at outlet side 300 750 1500 2200 3500 Filtration (m) Port size Rc Model AM150 AM250 AM350 AM450 AM550 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 Max. 1.0 mg/m3 (ANR) ( 0.8 ppm) , , , , , , , , , 1 1 0.3 1 2 3 4 3 4 1, 1 2 1 , 2 AM650 6000 AM850 12000 1 2 Can produce with auto drain type, drain piping type.

VCA

Material HNBR: Nitrile hydride rubber 500 700 500 1000 1500 800 1000 1200 1000 500 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 500l/min (ANR) is P = 0.64MPa for a 3 orifice, and P = 0.35MPa for a 4 orifice.

Series VQ Base Mounted Metal Seal/Rubber Seal

VVQ10001C AXT661 A Lead wire length 6 43 Lead wire length (mm) Manifold 300 600 1000 1500 2000 2500 3000 20 25 30 300mm 600mm 1000mm 2000mm 3000mm 1 VV5Q11 Connector 4 wire 2 wire 43 44 6 10 15 6 10 20 30 Without connector With connector/4 wire 1 2 With connector/2 wire Blank plate with a connector for individually outputing electricity to drive a single valve or equipment that are not

2/3 Port Valve

(MPa) Port size Rc(PT) Solenoid valve Air valve 170 0.03 AC 1.0 VXF2150 530 10 to 60 VXF2150 VXFA2150 2.0 1.0 20 9.5 3 4 DC 0.7 VXFA2150 350 VXF2160 580 AC 0.03 1.0 1.0 10 to 60 VXF2160 VXFA2160 2.0 1 27 18 330 VXFA2160 400 DC 0.7 VXF2280 1500 AC 1.0 1.0 10 to 60 VXF2280 VXFA2280 1 2.0 0.03 40 45 810 Solenoid 1 2 VXFA2280 1300 DC 0.7 Note 1) The dew point shall be 10C or less.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Nil 6 10 15 20 25 30 300 mm 600 mm Misc. 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to Order ZM Nozzle diameter Body style Standard supply pressure H 0.5 MPa 05 0.5 mm 2 For single unit M 0.35 MPa (Except nozzle diameter 05 type) 07 0.7 mm 10 1.0 mm 4 For manifold, common SUP 13 1.3 mm 6 For Manifold, individual SUP 1 For single unit 3 For manifold, common

ZX

ZH 600 3 Gray (2 pcs.) 1000 1500 2000 2500 3000 ZU ""30 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL Vacuum release D port ZY Valve Unit ZQ Air supply release A port 57.4 Pilot exhaust PE port Normally closed 7 38.1 9.3 2 1 11.5 ZF Air supply PV port 21.6 64.6

pa

Low Voltage Directive This directive is applied to products, which operate above 50 VAC to 1000 VAC and 75 VDC to 1500 VDC operating voltage, and require electrical safety measures to be introduced. Simple Pressure Vessels Directive This directive is applied to welded vessels whose maximum operating pressure (PS) and volume of vessel (V) exceed 50 bar/L.

Air Slide Table

156 1200 Standard type 10 MXQ20A-10-10Zm-X2192 5 30 MXQ20A-5-25Zm-X2192 48 4 66 46 3 80 70 68 46 133.5 157 176 1300 10 MXQ20A-10-20Zm-X2192 15 MXQ20A-15-15Zm-X2192 5 MXQ20A-5-35Zm-X2192 58 4 56 56 3 70 80 58 56 143.5 157 176 1300 10 MXQ20A-10-30Zm-X2192 15 MXQ20A-15-25Zm-X2192 20 MXQ20A-20-20Zm-X2192 5 85 (55)*1 50 (80)*1 40 MXQ20A-5-45Zm-X2192 42 6 43 36 48 4 85 80 65 64 159.5 172 191 1500

A

Low Voltage Directive This directive is applied to products, which operate above 50 VAC to 1000 VAC and 75 VDC to 1500 VDC operating voltage, and require electrical safety measures to be introduced. Simple Pressure Vessels Directive This directive is applied to welded vessels whose maximum operating pressure (PS) and volume of vessel (V) exceed 50 bar/L.

NCA1

(4") D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 CG1 MB MB1 Connector type M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 CA2 2 1 Pin arrangement CS1 3 4 4 3 3 C76 JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 300 m/s2 Applicable standards Impact resistant IP degress of protection Insulation resistance Withstand voltage C85 IP-67 (IEC529 standard) 100 M or more at 500 VDC meg. 1500

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

With light/surge voltage suppressor (Non-polar type) : SY100-30-A U Without lead wire (with connector and 2 of sockets only) Lead wire length Nil 6 10 15 20 25 30 50 300 mm 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm Rated voltage 5 6 V S R 1 2 Electrical entry 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] G H L LN LO M MN

FR Soft Nylon Tubing Series TRS Flame Resistant (Equivalent to UL-94 Standard V-0)

Low Voltage Directive This directive is applied to products, which operate above 50 VAC to 1000 VAC and 75 VDC to 1500 VDC operating voltage, and require electrical safety measures to be introduced. Simple Pressure Vessels Directive This directive is applied to welded vessels whose maximum operating pressure (PS) and volume of vessel (V) exceed 50 bar/L.

5 Port Air Operated Valve

0.51 [0.50] 2.0 [0.78] 5.7 0.37 1.4 Pressure center 8.8 0.44 2.4 10.0 0.49 2.9 Single 280 2 position 8.8 0.44 2.4 10.0 0.49 2.9 Double 315 7.5 0.43 2.0 7.5 0.38 1.9 Closed center VFA520-03 3/8 10.0 [8.7] 0.48 [0.46] 3.0 [2.4] 8.3 0.40 2.2 Exhaust center 3 position 354 9.2 [3.0] 0.50 [0.49] 2.6 [0.85] 6.1 0.35 1.6 Pressure center Note 1) [ ]: Normal position Note 2) Values without bracket 1500

VQ20/30

Low Voltage Directive This directive is applied to products, which operate above 50 VAC to 1000 VAC and 75 VDC to 1500 VDC operating voltage, and require electrical safety measures to be introduced. Simple Pressure Vessels Directive This directive is applied to welded vessels whose maximum operating pressure (PS) and volume of vessel (V) exceed 50 bar/L.

Metal Seal/Rubber Seal Series VQ Body Ported

Example) -DNS Plug-in unit/Flip 3 Lead wire entry direction Stations Max. 16 stations D U Entry on D side Entry on U side 01 1 station 16 16 stations 2-4-18 Body Ported Series VQ1000 Plug-in Unit: Flip Type Electrical entry Lead wire length L0: 600 mm L1: 1500 mm L2: 3000 mm Indicator light Manual override 2-M4 mounting hole VQC No. of stations SQ Lead wire VQ0 VQ4 VQ5 6 VQZ VQD D side

EX120/121/122

Connection load SMC: Solenoid valve with light/surge voltage suppressor (24 VDC, 2.1 W or less) Output when communication error occurs Hold/Clear (Switch setting) Clear Hold/Clear (Switch setting) Clear Clear Enclosure IP20 0 to +55C (Valve 8 points ON) 0 to +50C (Valve 16 points ON) Operating temperature range Operating humidity range EX 35 to 85%RH (With no condensation) Withstand voltage 1500

TS/TISA

Low Voltage Directive This directive is applied to products, which operate above 50 VAC to 1000 VAC and 75 VDC to 1500 VDC operating voltage, and require electrical safety measures to be introduced. Simple Pressure Vessels Directive This directive is applied to welded vessels whose maximum operating pressure (PS) and volume of vessel (V) exceed 50 bar/L.

KP/KPQ/KPG

Low Voltage Directive This directive is applied to products, which operate above 50 VAC to 1000 VAC and 75 VDC to 1500 VDC operating voltage, and require electrical safety measures to be introduced. Simple Pressure Vessels Directive This directive is applied to welded vessels whose maximum operating pressure (PS) and volume of vessel (V) exceed 50 bar/L.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Low Voltage Directive This directive is applied to products, which operate above 50 VAC to 1000 VAC and 75 VDC to 1500 VDC operating voltage, and require electrical safety measures to be introduced. Simple Pressure Vessels Directive This directive is applied to welded vessels whose maximum operating pressure (PS) and volume of vessel (V) exceed 50 bar/L.

ASP

01 02 03 04 F02 F03 F04 N01 N02 N03 N04 With One-touch fitting Needle Valve/Flow Characteristics ASP330F ASP430F 400 200 3 6 Flow rate (l/min (ANR)) Inlet pressure : 0.5 MPa Inlet pressure : 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) 300 06 07,08,09 2 4 200 100 1 2 100 0 0 0 5 10 0 5 10 Number of needle rotations Number of needle rotations ASP530F ASP630F 1500