Digital Unit M12 connector (5 pins) M8 connector (3 pins) D-sub connector Spring type terminal block Input Unit 8 inputs 8 inputs 16 inputs 16 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 16 inputs Output Unit 8 outputs 8 outputs 16 outputs 16 outputs 16 outputs 16 outputs Input/ Output Unit 8 outputs 8 outputs 8 inputs/ 8 inputs/ 8 inputs/ 8 inputs/ 8 outputs 8 outputs IP67 IP67
2) Specified layout (up to 16 solenoids possible.) 16 16 stations Including the number of blanking plate assemblies.
solenoids) 16 stations 16 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors SI unit Refer to page 360.
D397 Series MHZ2 How to Order Bore size M9BW 16 MHZ2 D 10 to 25 Made to Order Refer to page 400 for details. Number of fingers 2 2 fingers Bore size 10 16 20 25 Number of auto switches 10 mm 16 mm 20 mm 25 mm Action D S C Nil S n 2 pcs. 1 pc. n pc. For the applicable auto switch model, refer to the table below.
M5 x 16 15 13.5 21 13 15 34.5 MXQ-AS16 (L)-X11 Q 25 MXQ-AS16 (L)-X12 44.5 5 27.5 MXQ-AS20 (L) J MXQ20 (L) M6 x 16 M6 x 16 15 M12 x 1.25 13 17 45 6 20 37.5 16 25 16 18 MXQ-AS20 (L)-X11 25 47.5 MXQ-AS20 (L)-X12 K H 5 32.5 MXQ-AS25 (L) MXQ25 (L) 15 M8 x 18 M8 x 18 42.5 16 19 54 6 22 M14 x 1.5 MXQ-AS25 (L)-X11 18 31 17 20 25 52.5 MXQ-AS25 (L)-X12 1) Size of hexagon socket head cap screw 2) It
20 10 21 16 KQ2R10-16 20.9 50.5 (29.5) 42 25.5 12 16 KQ2R12-16 20.9 50.5 58.3 (46.1) 37 25.5 22 Note) ( ): Values for soft nylon.
") 0.24 0.250 0.251 0.25 0.50 0.88 0.12 0.75 0.38 1.12 0.624 5/16-24 5/8-18 5/8-18 0.62 0.62 1.56 0.312 125 (1 1/4") 0.25 0.250 0.251 0.38 0.75 1.06 0.25 0.75 0.50 1.32 0.749 7/16-20 3/4-16 3/4-16 0.88 0.78 1.81 0.437 150 (1 1/2") 0.25 0.375 0.376 0.38 0.75 1.25 0.25 1.00 0.62 1.56 0.749 7/16-20 3/4-16 3/4-16 0.88 0.78 1.69 0.437 Single Acting, Spring Return B, C, E Mounting without Magnet
(n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) Note 1) D-M9, M9V, M9W, M9WV, M9A, M9AV cannot be mounted to 100. Note 2) D-A5, A6, A59W, Z7, Z80 cannot be mounted to 32.
M: Size 16, 25, 40 only.
, 8, 12, 16) 110 + 30 (n 4) 2 115 + 30 (n 4) 2 (n = 4, 8, 12, 16) 10 + 30 n (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 2 (Different surfaces, Same surface), 1 D-A5/A6 D-F5/J5 D-F5W/J59W D-F5BAL/F59F 100 110 120 90 15 (n 2) 2 90 + 55 (n 4) 2 (n = 4, 8, 12, 16) 100 + 55 (n 4) 2 (n = 4, 8, 12, 16) 110 + 55 (n 4) 2 (n = 4, 8, 12, 16) 120 + 55 (n 4) 2 (n = 4, 8, 12, 16) 15 + 55 n (Same surface
Digital Unit M12 connector (5 pins) M8 connector (3 pins) D-sub connector Spring type terminal block Input Unit 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs Output Unit 8 outputs 8 outputs 8 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs Input/ Output Unit 8 inputs
Fittings & Tubing Air Cylinders Rotary Actuators Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 20 20 20 Positive pin (Common) Positive pin 19 19 19 18 18 Station 9 SOL.b Negative pin Negative pin (Common) 18 17 17 SOL.a Station 16 Station 16 17 16 16 Station 8 SOL.b 16 15 15 SOL.a 15 6 6 SOL.b Station 5 SOL.b Station 5 4 5 4 5 Station 2
Nil H Note) Standard type High speed/High frequency type (Without fixed orifice) Note 2) 6, 10, 16 . Integrated type 20, 25 . Non-integrated type Note) Except for 6 mm bore size. Bore size 6 10 16 20 25 6 mm 10 mm 16 mm 20 mm 25 mm Port thread type Nil M thread Rc NPT G 6 to 16 TN TF 20, 25 The MQM series is not auto switch capable.
3/16" 1/4" 1/8", 5/32" 3/8" 1/2" 5/32" 3/16" 1/4" 5/16" 3/8" Inch size 3/16", 1/4" 1/4" 5/16" ASF Flow rate (l/min (ANR)) 1050 100 130 290 660 1390 420 920 230 460 Controlled flow (Free flow) Effective area (mm 2) 16 1.5 2 4.5 10 21 6.5 14 3.5 7 Note) Flow rate values are measured at 0.5 MPa and 20C.
VS4 16 stations Max. 16 stations.
240 257 274 291 16 16 16 16 20 17.5 15.5 19.5 17 21 19 16.5 20.5 18.5 16 94 94 94 94 111 128 145 162 179 196 213 230 247 264 281 Note) The L dimension of 2 to 5 stations is the same.
bits D8 K1 D4 NEG PLS processing command Decrementing upper 16 bits by 1 D4 K1 Reversing absolute position polarity Reversing polarity of lower 16 bits D3 NEG Lower 16 bits 0 D4 1 D4 K0 D3 D4 K1 (To be continued) 3 3 14 43 14.
Forward speed switch 16 forward speeds are available. SPEED Reverse speed switch 16 reverse speeds are available. !8 Forward acceleration switch 16 forward acceleration steps are available. ACCEL Reverse acceleration switch 16 reverse acceleration steps are available. CN1 Power supply connector Connect the power supply cable. !7 CN2 Motor connector Connect the motor connector.
16 6 40 46 25 9.5 48 57.5 32 16 63 79 40 0 68 68 Step motor, Stroke: 300 mm Step motor Top surface of table and motor are level.