MRHQ

0.014 J 0.034 J 0.074 J Allowable kinetic energy MHK Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Auto switch Rotary unit Solid state switch (2-wire, 3-wire) Gripper unit Solid state switch (2-wire, 3-wire) MHS Note) Operate within the speed adjustment range, as

IDU/IDF

pressure gauge Ventilation air outlet Evaporation thermometer C (D) (I) Ventilation air inlet Ventilation direction Ventilation direction Terminal block Power cord outlet (Condenser) (Condenser) (J) L M P Drain port Rc 1/4 G N 65 4-13 Auto drain is packed together with air dryer.

2/3 Port Valve

Flange M L K J I H G F E D C B A 310.5 326 350 303.5 319 343 300.5 316 340 256.5 272 296 244 259.5 283.5 12 12 14 36 42 54 100 105 120 20 24 24 134 146 162.5 135 140 155 210.5 226 250 130 150 180 1 8 1 4 1 4 32 40 50 VNB5-32F VNB6-40F VNB7-50F 4.2-17 VNB Construction Principles of Operation (The vacuum pilot style is excluded) 1 4 1 4 VNB0 , 1 1 (N.C.)

Vacuum Pad

ZP3P-20PTSF ZP3P-25PTSF ZP3P-35PTSF ZP3P-50PTSF p. 2 q Pad unit With Buffer p.6 e Buffer assembly Pad diameter Part no. 20 25 35 50 Dimensions ZPB2(J/K)10-B5 V V ZPB2(J/K)20-B5 V V ZPB3(J/K)10-B01 V V ZPB3(J/K)20-B01 V V p. 12 e Buffer assembly w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions ZP3PA-T1-B5 V V ZP3PA-T2-B8 V V w T female thread adapter p. 11

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

ASN AQ ASV Flow Rate and Sonic Conductance Symbol AK AS221F-01 AS121F-M5 AS221F-02 AS321F AS421F Model Tubing O.D.

Series AP500

Delivery pressure Bonnet option Delivery pressure 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Code Code Bonnet Standard Panel installation 4) 01 No code P Material 4) Panel mounting hole: dia 1.56 inch (39.6 mm).

HRX-OM-S004

Setting of the selected alarm Setting range: AL.01 to AL.51 to 63. Press the [MENU] key once. Returns to the main display (which shows the circulating fluid temperature).

HRX-OM-Q026

Setting of the selected alarm to Setting range: AL.01 to AL.49 63. Press the [MENU] key once. Returns to the main display (which shows the circulating fluid temperature).

HRX-OM-W032

Setting of the selected alarm Setting range: AL.01 to AL.51 to 63. Press the [MENU] key once. Returns to the main display (which shows the circulating fluid temperature).

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Ozone Resistant

220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Booster Regulator/Air Tank

SRH VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer SRP G N S L G36-10-01 AN30-03 ANA1-03 KT-VBA22A-7 AN30-03 ANA1-03 G36-10-01 AN40-04 ANA1-04 G27-20-01 AN40-

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2 x M2 x 0.4 depth 2.2 12 11-/22-MXP6-10 Metal stopper Max. 10.5 F 4 x M3 x 0.5 depth 3 12 2 x M2 x 0.4 depth 3 (mm) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 23.5 45 2 11-/22-MXP6-51 30 35 53 48.5 47 37 11 10 42 30 60 9.5 11

240

Dimensions [mm] Model L1 L2 A B C D E F G J K LEPS10-25 138 152.5 61.8 20 22 30 29 20 29 39 88.2 LEPS10-50 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10L-25 124 138.5 47.8 20 22 30 29 20 29 39 88.2 LEPS10L-50 149 163.5 24 43 34 50 24 50 60 113.2 394 LEPY/LEPS Series Specific Product Precautions 1 Be sure to read this before handling the products.

15

Select [Applicable tubing O.D.: 4 or more, Connection thread: Rc1/8]. 10.5 Motorless Motorless FK LAT Dimensions [mm] LZ Size Stroke range [mm] B C D EH EV H J K L M O1 R S T U LC3F2 63 50 to 200 123 21 40 76 82 M16 x 2 44 36 33.4 60 M8 x 1.25 16 78 83 5 205 to 500 158 505 to 800 193 The L measurement is when the unit is at the retracted stroke end position.

Integrated Controller

GR-S-010 (10 G) GR-S-020 (20 G) 20 Easy to Operate EQFSH Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor EQFS16H (72) 50 24 3 H9 (+0.025 0 ) depth 3 4 x M4 x 0.7 thread depth 6.4 12 Body mounting reference plane (B dimension range)1 39.4 28 3.5 3 H9 (+0.025 0 ) depth 3 Stroke A + Stroke (Table traveling distance)2 Required space: J L + Stroke 127 (With lock: 188

Refrigerated Air Dryer

IDFB3E IDFB4E to IDFB11E B Q A D E Compressed air inlet Illuminated switch Compressed air outlet Evaporation thermometer G F J Ventilation direction Ventilation direction C Ventilation air outlet Drain tube (O.D.: 0.4 [10 mm], Length: 31.5 [0.8 m]) H 4 x 0.5 [4 x 13 mm] N M L K Power cable with plug (Length: 110 [2.8m]) Dimensions Unit: inch [mm] A B C D E F G H J K L M N Q Model Port size

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42 47 37 11 10 59 11-/22-MXPJ6-10 100 Air slide table MXP/MXPJ6 11221122Dimensions: MXP6 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter