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kpa [kpa] [kpa] 200 kpa 400 kpa 400 kpa [L/min] [L/min] PFMB7202(2000L/min) 200 kpa [kpa] 400 kpa [L/min] -65No.PF-OMP0001CN-F IN 3F.S.8 cm IN OUT [cm] -66No.PF-OMP0001CN-F PFMB7501/7102/7202 2x A B D E F H K L N PFMB7501/7102 70 30 43.7 37.2 15 14 26 18 13.6 PFMB7202 90 35 49.2 42.7 17.5 24 31 28 16.8 S T U V W PFMB7501/7102 24 22 32 40 50 PFMB7202 30 30 42 48 58 -67No.PF-OMP0001CN-F

(Page 82) H_1 (Setting of OUT1 hysteresis) Setting of OUT1 hysteresis (Hysteresis) 2 R/W U16 200 Y Setting range Refer to "Settable range list". (Page 82) P1L (n1L) (Lower limit of window comparator) Setting of OUT1 output set value (Lower limit of window comparator) 3 R/W S16 1200 Y 1220 0x04C4 Setting range Refer to "Settable range list".

(Custom range) Relationship between analogue input and digital display Set value A B 200 0 L/min 200 L/min 500 0 L/min 500 L/min 1000 0 L/min 1000 L/min 2000 0 L/min 2000 L/min 3000(Default) 0 L/min 3000 L/min 6000 0 L/min 6000 L/min 12000 0 L/min 12000 L/min 16000 0 L/min 16000 L/min 20 0 L/min 20 L/min USEr Input value (setting) Input value (setting) -31No.PF-OMU0007-D Press

Max. 1 NL/min 10 NL/min PF2A710 3.5 CFM x 10-2 35.0 CFM x 10-2 5 NL/min 50 NL/min PF2A750 18 CFM x 10-2 176 CFM x 10-2 10 NL/min 100 NL/min PF2A711 3.5 CFM x 10-1 35.5 CFM x 10-1 20 NL/min 200 NL/min PF2A721 7 CFM x 10-1 71 CFM x 10-1 50 NL/min 500 NL/min PF2A751 18 CFM x 10-1 176 CFM x 10-1 : Analogue output is based on the rated flow range at normal condition.

. *1 Applicable fluidconductivity *1 5S/cm or more (micro Siemens/cm) Detecting method Electro static cupacity Ground*10 Negative ground Rated flow range 0.5 to 20 L/min 2.5 to 100 L/min 5 to 200 L/min Display range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Set point range 0.424.0 L/min 2.0 to 120.0 L/min 4 to 240 L/min Zero-cut flow *2 0.4 L/min 2.0 L/min 4 L/min Min. setting unit

[%F.S.] 2.0 1.5 1.0 0.5 0.0 0 1 2 3 4 5 [s] [S] [MPa] [MPa] [MPa] [MPa] [ [ [ [ ] ] ] ] 2 69 No.LFE*-OMY0008 / / / / A B C 1 V 1.1 V 5 V 4 mA 4.4 mA 20 mA [L/min] LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 70 No.LFE*-OMY0008 2x )M12 () 1.6mm A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67

The proof pressure is double the operating pressure range. -70No.LFE*-OMZ0011 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out of range -71No.LFE*-OMZ0011 Dimensions Note) The electrical entry

. (5) Any fluid which corrodes the internal fluid contact parts cannot be used. -25No.LFE*-OMZ0012 Characteristics Chart Flow rate characteristics (pressure loss) LFE1 LFE2 0.02 0.02 Pressure loss [MPa] Pressure loss [MPa] 0.015 0.015 0.01 0.01 0.005 0.005 0 0 0 5 10 15 20 0 20 40 60 80 100 Flow rate [L/min] Flow rate [L/min] LFE3 0.02 Pressure loss [MPa] 0.015 0.01 0.005 0 0 50 100 150 200

Specifications Model XLDV-25 XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100 XLDV-160 Flange (valve) size 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3

The available bore sizes are 125, 160, 200, 250, 320 and 400. 2-3. No signal operation With No signal operation (Menu Tree No.1-3-5-3-3), the piston rod operation can be set when the input signal of 3.5mA or less is input. The available operation is Retracted end. Calibration position and Stay. 2-4.

