Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Table (1) Air-hydro/Piston Speed Plate mounting Housing mounting Model CX2H15 CX2H25 Refer to the below. Note 1) 5 to 50 mm/s 5 to 40 mm/s 5 to 100 mm/s Note 1) Consult with SMC when the air-hydro type is mounted on a plate.

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Table (1) Air-hydro/Piston Speed Plate mounting Housing mounting Model CX2H15 CX2H25 Refer to the below. Note 1) 5 to 50 mm/s 5 to 40 mm/s 5 to 100 mm/s Note 1) Consult with SMC when the air-hydro type is mounted on a plate.

ZPT

06 6 08 8 10 10 13 13 16 16 20 20 1 8 NPT N01 1 8 NPTF T01 1 8 25 25 32 32 40 40 50 50 Material Pad type (Refer to Table (1) for applications.)

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

40 AS221F-02 AS231F-02 R 1/4 Application to inch size tubing Metric size (Release bushing: White color) 3.2, 4, 6, 8, 10, 12 Inch size (Release bushing: Orange color) 1/8", 5/32", 3/16", 1/4", 5/16", 3/8", 1/2" 40, 50, 63 AS321F-02 AS331F-02 R 1/4 40, 50, 63 AS321F-03 AS331F-03 R 3/8 63, 80, 100 AS421F-04 AS431F-04 R 1/2 Note 1) Elbow type only Note 2) Meter-out and meter-in types can

Digital pressure switch for energy-saving control ejector

digit Hyster esis Hysteresis mode Adjustable (can be set from 0) 1 Display 3 1/2 digits, 7-segment display, color display (Red) Indicator accuracy +/-2%F.S., +/-1 digit (at ambient temperature 25+/-3 oC) Indication LED Light when ON OUT1: Green OUT2: Red Enclosure IP40 Ambient temperature range 5 to 50 oC Environ ment Withstand voltage 1000 VAC for 1 minute between live parts and case insulation

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Suction Verification High Vacuum Set-value correction by auto-shift function Suction Work 1 Work 2 Work n Supply pressure normal Supply pressure drop Supply pressure increase Max. A Rectified value P-1 Rectified value P-1 (Differential) Pressure H-1 (P-3) H-1 (H-2) n-1 Min.

H/DL/L/LL

(mm) M Effective area (mm 2) Weight (g) A L2 L1 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 DL04-01 15 3.5 23 DL04-02 17 19 4 10 23.5 19.6 10 30 DL06-01 25 17 Applicable tubing 19.6 10 23.5 DL06-02 16 19 31 14 6 9 12 DL06-03 22 53 26.5 24.5 21.6 22.6 24.5 25.8 24.5 29.4 29.6 30.3 29.4 91 Reference dimensions after R thread installation.

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Nil N F Rc NPT G 02 03 11 12 H06 H08 H10 H07 Note 1) H09 Note 1) H11 Note 1) Rc1/4 Rc3/8 KK4P-02MS KK130P-02MS KQ2H06-02S KQ2H08-02S KQ2H10-02S KQ2H07-35S KQ2H09-35S KQ2H11-35S Screwing in With coupler plug One-touch fitting (Metric size) One-touch fitting (Inch size) Note 1) In the case of inch size one-touch fitting type, the port size is NPT 1/4.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Specifications PF2D200/201 Model Applicable flow rate sensor PF2D504--1 PF2D520--1 PF2D540--1 0.25 to 4.50 l/min 1.3 to 21.0 l/min 2.5 to 45.0 l/min Flow rate measurement range Note 1) 0.25 to 4.50 l/min 1.3 to 21.0 l/min 2.5 to 45.0 l/min Set flow rate range Note 1) 0.05 l/min 0.1 l/min 0.5 l/min Minimum set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50ms) Note

Clean Regulator

ITVX Specifications PVQ VY1 SRH30 SRH40 SRH31 SRH41 Model Non-relief Relief Relief mechanism VBA VBAT Rc 1/8, 1/4 URJF 1/4 Rc 1/4, 3/8, 1/2 URJF 3/8 Rc 1/8, 1/4 Rc 1/4, 3/8, 1/2 Port size AP100 Grade A Clean air, N2, Ar, CO2, Pure water Clean air, N2 Fluid Grade B Air, N2, Ar, CO2, Water Air, N2 1.5 MPa Proof pressure 1 MPa Max. operating pressure Low pressure type High pressure type 0.02

Digital pressure switch for energy-saving control ejector

digit Hysteresis Hysteresis mode Adjustable (can be set from 0) 1 Display 3 1/2 digits, 7-segment display, colour display (Red) Indicator accuracy +/-2%F.S., +/-1 digit (at ambient temperature 25+/-3 oC) Indication LED Light when ON OUT1: Green OUT2: Red Environment Enclosure IP40 Ambient temperature range 5 to 50 oC Withstand voltage 1000 VAC for 1 minute between live parts and case insulation

