AMF

10 10 10 10 AMF150 AMF250 1/2 3/8, 1/2 AMF350 3/4 AMF150SAME, #1 AMF250SAME, #2 AMF350SAME, #3 4.6-31 Odor Removal Filter Series AMF Dimensions: AMF450 to AMF850 HAl AT IDl AMG AFF AMl M Dimensions with mounting bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 Related poroducts 36 9 205 19 100 106 3 106 10 1 2 3 4 , AMF450 1 212

High Purity Fluoropolymer Needle Valve Series LVN 1

Symbol 2 3 4 Metric sizes 04 06 08 10 12 4 6 8 10 12 Inch sizes 03 05 07 11 13 1/8 3/16 1/4 3/8 1/2 Different diameter tubing order example Basic size With reducer Note) Applicable fitting: LQ2 Different diameter tubing (with plug-in reducer) can be selected within the same body class. (Example) Body class 3 A side: 10 x 8 B side: 8 x 6 Order as shown below.

PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

assy, VV5Q* MANIFOLD VQ 4/5 PORT (sold in packages of 10; price is per piece)*** $3.81 + Add to Quote Add To Cart Add to Cart SMC VVQ2000-51A-C6 fitting assy, VQ1000/VQ20/VQ30 VALVE (sold in packages of 10; price

AME

167 235 122 160 220 3 122 160 220 10 10 10 AME550 AME650 AME850 1 2 1 2 1 2 1 Please refer to page 14-20-57 for Made to Order Specifications. 14-20-41

AMF

bracket Model Port size (Nominal size B) A H B C D E F G I 221 J 25 K 10 L 14 N 90 O 55 P 110 Q 50 R 88 S 3.2 AM 1 2 3 4 , 9 36 205 19 100 106 3 106 10 AMF450 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 Misc. , , , 1 1 4.5 4.5 6 3 4 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 239 291 403 22 32 42 128 167

0.01

Maximum Flow Rate 1000 SFD200-C12, -02 SFD200-C08 SFD200-C10 Flow rate (L/min(ANR)) SFD100-C08, -02 A 100 SFD100-04 SFD100-06 10 0 0.5 1 Pressure (MPa) 320 Clean Air Filter SFD Series RoHS HAA HAW How to Order AT IDF IDU 1 0 SFD 0 C08 IDF FS Clean air filter IDFA Size Max. flow rate 100 L/min (ANR) 500 L/min (ANR) Option Option None Bracket (SFD100 only) IDFB Symbol 1 2 Symbol Nil B IDH

VCS

Orifice size Class 3 Class 2 Orifice size (mm) 2 3 4 5 7 10 Class 4 Symbol 2 3 4 5 7 10 Electrical entry G Grommet C Conduit Refer to the below table for orifice and port size combinations.

2/3 Port Valve

B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.

ZP

(mm) 02 04 2 4 Nil -X19 With lock ring Without lock ring (10 or larger) 1 2 10 to 16 20 to 32 ZX 06 6 3 40, 50 ZR 08 8 Material 10 10 N S NBR Silicon rubber 13 13 ZM 16 16 Pad type U Urethane rubber 20 20 ZH F Fluoro rubber 25 25 U C Flat Flat with ribs GN Conductive NBR (2 to 16) 32 32 ZU GS Conductive silicon rubber (2 to 16) 40 40 D Deep 50 50 20 or large are manufactured upon receipt

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

4 6-14-10 11 Series NCM Construction: Single Acting, Spring Return t y q !1 !2 e r !0 w o CJ1 CJP CJ2 CM2 CG1 !

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

VK3000

Refer to external dimensions in pages 3-2-4 to 3-2-10, and then mount it. VFN 48 V DC None Z Precautions Plug a connector in or out vertically, never at an angle. How to Calculate the Flow Rate S 6 V For obtaining the flow rate, refer to page 3-1-10.

NCRBIBwserbs

00015 -0.00047 o'u %.ooto 4.120.73 0.350.02 0.39 0.s4 tvt3 {0.20) 10"32UNF M3x0.5 NCDRBTBWl5 1.340.94 0.98011 -{.01 -0.00017 0.47 0 -{.0017 0.160.730.390.020.5950 1 . 1 4 M3 10.20) 10-32UNFM3X0.5 NCDRBlBW20 1.651.32 1.00 0.79 -0.0015 -0.00045 0 0.0016 0.180.980.390.02 0.79 50 1.42 8-32UNC (0.28) 10-32UNF NCDRBlBW3O 1.97't.791.00 -0.0002 -0.0006 0 -{.0016 0.200,98 0.47 0.04l . r 850 1.69 '

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

00015 -0.00047 o'u %.ooto 4.120.73 0.350.02 0.39 0.s4 tvt3 {0.20) 10"32UNF M3x0.5 NCDRBTBWl5 1.340.94 0.98011 -{.01 -0.00017 0.47 0 -{.0017 0.160.730.390.020.5950 1 . 1 4 M3 10.20) 10-32UNFM3X0.5 NCDRBlBW20 1.651.32 1.00 0.79 -0.0015 -0.00045 0 0.0016 0.180.980.390.02 0.79 50 1.42 8-32UNC (0.28) 10-32UNF NCDRBlBW3O 1.97't.791.00 -0.0002 -0.0006 0 -{.0016 0.200,98 0.47 0.04l . r 850 1.69 '

Air Cylinder

Bore size d H B C D NT-03 32 M10 x 1.25 6 17 19.6 16.5 NT-04 40/45 M14 x 1.5 8 22 25.4 21 NT-05 50/56/63/67 M18 x 1.5 11 27 31.2 26 NT-08 80/85 M22 x 1.5 13 32 37.0 31 NT-10 100 M26 x 1.5 16 41 47.3 39 5 JMB Series Auto Switch Mounting Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV Hs A Ht B [mm] Auto

Series KV2 Fittings

_ _C OD ID L Applicable Tube (Inch) Part Number ID L Bag/Box Quantity OD 1/4 3/8 1/2 KR-07C KR-11C KR-13C 16.0 20.3 24.3 5.8 9.0 12.2 9.0 10.5 10.5 TBD TBD TBD All accessories not required to pass FMVSS 106 16 Series KV2 Accessories Ergonomic Tube Cutter TK-4 Stainless Steel Replacement Blades Carbon Steel Replacement Blades TK-4-BSS (10 pieces per package) TK-4-BCS (10 pieces per package

Speed Controller with One-touch Fittings Series AS In-line Type 1

Metric size Inch size P . 15-11-3 3.2 With One-touch fittings 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Use 1/8" tube. 23 04 06 08 10 12 01 03 05 07 09 11 13 4 6 8 10 12 Flow Direction Symbols on Body JIS Symbol Symbol 15-9-10