Scraper (piston rod) 1 million full strokes or 200 km. Ball screw shaft Approximately 6 months Grease pack order number (Arrange separately) GR-S-010 (10g), GR-S-020 (20g), GR-S-400 (400g) Please contact us for the Maintenance Manual. 3. It is recommended that apply the appropriate covering to the electric actuator in the environment of splashing the liquid other than water.

100 400 200 400 200 Actuator specifications Pushing speed[mm/s] 20 to 30 10 to 30 5 to 30 20 to 30 10 to 30 20 to 30 10 to 30 Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion[mm] *4 0.1 or less Screw lead[mm] 10 5 2.5 12 6 16 8 Impact/Vibration resistance[m/s2] *5 50/20 Actuation type Ball screw (In-line) Ball screw + Belt (parallel) Guide type Linear

Unit 3 Inrush current filter 0.1 ms Sets the time to ignore the input signal change. 20 ms 1.0 ms Selects the time for filtering. 1.0 ms Unit 4 Input filtering time 10 ms 1.0ms Sets the time to hold the input signal. 200 ms 5 Input extension time 15 ms Selects the time to hold the input signal. 15 ms Unit 100 ms Enable Generates an error.

Disable Does not ignore excess current Enable Ignores excess current. 2 Inrush current filter (Inrush) 0.1 ms 1.0 ms 10 ms 3 Input filtering time (Filter_T) Sets the time to ignore the input signal change per unit 20 ms Selects the time for filtering. 1.0 ms 1.0 ms 15 ms 100 ms 4 Input extension time (SigExt_T) Sets the time to hold the input signal per unit. 200 ms Selects the time to

> Network information including the GW unit MAC address and communication speed are displayed. 38 No.EX-OMS0014-A Specification Specifications Basic Specifications Item Specifications Power supply voltage range Power supply for input and control: 24 VDC 10% Power supply for solenoid valve: 24 VDC +10%/-5% Power supply for input and control: 6.2 A (GW unit internal current consumption: 200

Selects the time to hold the input signal. 15 ms 200 ms Memorizes the number of times the input device is ON. Generates error per channel when the operation count exceeds the set value. 3 Enable Generates an error.

Solenoid Valve for 200/220 VAC Specification Warning AC specification solenoid valves with grommet have a built-in rectifier circuit in the pilot section to operate the DC coil. With 200/220 VAC specification pilot valves, this built-in rectifier generates heat when energized.

Specifications Table. 9-1 EX245-EA2-1 specifications Item Description General Dimensions (W x L x H) in mm 28.6 x 120 x 61.5 Weight 200 g or less Housing material Nylon Table. 9-2 EX245-EA2-2 specifications Item Description General Dimensions (W x L x H) in mm 14 x 120 x 61.5 Weight 100 g or less Housing material Nylon NOTE EX245-EA2-2 can be used to have a special bracket which must be

LAT3LAT3MLAT3F600 350 700 Load weight1000g Load weight1000g Load weight1000g 300 600 Positioning time [ms] Positioning time [ms] Positioning time [ms] [ms] 500 [ms] [ms] 700g 700g 700g 250 500 400 500g 500g 500g 200 400 300 150 300 200 100 200 300g 300g 300g 100 100g 100g 50 100 100g 0g 0g 0g 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 0 10 20 30 40 50 Total travel distance [mm] Total travel

Applicable cable O.D. 6 to 8 Caution Caution DIN terminal block DIN terminal Terminal no. 1 2 Lead Wire Color (Grommet) Caution Voltage Color 100 VAC Blue 200 VAC Red DC Red (+), Black () Others Gray Light/Surge Voltage Suppressor AC DC Caution Indicator light assembly (DIN terminal: Yes, Grommet: No) Description Part no.