Digital pressure switch for energy-saving control ejector

digit Hysteresis Hysteresis mode Adjustable (can be set from 0) 1 Display 3 1/2 digits, 7-segment display, colour display (Red) Indicator accuracy +/-2%F.S., +/-1 digit (at ambient temperature 25+/-3 oC) Indication LED Light when ON OUT1: Green OUT2: Red Environment Enclosure IP40 Ambient temperature range 5 to 50 oC Withstand voltage 1000 VAC for 1 minute between live parts and case insulation

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

.:; ;,i=-, ,,.r:,,. ,:: 1::':::,4':::rr.i,;.::'i.ri:;.: 'i.t.i.il:i:i=*1+at=r=i1t:i:i:t:, =!i i:r-i=,, ti ' ' ' ,*r:,:,.r.,:::aa:.:;l.;:i.i.i.tii-,:,'.ar'''ll.'1:1,:,::,1*tlLr:f:fl:a::.:::a::l:a:..:r.:,,::,i,.i,i..,. -r.rLi'g+;,:,=.:11:i:::':itf::1.:i,;=:.:,1 ;,t .,.', , . i:,:*:,'*':,1=]:t*r:1:f?:t:a:l*!a,-,'a*r1]la::1::':..:::.:::.1 . . =r. r::!1::1+ti i:a"a:r:r ia '.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

1 i q !4 r e !0 !1 q i !2 o !3 y Component Parts No.

Manifold Specifications

Non plug-in type N T F Symbol 24 24 stations NPTF G Option VV5ZS3-51FD-091-01-MP5 VZS3150-5FZ VZS3250-5FZ 1 5 2 Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Note) Maximum stations 51F 16 stations 51G 15 stations 51 24 stations Symbol Port size 1 1 8 02 Rc 1 4 01 Rc (Manifold base) (2 position single) VV5ZS3-50-071-01-M5 VZS3150-5G 1 5 Embedded type One-touch

Fluoropolymer Piping Equipment

Refer to back page 50 for Safety Instructions. LQ1 LQ3 Tubing O.D. Body class Metric sizes Inch sizes LVN LVN 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" Piping 2 3 4 LQHB Caution TL TIL 1. Connect tubing with special tools. Note) Refer to page 910 for information on changing tubing sizes.

AR Series Modular Type Regulator

45.5 22.5 7 AR40-A 1/4, 3/8, 1/2 1/8 70 100 33.5 34.5 M52 x 1.5 34.5 42.5 72 42.5 72 50 38 54 8.5 26.5 70 2.3 38.4 52.5 26 7 AR40-06-A 3/4 1/8 75 101.5 33.5 34.5 M52 x 1.5 34.5 42.5 72 42.5 72 50 38 55.5 8.5 26.5 70 2.3 39.9 52.5 26 7 Note) Note) The dimension of B is the length when the filter regulator knob is unlocked. 455 Regulator/AR20-A to AR40-06-A Made to Order Please contact SMC

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S coupler #OILTUBE + + %NERGYSAVINGEFFECTSWITH "LOWGUN6-' 1 Amount saved as a result OFENERGYSAVINGEFFECTS #OSTOFELECTRICITYCONSUMEDBYCOMPRESSOR HUNDREDOF ) 20% reduction 1 306 /year 1 600 1 450 1 300 1235 Conventional model 1 150 "LOWGUN 3COUPLER #OILTUBE 1 000 HOURS 850 4OTALWORKINGHOURSOFUSE "LOWGUN6-' %NERGYSAVINGEFFECTSWITH only Calculation conditions Amount saved as a result

LUBRICATOR

SPECIFICATIONS Model AL10-A AL20-A AL30-A AL40-A AL40-06-A AL50-A AL60-A Port size M5 1/81/4 1/43/8 1/43/81/2 3/4 3/41 1 Air Fluid 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure Ambient and fluid temperature -5 60 (Should be no freezing) 1/430 3/840 1/250 15 Min. operating flow Note1) L/min(ANR) 50 1/430 3/840 4 190 220 Bowl capacity cm3 7 25 55 135 Class 1 turbine oil (ISO VG32)

Shot Pin Cylinder

90 Allowable lateral load [N] 45 0 When using the CKZP71 0 50 100 150 200 250 Offset distance L [mm] CKZP71 MPorts G and NPT ports available 1 Shot Pin Cylinder CKZP Series 57, 71 How to Order Bore size 57 57 mm equiv.