XLGR Series

Fluid Vacuum of inert gas Ambient temperature: 20 oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa Atmospheric pressure to 1 x 10-5 Main exhaust valve 200 300 800 Conductance l/s Note 1 Bypass valve MAX31.5Viscosity / Theoretical value Internal 1.3 x 10-9 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-

7ND9071en

Device needs to be rebooted after change 400 16 5 5.5 9.5 (14") 5 9.5 450 18 6 7.5 (16") 500 20 6 4.5 600 24 5.5 650 26 7 700 28 7 750 30 6 800 32 900 36 5.5 1) Seat supported 2) Trunnion 3) Soft seated R-valve 4) Low Cv Finetrol 5.5.12 Language selection, LANG Select between three languages EnG, GEr or FrE using the + and keys. To conclude press the ?

HRX-OM-W032

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

RS2H-OM0045P

. :0.1 D 50 : : mmax 1 RS2H mmax : mmax (Kg) =0.1 =0.2 NO 50 400 280 mAm max 63 530 365 YES 80 800 565 V m mmax=0.1 200<400 mP6 -1-* -1-1V=20m/minm=278(Kg) 200278 NO mA m YES FA=mAg FA 2000.19.8 196(N) FAmAg(N) (g: :9.8m/S 2) P F -2-1P=0.5(MPaF=766(N)766(N) 196776 P7 -2-1 NO FA F RS2H50 YES v [m/min] m [kg] -1 5 - -1-1.(RS2H50) -1-2.(RS2H63 -1-3.

MHS

32DA MHSH3-40DA MHSH3-50DA MHSH3-63DA MHSH3-80DA mm 12 20 25 32 40 MPa 0.20.6 0.10.6 -1060 c.p.m. 60 30 mm 5 5 10 10 15 N 1 45 130 204 335 524 g 530 770 1,330 2,300 4,000 1) 0.5MPa MHSH3-32DB MHSH3-40DB MHSH3-50 DB MHSH3-63 DB MHSH3-80 DB mm 5 5 10 10 15 N 6~10 11~15 20~25 29~34 49~59 g 500 740 1,290 2,250 4,000 g 32 40 50 63 80 MHSHJ3-D 430 600 1,020 1,710 3,040 MHSHJ3-DA 550 800

LEJ-OM004xx

. *2 (4) S troke [mm] Standard Produced upon receipt of order 300 200 400 500 600 700 800 900 1000 1200 1500 Str o k e (m m ) Ty pe LEJS40 LEJS63 *2Strok es other than standard and produced up o n receipt o f order are available as special orders, so plea s e contact with our com pany . (9) Driver type *4 (7) Cable type *4 *5 *6 Com patible driv er P owe r supply v oltage [V ] Without cable

DOC1023126

Specification Table Battery-less absolute encoder type (Step motor 24 VDC) Model EQY25 EQY32 Storoke [mm] 30 to 400 30 to 500 Work load[kg] *1 Horizontal 8 26 40 70 30 50 90 100 Vertical 2 8 16 30 3 13 26 46 Pushing force [N] Note2),3),4) 36 to 76 63 to 122 126 to 238 232 to 452 50 to 118 80 to 189 156 to 370 296 to 707 to 300 30 to 900 18 to 700 9 to 450 5 to 225 30 to 900 24 to 800 12 to

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

. -3- 1Specification High performance Battery-less absolute encoder LESYH*(D,R,L)G* LESYH LESYH LESYH LESYH LESYH LESYH LESYH Model 8*GA 8*GB 8*GC 16*GA 16*GB 25*GA 25*GB Stroke[mm] 50,75 50,100 50,100,150 Max.work load[kg] 2 8 12 Horizontal Vertical 1.5 3 6 6 12 10 20 note1)note3) Pushing Force 18~36 37~74 69~138 70~140 135~270 197~395 382~765 note1)note3) 20~800 10~400 5~200 20800 10400

High performance type Step Motor Controller (Servo/24 VDC)

controller are as follows Item Specifications Compatible motor Step Motor (Servo / 24 VDC) Power voltage: 24 VDC +/-10% Max. current consumption: 3A (Peak 5A) *2) Power supply *1) (for both of motor drive power control power, stop, lock brake release) Parallel input 11 inputs (photo-coupler isolation) Parallel output 13 outputs (photo-coupler isolation) Compatible encoder Incremental A/B phase (800

JXCx-OMY0008

Current consumption Compatible encoder Incremental A/B phase (800 pulse/rotation) Battery-less absolute encoder ( 4096 pulses/rotation) LED Details L/A1 Link/Activity1 L/A2 Link/Activity2 LED display PWR Power supply ALM Alarm status RUN EtherCAT communication status. ERR EtherCAT communication error status.

