Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

KJ

-32 UNF <10-32 UNF> <10-32 UNF> Min. port size Applicable tubing O.D.

EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

Vacuum Regulator

Body size 10 20 Max. flow 140 l/min (ANR) Max. flow 240 l/min (ANR) Symbol X1 Specification Integrated digital pressure switch for panel mounting Accessory w Single sided connections None Note 1) Nil A Single sided connections With pressure gauge Note 2) Note 3) (IRV10A: With GZ33-K-01, IRV20A: With GZ43-K-01) G ZN ZP ZA ZB Note 3) With ZSE30A-01-N-ML With ZSE30A-01-P-ML With ZSE30A-01-A-ML

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS23 1FE-01 AS22 1FE-02 AS23 1FE-02 AS32 1FE AS33 1FE AS42 1FE AS43 1FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

VM

00 VM121-01-00 VM130-01-00 VM131-01-00 VM122-M5-00 VM123-M5-00 VM132-M5-00 VM133-M5-00 Basic Polyacetal roller Hard steel roller Polyacetal roller Hard steel roller Roller lever VM121-01-01 VM121-01-01S VM130-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Mechanical operation Manual operation One way roller lever VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123

VM

JIS Symbol 2 port Roller lever VM121-01-01 VM131-01-01 VM121-01-01S VM131-01-01S Polyacetal or hard steel roller 3 port R port (3 port only) 0.5 MPa supply 3.2 mm P.T. 10 N F.O.F. 2.3 mm O.T. 2-4.6 mounting hole 5.5 mm T.T.

Series H, DL, L, LL Self-align Fittings

A L1 L2 M 1 8 4 L04-01 33 10 21.8 30.9 15 3.5 32.7 10 14 10 1 4 1 8 L04-02 L06-01 40 36 14 10 34.9 30.9 34.7 33.8 1 4 3 8 1 8 6 L06-02 L06-03 L08-01 43 55 46 14 17 12 34.9 36.9 31.9 16 9 21.8 35.8 37.5 36 12 10 14 1 4 3 8 1 4 8 L08-02 L08-03 L10-02 52 61 68 14 17 14 16 19 23.3 35.9 37.9 36.9 38 39.7 40.7 14 12 17 3 8 1 2 1 4 3 8 1 2 Reference dimensions after R(PT) thread installation. 10

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

A_HEC-OM-J017

34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Answer -1.52 deg.C Reading offset 01 32 05 36 36 3D 0D 01 32 02 36 2D 31 35 32 03 32 3F 0D 2 36 Offset setting (without writing EEPROM) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Grommet: VKF334-G-01 DIN terminal: VKF334-D-01 Base mounted type 33.5 16.7 26 4 Manual override (non-locking) A 12.7 20 10 18.5 20.5 3 32 71.5 Max. 10 2-4.3 (mounting holes) Applicable cord O.D. 4 to 6.5 48.5 Approx. 300 (lead wire length) 26 4 Pg.7 3 27 Manual override (non-locking) A 20.5 18.5 3 32 59 68 78 70.5 43.5 12 7.5 P R 13.5 11 33.5 7.5 12 43.5 P R 3-Rc(PT) 1/8 (ports P, A, R) 13.5

Body Ported Type Vacuum Ejector ZH Series

07 One-touch One-touch One-touch 07 N01 07 One-touch Screw-in One-touch N01 N01 N01 Screw-in Screw-in Screw-in ZH10DA06 06 08 One-touch One-touch One-touch 06 01 08 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH10DA07 07 09 One-touch One-touch One-touch 07 N01 09 One-touch Screw-in One-touch N01 N01 N01 Screw-in Screw-in Screw-in ZH13DA08 10 10 One-touch

Miniature Regulator

Accessory (Option) Part No. 134856 G15-10-01(Rc1/8)/G15-P10-N01(NPT1/8) Bracket Pressure gauge Note) Note) Pressure gauges (G15) for 0.2 MPa are not available. How to Order Port size (IN, OUT) 1/8 (Male thread), M5 x 0.8 (Female thread) 1/8 (Female thread) IN OUT 01 ARJ 3 10 01 BG Made to Order Refer to page 676 for details.

Display Pressure: 2 (0.2MPa), Connection Thread: 01 (R 1/8), Grade: SRA (Precision Cleaning, Clean Room M5.5)

Display Pressure: 4 (0.4MPa), Connection Thread: 01 (R 1/8), Grade: SRA (Precision Cleaning, Clean Room M5.5)

Display Pressure: 7 (0.7MPa), Connection Thread: 01 (R 1/8), Grade: SRA (Precision Cleaning, Clean Room M5.5)

Type: Stainless Steel / Clean Pressure Gauge, Maximum Indicated Pressure(Mpa): 0.2, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 0.2 MPa, Connection screw: R 1/8, Option: None, Size: 42.5, Grade: Parts: precision cleaning; Assembly: clean room M5.5 (class 10,000), Transparent cover material: Polycarbonate (Hard coated), Attachment: Without cover ring assembly

Type: Stainless Steel / Clean Pressure Gauge, Maximum Indicated Pressure(Mpa): 0.4, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 0.4 MPa, Connection screw: R 1/8, Option: None, Size: 42.5, Grade: Parts: precision cleaning; Assembly: clean room M5.5 (class 10,000), Transparent cover material: Polycarbonate (Hard coated), Attachment: Without cover ring assembly

Type: Pressure Gauge W/ Color Zone, Maximum Indicated Pressure(Mpa): 0.2, Outer Diameter(φ): 42.5, Shape: Back side thread, Maximum Indicated Pressure: 0.2 MPa, Connection screw: R 1/8, Transparent cover material: Polycarbonate, Special Configurations: -, Attachment: Without cover ring assembly