62 15 9 M8 37 29 160 176 125 165 160 Rc(PT) 86.5 104 110 75, 100, 125, 150, 200, 250, 300 88 4 16 9 62 15 9 M8 37 30 160 176 125 165 160 Rc(PT) 86.5 104 110 96 4 19 12 67 18 190 210 135 11 200 42 194 Rc(PT) 35 142 115 M10 95 J I GR GQ GL P Q U O T N S W K L M R V Bore size (mm) 20 25 32 40 60 35 4 4 5.5 M5 X 0.8 93 M6 X 1 16 25 26 50 80 50 12 53 105 112 70 40 7 7 9 M5 X 0.8 M8 X 1.25 20
(October 1999) (3) Lead wire specifications Nil No lead wire with connector W Lead wire for energy saving switch (2 m) (4) Fitting (V port) 0 Without fittingM5x0.8 1 3.2Straight 2 4Straight 3 6Straight 4 3.2Elbow 5 4Elbow Lead wire with connector for energy saving Pressure switch assembly ZQ1 LW6 N A (1) (1) Output N NPN open collector P PNP open collector 9 - NO.
Refer to page 5-11-4.)
Setting range 100.0 to 100.0 kPa 101.3 to 101.3 kPa 1.000 to 1.000 MPa Set pressure range 100.0 to 100.0 kPa 10.0 to 101.3 kPa 0.1 to 1.000 MPa Lead wire length Nil L 0.6 m 3 m 16-2-17 4 Series ZSE40/ISE40 Specifications ZSE40 (Vacuum pressure) 0.0 to 101.3 kPa 10.0 to 101.3 kPa ZSE40F (Compound pressure) 100.0 to 100.0 kPa 100.0 to 100.0 kPa 500 kPa 0.1 0.001 0.001 0.02 0.01 1 0.1 Air,
A A, E, b MM -110 U, HDHa HX 50,63 56 ,. 028 0) Ml8x1.5 I. 20 ' 4 i 010 22 ~3 ~., Pan No. NX HZ L Y.Q05 50,63 56 20 028 40 , M 1 8xlS " 20 14 ~070 22.03 ~.S 44 SO.8 IV -60s eo 71 2. 038 !OJ 1A22x1.5 2. 1I 1 8 --g07D 28-03 ~ , Y-G08 80 71 23 038 SO r.122x15 21 27 lS'g.070 28 ~ 3 ~, 56 84 IV -GOS ~iTt .1 , m_ , m , L , CQ2 Double Rod Clevis Pin (mm) C02 Jam Nut J r ,..,. No. AppI_ bon~..
/ M Pa/ m M Pa/ ( S) () m 2 1 1 m N MPa M Pa N m (A) / N ( B) /N () m 2 ( A) m 2 N -5- 1 SUP OUT 2 %F.S. 3 , 4 R B(P36201023) G 2 3 Rc,F N IR1000G33-2-01 G33-P2-N01-X30 IR1010G33-4-01 G33-P4-N01-X30 IR1020G33-10-01 G33-P10-N01-X30 011/84 Rc NNPT FG 00.0050.2MPa 10.010.4MPa 20.010.8MPa PRECI SI O N REG U LATO R I R101BG M AX.
Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output
Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output
N Port 2 (A),1 (P) Port size A Model E F G H I J L M P R T U B C D K N O Q S Port 3 (R) VEX5510 VEX5511 160 50 25 10 7 25 173 80 60 98 Center 1 2 3 4 , , 1 1 2 3 4 60 150 79 70 53 13 18 100 2 x M6 Thread depth 9 116.5 , ,1 25 VEX5710 VEX5711 177.5 167.5 84.5 90 60 30 15 7 190.5 54.5 100 60 13 105.5 103.5 18 4 x M6 Thread depth 6 136.5 17 82 1 4 1 4 1,1 1 c Bracket mounting dimensions g Grommet
IDH N ID L P IDG K 4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868) R 2 470 855 (128) (273) (110) 13 500
167 177 187 197 207 12 M Type Plug Connector/L Type Plug Connector Series VQ100 VQ110-M-M5 46.3 About 300 (In case of latching) 35.3 Manual override (Lead wire length) About 300 (Lead wire length) 4.9 4.9 12.4 15 E Lead wire color : Red 12 2.5 17 Lead wire color : Black 22.7(Mounting hole) In case of latching type In case of locking knob type SMC VQ110 -*M 34.8 30.7 JAPAN (5.9) 5 (5.9)
Conversion Chart English to Metric (Multiply by To obtain ) Metric to English (l,tultiply _ by To Obtain ) Torque mm ft.lb m m t t . l b cm m Prcssure in(H,O) 2.5357 x 1o-3kg/cm'z in(Hg) 0.03518 kglcm'?
Conversion Chart English to Metric (Multiply by To obtain ) Metric to English (l,tultiply _ by To Obtain ) Torque mm ft.lb m m t t . l b cm m Prcssure in(H,O) 2.5357 x 1o-3kg/cm'z in(Hg) 0.03518 kglcm'?
(P.50 40 No.JXC-OMU0004-A 8.2 () OUT0 to OUT3 M 8.3 10. (P.50) (1) M 41 No.JXC-OMU0004-A 2 * M (3) () M () ON M 42 No.JXC-OMU0004-A 8.4 1 1 1 1 1 1 1 10.
1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1/8 1/8 1/8 1/8 1/8 M28 x 1 M38 x 1.5 M42 x 1.5 M42 x 1.5 26 29.4 37.3 37.3 43.3 Note) The dimension of C is the length when the filter regulator knob is unlocked. 1081 A 1021-AW K-B Regulator with Backflow Function Dimensions J J D M N T AW20K-B 1021Bracket (Option) S U Panel fitting dimension Air Preparation Equipment Pressure Control Equipment Flow Control
NPT1/4 F02 G1/4 2 A A B B :ISO1179-1 IO-Link/1+2 NPNorPNP 1 M12 5m M12 5m L2 S L 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-31-B 5 m M12 ZS-31-C 5 m -8No.PS-OMV0003CN-G M12 4 24 OUT1 IO-Link OUT2 UP DOWN SET () ()() (() UP ON/OFF DOWN ON/OFF SET IO-Link OUT1 (SIO ) -9No.PS-OMV0003CN-G IO-Link IO-Link 1 Operate () Start up Preoperate IO-Link 2 IO-Link 1 SIO
(2)BK RLS (3)BK RLS -26- 6.4 (1)() (3m) SI PWR (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V -27- (2)((1)) DC24V EMG () DC24V 0V Ry Ry: U LK RLS (6) Ry (1 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V LK RLS (6) Ry (2 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V LK RLS (6) Ry (3 ) (3) EMG (2) M 24V (1) C 24V 0V (4) DC24V 0V OFF -28- (3)((2)) DC24V M24V EMG () 0V
(DC50 V ) 3F.S.(25 ) 3 (N.P) 3.52 m 4 (A.B) 0.15 mm 2(AWG26) 5 (R.T.S.V) 0.95 mm CE UL/CSA RoHS 02 N02 F02 C01 A2 B2 R1/4 NPT1/4 G1/4 Rc1/8 URJ1/4 TSJ1/4 () 117 g 118 g 114 g 120 g 111 g () 89 g 90 g 86 g 86 g 92 g 83 g 110 -5 Pam 3/s 110 -10 Pam 3/s A B C 0.0-101.0kPa 0 -101.0 kPa -100.0100.0kPa -100 kPa 100 kPa -0.1001.000MPa -0.1 MPa 0 1.
2.9)m For EE (ZSE4E) Lead wire length 0.5 (2.9)m NPN output Analog output PNP output Rc1/2 G1/2 1/2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G).
For single axis Actuator cable type/length Nil Without cable S1 Standard cable 1.5 m S3 Standard cable 3 m S5 Standard cable 5 m R1 Robotic cable 1.5 m R3 Robotic cable 3 m R5 Robotic cable 5 m R8 Robotic cable 8 m*1 Option Caution Nil Without option S With straight type DeviceNet communication plug for JXCD1 T With T-branch type DeviceNet communication plug for JXCD1 [CE-compliant products