Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

"n" pcs. Nil S n Nil Without auto switch (with built-in magnet) Microspeed cylinder Select auto switch model number from the table below. Auto switches are not mounted, but rather packaged together with the cylinder for shipment.

Compact Hydraulic Cylinder Series CH
KGB

Compact Hydraulic Cylinder Series CHKGB 20, 25, 32, 40, 50, 63, 80, 100 16MPa How to Order CHKGB 32 30 32 30 Z73 CHDKGB With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S n 2 pcs. 1 pc. "n" pcs.

1

30 30 66 30 11 20 8 1/8 19 27 56.5 30 43 47.5 50.5 23 56.5 64.5 48.5 52.5 99.5 50.5 68.5 XSA2-2P(N) 36 36 79 35 14 22 10 1/4 24 29.5 68.5 32.5 55 50 62.5 25.5 68.5 67 60.5 55 102 62.5 71 XSA3-3P(N) 40 40 88 40 16.5 24.5 3/8 29 32 77.5 35 64 52.5 71.5 28 77.5 69.5 69.5 57.5 104.5 71.5 73.5 6 XSA Series Special Option/Replacement Parts Special Option Special Electrical Entry Direction 2 1

CUJ

Without Auto Switch With Auto Switch Proper tightening torque (Nm) 0.54 Bolt M2.5 x 0.45 CUJB4 C(D)UJB6 C(D)UJB8 C(D)UJB10 10 0.5 1.06 M3 x 0.5 10 0.4 0.4 Allowable lateral load W (N) Allowable lateral load W (N) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 8 0.3

KB

X 0.8 M6 X 1 M5 X 0.8 M6 X 1 H (Hex.)

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

: M5 x 0.8 0XY: M6 x 1.0 771

Low torque Metal seal type Rotary joint Series MQR

Model MQR1-M5 MQR2-M5 MQR4-M5 MQR8-M5 MQR12-M5 Number of circuits 1 2 4 8 12 Operating fluid Air / Inert gas Seal structure Metal seal Guide structure Bearing supported Bearing supported at both ends Port size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

Model Selection 1

M5, 1/8, 1/4 1, 1.6, 2.3, 3.2 2, 3, 4 0 to 0.9 (1) 17-2-68 VV2DW1/2/3 N.C. Manifold M5, 1/8, 1/4, (3/8) Solenoid valve 17-3-17 VX21/22/23 N.C./N.O. Single unit 2, 3, 4.5, 6, 8, 10 1/8 to 1/2 0 to 3 (1) 17-3-25 VVX21/22/23 N.C./N.O.

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

A 24 M5 thread, depth 8 With or without insert depending on base material. 32 A' Coding stud M5 x 10 DIN913-45H 12 2 8 M5 Drive flange face G1/4 DIN/ISO228/1 19.5 5.5 Solenoid valve flange face O-ring 16 x 2 1.5 IP 3 IW 1301 AW The solenoid valve can be attached with 2 mounting bolts.

Process Pump (Diaphragm Pump) Body Wetted Parts: Polypropylene/Stainless Steel Built-in Solenoid Valve/Air Operated (External switching type) PB1000A Series

Symbol Nil N F Option Option Symbol Applicable actuation Built-in solenoid valve Air Operated PB1013A Air operated Port size Port size 1/8 Nil B N None With foot With silencer Symbol 01 When option is more than one, suffix in alphabetical order.

Series CXS 10-/11-/12- ø6, ø10, ø15, ø20, ø25, ø32 21-/22- Dual Rod Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Clean series Relief type Vacuum suction type Relief type (with specially treated sliding parts) CXSM, CXSL CXSM, CXSL CXSL 10 11 12 Dual rod cylinder 10 CXS M 15 30 Y59A 21 CXS L 15 30 Y59A Number of auto switches Bearing type Ball bushing bearing Slide bearing Nil S n L M 2 pcs. 1 pc. n pcs.

ZB-OM00301

M5 Q1 +COM N.C.

IDX-OM-N030

Option R: M5 tightening torque: 2.6Nm Do not touch equipment other than the terminal block during wiring. 3 to 3.5mm L2 L3 PE L1 Screwdriver entry Cable entry Terminal block Applicable screwdriver 5. If you are not performing wiring for operation, error signal and remote control, put back the front panel.

Digital Gap Checker

When the product is mounted using the bracket, fix with M5 screws (2 pcs.) or equivalent. The Bracket thickness is approx. 1.6 mm.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

FKM (Standard seal material) Pilot pressure MPa 0.4 to 0.7 Pilot port size M5 Rc 1/8 Service life (million cycles) 200 (FKM seal material) XMA 0.61 1.40(1.76) 2.00 3.60(4.96) 6.20 0.33(0.37) Weight kg Note 2) XYA 0.66 1.42 2.40 4.30 7.70 Note 1) Conductance is the value for the molecular flow of an elbow having the same dimensions.

Thermo-chiller

S Couplers KK Tubing T S Couplers/Stainless Steel (Stainless Steel 304) KKA Series T TU TH Material Nylon Polyurethane FEP (Fluoropolymer) Modified PTFE (Soft fluoropolymer) Metal One-touch Fittings KQB2 Stainless Steel 316 One-touch Fittings KQG2 TD TL TLM Super PFA PFA Stainless Steel 316 Insert Fittings KFG2 Fluoropolymer Fittings LQ 7 C O N T E N T S HRLE Series Compact Dual/Basic Type

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

Fittings & Tubing Air Cylinders Rotary Actuators Clean series 11 12 Vacuum suction type Relief type (with specially treated sliding parts) CXSJM, CXSJL CXSJL CXS 6 50 J 11 L M9B S 21 CXS L J 6 50 M9B S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M3 ,M5 ,U10/32 R NPT Nil ASN N AQ Model 4 6 8 10 12 5/32"1/4" 5/16"3/8" 1/2" Applicable tubing O.D. (mm) Effective area (mm 2) IN OUT OUT EXH.

Vacuum Ejector Series ZM

Supply valve (N.O.), and release valve Air operated valve (supply valve), Port size connection M3 x 0.5 Air operated valve (supply valve), Port size connection M5 x 0.8 Air operated valve (supply/release valve), Port size connection M3 x 0.5 Air operated valve (supply/release valve), Port size connection M5 x 0.8 Without valve Nil B Non-locking push type Locking slotted type Light/Surge voltage