JXCx-OMY0006

Current consumption Compatible encoder Incremental A/B phase (800 pulse/rotation) Battery-less absolute encoder ( 4096 pulses/rotation) LED Details L/A1 Link/Act 1 L/A2 Link/Act 2 LED display PWR Power supply ALM Alarm status MS Controller status NS Communication status Locking With unlocking terminal Cable length Actuator cable: 20 m or less Cooling method Air-cooling type Operating temperature

JXCx-OMY0004

Current consumption Compatible encoder Incremental A/B phase (800 pulse/rotation) Battery-less absolute encoder ( 4096 pulses/rotation) LED Details PWR Power supply LED display ALM Alarm status SF Controller status BF PROFINET communication status.

JXCx-OMX0009

Item Specifications Compatible motor Step motor (servo 24 VDC) Power supply voltage: 24 VDC +/-10% Max. current consumption: 3A (Peak 5A) *3) (for both of motor drive power control power, stop, lock brake release) Power supply *1) *2) Compatible encoder Battery-less absolute encoder (resolution: 4096 pulses/rotation) Incremental A/B phase (800 pulse / rotaion) Serial communication RS485 Memory

JXCx-OMT0005CN

(DC24V) DC24V10% 100mA A/B 800 / EEPROM LED PWR LED ALM MS NS 20m 040 90%RH ) 50MDC500V 210g() 230g(DIN ) DeviceNet DeviceNet CT-27 Volume1Common Insustrial Protocol(CIP) Edition3.14 Volume3DeviceNet Adaption of CIP Edition 1.13 063 / Data Rate 125/250/500 kbps / Group 2 Only Server EDS 4122036Byte 4 Byte 41020Byte 4 Byte ID 07hSMC Corporation 43h(Generic Device) DDh

SFOD-OMT0005CN

(DC24V) : DC24V10% 130mA () A/B (800 /) EEPROM LED L/A1 1 L/A2 2 LED PWR ALM MS NS 20m 0 oC40 oC() 90%RH () 50M(DC500V) 210g() 230g(DIN ) [EtherNet/IP ] EtherNet/IP TM(CT-12) 10/100Mbps() Ethernet (CAT5 100BASE-TX) /() EDS 36 /36 IP 192.168.1.1254 DHCP ID 7h(SMC Corporation) 2Bh(Generic Device) D1h -12- 3.2 1 LED 2 P1P2 EtherNet/IP 3 IP IP X1X10X100 EtherNet

LECA6_C

(DC24V) DC24V10 (1) 3A 10A 2 3 11 () 13 () A/B 800 //Z RS485 Modbus EEPROM LED LED/1 I/O 5m 20m 0~40 90%RH ) -10~60 35%85 ()-FG 50MDC500V 150g() 170g(DIN ) 1 2 3UL ,UL1310 Class2 11 - 3.2. () SV1.00 ASL8500099 ()"SV1.00" ON/ ()/ 1 PWR LED() (LED()) () 2 ALM LED() ON/ 3 CN5 I/O (26 ) I/O PLC (11 COM 13 COM ) 4 CN4 I/O (8 ) 5 CN3 (16 ) 6 CN2 (4 ) (DC24V) 7 CN1

LECP6_C

(DC24V) DC24V10 (1) 3A 5A 2 (3) 11 () 13 () A/B (800 /) RS485 Modbus EEPROM LED LED/1 I/O 5m 20m 0~40 90%RH ) -10~60 90%RH ) ()FG 50MDC500V 150g() 170g(DIN ) 1 2 3UL UL1310 Class2 11 - 3.2. ( SV1.00 ARX8300073 ()"SV1.00" ON/ ()/ 1 PWR LED() (LED()) () 2 ALM LED() ON/ 3 CN5 I/O (26 ) I/O PLC (11 COM 13 COM ) 4 CN4 I/O (8 ) 5 CN3 (16 ) 6 CN2 (6 ) 7 CN1 5 (DC24V)

JXCx-OMT0062

Product Specifications 3.1 Specifications (1) Basic specifications Item Specifications Compatible motor Step Motor (Servo / 24 VDC) Power voltage: 24 VDC +/-10% Power supply *1) *2) Max. current consumption: 3A (Peak 5A) *3) (for both of motor drive power control power, stop, lock brake release) Compatible encoder Incremental A/B phase (800 pulse / rotation) Serial communication Conforming

JXCx-OMT0061CN

(P.59) 11 - 3. 3.1 (DC24V) DC24V10% 3A 5A A/B 800 / RS485 Modbus EEPROM LED PWR LED ALM L ERR CC-Link L RUN CC-Link 20m oC40 oC() 0 90%RH ) oC60 oC () -10 90%RH ) 2 4.9m/s IP20 50MDC500V 170g() 190g(DIN ) [CC-Link ] CC-Link Version 1.10 1 2 4 (/) 32 /32 4 /4 64 /64 8 /8 128 /128 16 /16 156k/625k/2.5M/5M/10Mbps NRZI (EIA RS485) HDLC 16+X 12+X 5+1) CRC(X

HRX-OM-M005

Table 7-1 Water Quality Standards Substance Facility water Circulating water spec. spec. pH (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max. 200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max. 100 Max.50 Total hardness (mgCaCO3/L) Max. 200 Max.70 Calcium hardness (mgCaCO3/L) Max. 150