Ejector Valve Unit, Series ZYY/ZYX

voltage suppressor (non-polar type) Note 1) Types R and U are DC only.

Booster Relay Series IL100

2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !4 q Component Parts Replacement Parts No. Description Material Note 1 Body Aluminum alloy Silver baking finish Model Order no. Contents IL201 KT-IL201 Set of left nos. u, i, o, !2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !

Soft Start-up Valve

The pilot air of the piston r is also exhausted from the pilot valve q, and the piston r is returned upward due to the spring, closing the flow passage from the needle t. r w Exhaust OFF t e 6 AV2000-A/3000-A/4000-A/5000-A Series Construction X X-X r e u q y t Component Parts No.

Lightweight and Compact

Description q Hose (I.D.: 15 mm, Length: 700 mm) u w Outlet piping assembly (With globe valve) e Return piping assembly y r Barrel nipple (Size: 1 inch) (2 pcs.) t Union (Size: 1 inch) (2 pcs.) y Sealant tape u Operation Manual 83 HRS090 Series e Electric Conductivity Control Set The set indicates and controls the electric conductivity of the circulating fluid.

53

0q r DI filter outlet tube HECR t Tapping screw (4 pcs.) u y Mounting screw (4 pcs.) Circulating fluid outlet To circulating fluid outlet HEC u DI control piping assembly e i DI sensor assembly HEB o Nipple (2 pcs.) o !0 DI filter cartridge (Part no.: HRS-DF001) HED r Particle Filter Set HEA Removes foreign objects in the circulating fluid.

Basic Type/Direct Mount Type

0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

reduces flow setting time

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

70astamb1

5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r t y u i o !0 !1 No.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 Material Rolled steel plate Rolled steel plate Carbon steel Rolled steel plate Carbon steel Steel wire Urethane Cast iron Lead-bronze casted Carbon steel Carbon steel Rolled steel No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

AMX-OM-L025_e

. : AM FEL150) H ow t o repl ace el em ent ass y H exagon socket Fol l ow i ng condi ti ons Cause el em ent breakage O ri ng ( U sed) G asket ( U sed) ( N ew ) El em ent ( U sed) head bol t W ARN I N G O U T Case N ever f ai l t o i nst al l one of AM D , AM H , AM E as a pref i l t er. N ever f ai l t o use dry ai r.

ＳＭＯＯＴＨ ＣＹＬＩＮＤＥＲ

Net weight Part No. 5g GR-L-005 10g GR-L-010 150g GR-L-150 C a u t i o n 1 When replacing mounting brackets, use socket wrench. Using other tools would cause deformation of nuts and inferior workability. Refer to the following table for sockets used.

rep-modular-e

4 u @8 !5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

MNB

0 u @5 !6 @1 !1 $7 o $8 e B section C section #0 #1 A section !2 !2 !2 32 100 80 63 50 40 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

MNB

6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

7 e u @2 !5 @1 !9 w !3 !2 !0 !1 !4 @3 !9 20, 25 Component Parts No. No.

Clamp Cylinder with Lock

2 $3 u $1 #9 y #3 @9 #0 !4 @4 @3 @5 @1 !7 e !1 $4 o i w q t 40 Extension locking (F) #3 @9 #0 !4 @2 #7 !8 #4 #1 !9 #8 @0 @8 #2 r $0 #5 #6 $2 @6 @7 !3 $5 !5 !0 !6 !2 $3 u $1 #9 y !7 e $6 $4 !

VCL

W (44) T R (Y) Z VC T 25 VDW IN port 2-3/8 : Thread type l=280 l=300 VQ VX2 (X) (V) S Q 2.5 (N) VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C E A (U) VX3 D G C B VXA L1 L2 L3 16 VN LVC D side U side Stations 1 2 3 4 5 n LVA LVH LVD LVQ 21 5.5 16 OUT port n-

VM

.=2.5mm only, w/threads Plunger Spring Valve rod Body u i w e Stainless steel Lever Valve NBR o NBR Packing r Polyacetal Retainer t Stainless steel Spring !

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !

2/3 Port Solenoid Valve for Chemicals

1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No. Material Part list/LVM13R, 14R, 16R, 115 !2 !0 Plate 1 PEEK/PFA !1 Diaphragm assembly 2 EPDM/FKM/Kalrez Body 3 PBT Slide bush assembly 4 POM/Stainless steel y Armature assembly 5 Stainless steel/PBT Coil assembly 6 t Sleeve 7 Iron u Spacer 8 i !