Stations: 01 (1 Station), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: W (w/Flow Adj.

CM2

) Grommet 2-wire 12 V Water resistant (2-color indication) With diagnostic output (2-color indication) H7BA 3-wire (NPN) IC circuit 5 V, 12 V H7NF Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Solid state switches marked with are produced upon receipt of order.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

rail 2-M2 x 0.4 depth 3 8 5.7 3.5 L 6-M4 x 0.7 depth 4.5 20 20 2-M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-15 30 60 98 40 42 49 60 23 25 89 75 106 11-/22-MXP12-25 103 Precision air slide table MXP/MXPJ6 11221122Dimensions: MXP16 3 Z V K Metal stopper C 6.5 C Max. 4 25 5 Without stroke adjuster G M 11 Max. 4 C 2-M5 x 0.8 depth 8

Return Filter FH100 Series

Element Relief valve P M 0 1 Paper Micromesh With relief valve None Hydraulic fluid 0 1 2 N W V Petroleum Water-glycol, Emulsion Phosphoric ester Note) N, W and V refer to the hydraulic fluid symbol indicated at the end of the element part number. Replacement Element Part No.

Function: 2 (2 Position Double), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: U (Indicator Light w/Surge Suppressor Non-polar), Manual Override: None, Port Size: 01 (Base Mounted w/Sub-plate 1/8), Thread: M Thread, Rc, Option: None, CE Compliant: Q (CE Compliant)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: M (Common EXH), Specifications: Standard, Voltage: S (5VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: F (G)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: M (Common EXH), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: T (NPTF)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: M (Common EXH), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: N (NPT), Bracket: F (Bracket)

Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: M (Common EXH), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8, Body Ported 1/8), Thread: N (NPT)

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

Load voltage Electrical entry Lead wire length (m) Flexible lead wire (-61) Auto switch model Applicable load Pre-wire connector In-line Perpendicular 0.5 (Nil) 3 (L) 5 (Z) DC AC Type Special function Electrical entry Indicator light Wiring (Output) 3-wire (NPN) 3-wire (PNP) 24 V 12 V Solid state switch M9NV M9N 5 V IC circuit M9PV M9P Relay, PLC Standard Grommet Yes 2-wire M9BV M9B

Cylinder with Lock Series MNB

C Rc(PT)P Rear cylinder port Width across flats Rc(PT)P Front cylinder port Width across flats B1 MM W GR GR E D C GL1 GL W T 16 Effective thread length MB 4-J 16 GF 4-J V Q VA H1 N K F GE BN A H S + Stroke ZZ + Stroke With rod boot e 9 l 13 h f ZZ + Stroke (mm) Effective thread length (mm) Width across flats Stroke range (mm) Bore size (mm) D F B A B1 H1 BP GL B2 BN GC GL1 C GA GB GD Ee11

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

PF-OMN0009_C

1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L N P PF3W504 3/8 70 50 30 45.6 40.6 15.2 24 14 35 26 18 13.6 2.7 14 PF3W520 3/8 1/2 78 54 30 45.6 40.6

LEKF-OMZ0035

Cable type Cable length[m] Grease application (Seal band part) Nil Without cable Nil Without cable Nil With 3 3 S Standard cable N Without (Roller specification) 5 5 R Robotic cable A 10 (Flexible cable) C 20 Driver type I/O cable length Compatible Power supply Nil Without cable drivers voltage [V] H Without cable Connector only Nil Without driver 1 1.5 [m] M2 LECYM2-V 200 to 230 U2 LECYU2

IIIIIIIIII

/min. (28 LPM) RECOMMENDED FILTRATION 5 micron Model Number Description V-800-10-W/K 0-10" Hg Vacuum regulator with adjusting knob V-800-10-W/S 0-10" Hg Vacuum regulator with 1/4" adjusting shaft V-800-10-W/OS 0-10" Hg Vacuum regulator with slotted adjusting shaft V-800-30-W/K 0-30" Hg Vacuum regulator with adjusting knob V-800-30-W/S 0-30" Hg Vacuum regulator with 1/4" adjusting shaft V-

rep-filter-e

(c) V-band tightening Fig. (c) V band tightening Industrial Filters 467 Series FGA Replacement Procedure of Element 1 1. Instruction Drawing for Disassembly & Reassembly of Filter u AIR VENT y i q 9-1 r 9-3 t 9-2 e w Stopper IN !2 !0 !

Industrial Filters Replacement Procedure

(c) V-band tightening Fig. (c) V band tightening Industrial Filters 467 Series FGA Replacement Procedure of Element 1 1. Instruction Drawing for Disassembly & Reassembly of Filter u AIR VENT y i q 9-1 r 9-3 t 9-2 e w Stopper IN !2 !0 !

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: -

Rated Vacuum Range: F (-100.0 to 100.0 kPa), Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: M (SI Unit Only), Piping Specification: 01 (R1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover)