LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions LEL25 Series LEL Electric Actuator/Guide Rod Slider Belt Drive Step Motor (Servo/24 VDC)

0 q Size 48 mm T w Bearing type e Equivalent lead r Stroke t Motor option M L Sliding bearing Ball bushing bearing 25 100 Without option With lock With motor cover to 100 mm Nil B C to 1000 1000 mm Refer to the applicable stroke table.

Exhaust Cleaner for Clean Rooms AMP Series

OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2,

AC Servo Motor Driver (MECHATROLINK-II type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2.

PSxx-OMM0002CN

kPa 100 kPa -0.1001.000MPa -0.1 MPa 0 1.

Exhaust Cleaner for Clean Rooms AMP Series

OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2,

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

NPN) C76 IC 5 V Grommet C73 B54 C73C A33A A34A A44A B59W H7A1 H7A2 H7B H7C G39A K39A H7NW H7PW H7BW H7BA H7NF 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Yes Yes Connector 12 V 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC Grommet DIN terminal Diagnostic indication (2-color) 3-wire (NPN) 3-wire (PNP) IC 5 V, 12 V Grommet 12 V 2-wire Connector 3-wire (NPN) 2-wire

Regulator for 2 MPa ARX 20

200 300 400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR) Pressure

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Option Part no. 1 Bracket A ZS24A With 2 pcs. of mounting screws 1 Bracket D ZS24D With 2 pcs. of mounting screws 1 Panel mount ZS24E 1 ZS24F Panel mount + Front protection cover 1 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Specifications ZSE50F (Compound pressure) 100 to 100kPa 100 to 100kPa 500kPa 0.1 0.001 0.001 0.02 1 0.1 ISE50 (Positive pressure)

Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Vacuum Saving Valve

generator used. 1 40 30 From the flow-rate characteristics of the vacuum generator (Chart 1), calculate the suction flow (Q1) of the vacuum generator from the required vacuum pressure. 20 10 e 00 10 20 30 40 50 60 70 80 90 100 110 Vacuum pressure 50 kPa (qwe) = Suction flow (Q1) 31 l/min (ANR).

S Couplers Series KK/KKH/KK13

2 e !4 !5 !4 !5 !

CV/MVGQ

CVM5/CVM5K MXU 20 Standard 3.5-18 Double acting 25 MXS 3.5-29 32 Nonrotating rod 40 MXQ MXF Series CVM3/CVM3K 20 Standard MXW Single acting 3.5-34 25 (Spring return) 3.5-47 32 Nonrotating rod (Spring extend) MXP 40 MG Series CV3/CV3K 40, 50 63, 80 100 MGP 3.5-52 Standard Double acting MGQ Nonrotating rod 40, 50 63 3.5-63 MGG MGC Series CVS1/CVS1K 40, 50 63, 80 100 3.5-67 Standard MGF Double

Related Products: Heavy Duty Auto Drain Series ADH4000 1

AT Option: Reference Figure of Assembly ID Piping example of ball valve piping set AMG (45) (41) AFF (54) (100) AM Misc. 14-20-53

AMX-OM-L024_e

/M AI N TEN AN CE Separat e and rem ove f orei gn m at eri al and aerosol oi l part i cl e cont ai ned i n com pressed ai r. Fi l t rat i on rat i ng0. 01 m ( Fi l t rat i on ef f i ci ency99. 9% ) O ut l et cl eanl i ness: 100 or l ess /f t 3 of 0. 3 m or m ore of part i cl e ( 35 or l ess / 10L ( AN R) ) Fol l ow i ng envi ronm ent s l ead to cause breakage.

FILTER REGULATOR

AW-OMS0038-C PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2. APPLICATION 7 3.

FILTER REGULATOR

AW-OMT0013-B PRODUCT NAME FILTER REGULATOR MODEL/ Series AW20K-(F,N)01(F,N)02(B,C,E,G,H,M)(-1,2,6,C,J,N,R,Z)-B AW30K-(F,N)02(F,N)03(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)02(F,N)04(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW40K-(F,N)06(B,C,D,E,G,H,M)(-1,2,6,8,J,N,R,W,Z)-B AW60K-(F,N)06(F,N)10(B,C,D,E,G,M)(-1,2,6,8,J,N,R,W,Z)-B Contents PAGE 1. SAFETY INSTRUCTIONS 16 2.

SMC's E-MY2 series e-rodless actuators require no programming, and have both the operational ability of an air cylinder, and the speed controllability of an electric actuator.  The series consists of the E-MY2B (basic), E-MY2C (cam follower guide), E-MY2H (linear guide, single axis), and the E-MY2HT (linear guide, double axis) styles. 

SMC's E-MY2 series e-rodless actuators require no programming, and have both the operational ability of an air cylinder, and the speed controllability of an electric actuator.  The series consists of the E-MY2B (basic), E-MY2C (cam follower guide), E-MY2H (linear guide, single axis), and the E-MY2HT (linear guide, double axis) styles. 

SMC's E-MY2 series e-rodless actuators require no programming, and have both the operational ability of an air cylinder, and the speed controllability of an electric actuator.  The series consists of the E-MY2B (basic), E-MY2C (cam follower guide), E-MY2H (linear guide, single axis), and the E-MY2HT (linear guide, double axis) styles.