Miniature Fittings M3, R(PT) 1/8, M5 Series M

159 1.4 26 10 1.5 15.5 10 4 2.5 6 4 5 25.7 19 14 10 3 15.2 12 5 9.4 4 27.2 17 20.5 16.2 12 14 8 6 14 5 17 6.5 18 5.5 22 10 28.8 19 21.5 18.8 14 17 17 7.5 25 6.5 22 17 7 30 8 22 12 30.3 22 23.5 19.3 17 19 17 9 8 38 22 Reference dimensions after R(PT) thread installation. 100

CEx-OMQ0010

P PNP C E U 1 C E U 5 AC80120V AC100240V DC24V DC24V NPN RS-232C P PNP RS-232C+BCD NPN P PNP C E 1 R *1) (CE1-ROOC) 05 5m 10 10m 15 15m 20 20m *1)() C ()(CE2)(CE2**-*Z ) CE1-ROOC CE1-RO5 CE1-R10 CE1-R15 CE1-R20 CE1-R*C 11 3 100 200 200 NO 100 80 YES 100 100 80 kgf kgf 63 NO 63 50 50 40 40 YES 100 100 300 300 200 400 500 200 400 500 NO mm/s mm/s OK YES NO NO YES

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS2052FS AS1002FS AS2002FS Inlet pressure: 0.5 MPa 500 Inlet pressure: 0.5 MPa 100 08, 09 Inlet pressure: 0.5 MPa 06, 07 01, 23, 03, 04, 06, 07 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] 200 400 06, 07 03, 04 300 50 100 200 100 0 0 5 10 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002FS AS4002FS Inlet pressure

NCA1

, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Example: NCDA1B150-0200R+0300-XC11 will stroke 2" then an additional 3" for a total stroke of 5".

CYP

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

NCA1

Cushion NCA D-X Mounting 20Standard Stroke Data Bore size (in) 1.50 2, 2.50 3.25, 4 Standard stroke 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Smooth movements even at 0.4 to 2 inch/sec Auto switch mounting available.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

57 23 AS321FG-03-12 AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 12 20.9 3/8" 17.9 21 59 AS421FG-04-10 AS421FG-N04-11 33.6 47.9 100 21 33.6 47.9 10 18.5 3/8" 17.9 21 100 NPT 1/2 28.6 24.5 23.8 42.1 56.7 49.2 56.7 49.2 49.6 24 49.6 42.1 24.5 R 1/2 28.6 AS421FG-04-12 AS421FG-N04-13 35.2 49.5 101 22 35.2 49.5 12 20.9 1/2" 21.7 22 101 Note 1) Reference dimensions Note 2) Reference dimensions of

Model Selection 1

5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

: 10 8-6: 5; 8-8: 5, 8-10: 5 Max. operating frequency (cycle/sec) 8-6: 10; 8-8: 10, 8-10: 20 8-6: 3; 8-8: 3, 8-10: 2 Lubrication Not required Manual override Non-locking push type Enclosure Dusttight Coil rated voltage 100 VAC, 110 VAC, 200 VAC, 220 VAC, 24 VDC Allowable voltage range (%) 15 to +10% of rated voltage Coil insulation Class B or equivalent 50 Hz 5.6 Apparent Inrush 60 Hz 5.0

HRX-OM-R005

0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet

70pvvna

The valve element of the C.O. type, which has no return spring, is in an arbitrary position when air is exhausted through the 12(P1) and 10(P2) ports. When pressurized air enters the 12(P1) port (exhaust from the 10(P2) port), the valve element opens, and it closes when pressurized air enters the 10(P2) port. LVH LVD LVQ LQ LVN Component Parts No.

Speed Controller with

AS2052F-A AS1002F-A AS2002F-A 500 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 01, 23, 03, 04, 06, 07 100 08, 09 06, 07 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 400 200 06, 07 03, 04 300 50 200 100 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002F-A AS4002F-A 1500

EXxx-OMN0029CN

EDS Enable 1 (SC_MonSs) Disable -10..10 V -5..5 V -20..20 mA 0..10 V 2 (Range) -10.. 10 V 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary PLC 3 (D_Format) Sign & Magnitude 2S Complement 2 None 2 2AVG 2 4 (Filter) 4AVG 4 8AVG 8 Enable 0.5 5 (Over_Rng) Disable Enable 0.5 6 (Undr_Rng) Disable 1 Enable (Upr_Lmt) 2 7 Disable 1 Enable (Lwr_Lmt) 2 8 Disable 1 2DeviceNet

HRX-OM-W032

10 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig. 8-3: Cooling Capacity 8.5 Pump Capacity 0.6 60 Usable flow rate range 0.5 50 Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz) 0.1 10 Circulating fluid return 0.0 0 0 10 20 30 40 50 60 70 80

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

VEX1

Symbol Parts name VEX11001 02 VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-1A G27-10-01 G36-10-01 B F G Bracket (with bolt and washer) Air operated External pilot solenoid G46-10-01 VEX1-18-2A Pressure gauge (1) Note 1) When requring the gauge except mentioned above, specify the model number.

Micro-Mist Separator with Prefilter Series AMH

66 17 10 218 80 22 10 218 80 19 10 241 90 25 10 241 90 21 10 277 100 30 10 334 150 40 13 13 16 16 19 19 22 22 32 100 63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.