Vacuum System Peripherals:

Power supply voltage S L Straight type 3 m Right angle type 3 m Without cable connector Flow Characteristics 0 1 24 VDC 12 to 15 VDC N 0 Option Input signal 10 Bracket 0 1 2 3 4 Current type 4 to 20 mA DC Current type 0 to 20 mA DC Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Preset input 20 Output pressure (kPa) Nil B Without bracket Flat bracket L-bracket 30 40 C Option 50 Monitor

Clean Regulator

pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 10 0 5 15 20 25 0 0 1000 500 500 1000 1500 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH4100-03 SRH4110-03 SRH4100-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 1000 500 10 5 0 15 20 25 500 1000 1500 0 0 Flow rate L/min

ITV-E

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put Brow n Bl ue W hi t e Bl ack W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV

MXH Series Compact Slide

0 0 0.11 0.22 0.34 0.47 0 0.20 0.29 0.39 Yaw moment My(Nm) Pitch moment Mp(Nm) 1 N m = 0.7375 ft lb 1 N m = 0.7375 ft lb MXH10 MXH10 0.3 0.3 60 60 50 0.25 0.25 Displacement (mm) Displacement (mm) Displacement (mm) Displacement (mm) 40 50 0.2 0.2 25, 30 40 Stroke Stroke Stroke 15, 20 0.15 0.15 25, 30 5, 10 0.1 0.1 15, 20 5, 10 0.05 0.05 0 0 0 0.17 0.33 0.50 0.67 0.82 0.20 0 0.37 0.57 0.76

Process Pump Series PA3000/5000/PAX1000 Series PB1000

0 0 0 0.2 0.4 0.6 0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 Discharge rate l/min Discharge rate l/min Discharge rate l/min PB1000 Air consumption Selection from flow rate characteristic graphs Required specification example: Find the pilot air pressure and pilot air consumption for a discharge rate of 600ml/min and a total lifting range of 15m.

Compact Electro-pneumatic Regulator Series ITV0000

Return 0.5 0.4 0.2 0 0 Out -0.2 -0.4 -0.5 -0.6 -0.8 0 25 50 75 -1 1 2 3 4 -1 100 5 Input signal % F.S.

Flow Sensor Series PFMV

to 0.5 l/min 0 to 3 l/min 0 to 1 l/min 0.5 to 0.5 l/min Note 2) 1 to 1 l/min Note 2) 3 to 3 l/min Note 2) Rated flow range (Flow rate range) 2 F.S. or less Note 3) Repeatability Pressure characteristics (Based on 0 kPa Note 4)) 2% F.S. or less (0 to 300 kPa) 5% F.S. or less (70 to 0 kPa) 2% F.S. or less (15 to 35C) 5% F.S. or less (0 to 50C) Temperature characteristics (Based on 25C) Rated

O

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put Brow n Bl ue W hi t e Bl ack W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV

O

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put Brow n Bl ue W hi t e Bl ack W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV

Nozzle Type Ionizer

Make sure to ground. +24 V +24 V Brown + 24 VDC Brown + 24 VDC +24 V Power supply 24 VDC +24 V Power supply 24 VDC Blue 0 V Blue 0 V 0 V 0 V F.G. F.G. Make sure to ground. Make sure to ground.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

U side D side D D D D D D 3 2 1 Stations How to Order Solenoid Valve 10 SV 1 1 0 0 F 5 Note) Clean series Note) Available with manifold block for station additions. Refer to the WEB catalog.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

LECA6_C

mm/s 0 1 ABS 100 50.00 1000 1000 0 0 0 100 0 0 0.1 2 INC 50 10.00 1000 1000 0 0 0 100 0 0 0.1 () No.1(IN0ON) DRIVEON No.1 DRIVE No.

POWER CLAMP CYLINDER

Bore Arm angle( (mm) 75 90 105 120 15 30 45 60 135 0 0 0 0 0 0 0 0 0 50 15 30 45 60 75 90 105 120 135 -4 -5 -5 -5 -5 -5 -5 -6 -9 0 0 0 0 0 0 0 0 0 63 15 45 30 60 75 90 105 120 135 -3 -4 -5 -5 -5 -5 -5 -6 -9 (7) Do not disassemble the power clamp cylinder. The power clamp cylinder consists of a completely sealed structure in order to protect it from welding spatter.

IZx-OMR0035

Air flow SW:1 10 10 Air flow SW:10 5 5 Air flow SW:10 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance mm Installation distance mm 28 Doc.

MHL2

5 Rubber magnet Synthetic rubber Replacement Parts MHL2-40 Main parts Seal kit @6@7@8@9#0 <10> !1!3!6@6 <16 to 25> eo!0!4!6@6#0 <32, 40> ei!4!

0.4

0 Fitting assembly> Wiring 0 1 For single (2-wire) For double (3-wire) (For P, R port) VVQ1000 51A C8 C SSQ1000 4 A P 1 200 For station 2 to 24 kit Port size Wiring C6 C8 N7 N9 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 1/4" One-touch fitting for 5/16" 0 1 For single (2-wire) For double (3-wire) How to Increase Manifold Stations Manifold Options Lead wire length

Escapements Series MIW/MIS

+0.025 6 -0.1 0 7h9 -0.036 0 2.6 4 18 13 4 15 M3 x 0.5 7 6 (Effective depth 3) 8 -0.1 0 10h9 -0.036 0 2.5H9 0 +0.025 21 26 4.5 19 M3 x 0.5 9.5 23 3.3 5 18 10 (Effective depth 4) 13h9 -0.043 0 11 -0.1 0 4H9 0 +0.030 28.5 29.5 35 M5 x 0.8 25.5 5.1 7 12.5 6.5 25 15 (Effective depth 7) 17 (Effective depth 8.5) 17h9 -0.043 0 15 -0.1 0 41 41 40 5H9 0 +0.030 M6 x 1 37 6.8 10 17 10 28 21h9 -0.052

q"s

*sure dlsplay Accuracy J3% (lull span) Minimum unit [ i l P a : 0 . 0 1 . k a f / c m ' : 0 . 0 1 , b a r : 0 . 0 1 .

Hygienic Design Cylinder Series HY

0 !2 w !1 o @0 @1 Built-in magnet @2 @5 @3 @4 Component Parts No. Description Material Qty. Note No. Description Material Qty.