MGC

40.5 44 38.5 40.5 42 40 37 43 ( ): For long stroke 3.20-14

MHF2

0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 79.5 5 M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Mounting thread Finger closing port 26 74 10.6 E 20 20 24 33 E 0 -0.1 1.2 2-4.3 through (mounting hole) 27 29 1.2 29 M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port E-E Open: 321 58 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread depth 4 Attachment mounting thread Mounting thread 20 43

CRB1/Size: 10, 15, 20, 30

Weights (g) Vane style Double vane Single vane Model CRB1BW15-lS CRB1BW20-lS CRB1BW30-lS CRB1BW10-lD CRB1BW15-lD CRB1BW20-lD CRB1BW30-lD CRB1BW10-lS Rotation angle 90 180 270 180 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Body of rotary actuator 26.3 26.0 25.7 49 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange bracket ass'y 9 10 19 25 9 10 19 25 Auto switch

Plug-in/Plug Lead: Single Unit

Flow Characteristics Series Number of solenoids Weight (kg) Model Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Standard 1 W AC Low wattage 0.5 W b Cv b C[dm3/(s.bar)] C[dm3/(s.bar)] Cv 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 Single VQ51 0 12 35 or less 0.59 (0.67) 0.14 38 or less 2.9 38 or less 14 0.18 3.4 Metal seal 2 position 3 position VQ51 1 16 40 or less 0.58 (0.66) 0.33 43

AIR SLIDE TABLE

Model Thread size Tightening torque Nm MXQ6(A) M60.75 5 MXQ8(A,C) MXQ6B M60.75 5 MXQ12(A,C) MXQ8B M81 12.5 MXQ16(A) MXQ12B M101 25 MXQ20(A) MXQ16B M121 43 MXQ25(A) MXQ20B M141.5 69 Be careful not to hit the table with the wrench when adjusting the stroke adjuster.

Mechanically Jointed Rodless Cylinder Series MY2

4 #1@3@9 Section A-A A MY3A MY3B MY3M A $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 55 56 57 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 17 18 19 20 21 23 24 25 26 27 28 Description Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin Note Hard anodized Hard anodized Hard anodized Hard anodized Hard

Compact Slide Series MXH

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Mounting Caution 1. When tightening threads for compact slide, properly tighten within the specified torque. 2. When mounting a workpiece on the top of the table, do not screw a bolt in more deeper than the female thread (Below table l dimension).

Low Profile Air Gripper Series MHF2

thread) M5 x 0.8 Finger closing port 50 72 2 x M5 x 0.8 thread depth 5.5 (Mounting thread) 26 52 10.6 E 20 20 24 33 E 0 0.1 2 x 4.3 through (Mounting hole) 27 25 25 M5 x 0.8 2 x 7.5 1.2 1.2 Finger opening port E-E Close: 0 +0.1 0 Open: 161 4 x M5 x 0.8 thread depth 5.5 (Mounting thread) 36 8 x M4 x 0.7 thread depth 4 (Attachment mounting thread) Auto Switch Mounting Groove Dimensions 20 43

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-55 14 Series LVD Fitting Assembly Procedure Assemble fittings following the procedure shown below.

ZR

Bracket B part no.: P3270154 (Standard accessory) Spacer B part no.: P3270157 Type C2 ZR1-VC2 Type C4 ZR1-VC4 Circuit diagram Circuit diagram PS PE SOL.b SOL.a PE PS Air operated a Pilot air PV PD Release valve Supply valve PV PD V Release valve Supply valve V Manual override Pilot valve Dimensions not indicated are identical to type C1. 13-3-43 43 Series ZR Manifold Specifications/Vacuum

Series PF2W Digital Flow Switch For Water

to 24 VDC -1/2 Analog current output 2 x Port size 40 50 6 Sensor Monitor PF2W3 4 x 4.5 Switch output Black Output for PF2W3 4 8 3 7 U Brown DC(+) + 2 6 Blue DC() 1 5 (44.2) White Analog output 12 to 24 VDC Load -1 Analog voltage output Sensor Monitor PF2W2 A 12 to 24 VDC (mm) Black 1 A B + U Output specifications DC(+) Brown 4 2 Output for monitor unit only DC() Blue 42 62 3 2 x 3.4 43

MU

Refer to p.0-39 to 0-43 for Safety Instructions and common precautions. Mounting Caution q To secure a workpiece to the end of the piston rod, make sure to retract the piston rod entirely.

17

(mm) (mm) F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 12 FW F Applicable cylinder E EA EB EC EY FB FC MY1B25 MY1B32 MY1B40 FH 16 FW 56 10 49 6.5 53.5 6 33 13 10 57 8.5 57.5 6 43 17 20 46 20 12 61 8.5 67 6 43 17 12 74 11.5 73 8 57 22 25 16 56 25 22 74 15 76 9.5 81.5 6 43 17 15 82 12 87 8 57 22 31 16 56 31 22 74 h S T TT W Shock absorber model MY1B25 MY1B32 MY1B40 a 4.5

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

9.0 100 29.5 30 16 165 175 117 140 40 42 12 60 80 42 39 10 22 62 93 10 70 15 85 146 147 1000 (1001 to 1200) MGF 81 (88) 12 (20) 90 (120) 50 (58) 110 (144) 46 (47) 159 (163) 0.032 0.059 50 1200 600 600 600 15 30 76 38 103 9.0 144 3.2 27 13 31 188 9.0 35 19 183 195 127 154 45 50 70 30 12 22 74 12 80 76 18 95 160 1000 (1001 to 1200) 170 (179) 101 (105) 15 (23) 105 (140) 59 (64) 130 (170) 43

Compact Cylinder

43.5 59 5 to 100 10 7 12 43 43.5 67 10 to 100 14 8 17 54 63 83 10 to 100 18 10.5 17 54 63 97 Note 1) The dimensions (A + stroke) and (B + stroke) for 5 mm stroke will be the same as those for 10 mm stroke.

Step Motor Controller

While the test function operates at manual mode, only the output is valid. 43 AC Servo Motor Controller (Pulse InputType) Model Selection Specific Product Precautions AC Servo Motor Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) IncrementalType AbsoluteType Series LECSA Series LECSB Incremental encoder compatible Series LECSA Absolute encoder compatible Series LECSB Control circuit power

New

1/2 3/4 1 35 35 33 37 10 14.2 15.2 17.2 M5 M5 M6 M6 21 28 33.5 42 57 70 71 95 28.5 37.5 38.5 49.5 85 (91.5) 93 (99.5) 104 (110.5) 110 (116) 6.5 Bracket mounting a b e f g h i 56 56 70.5 70.5 Port size P Model j 37 41 46 48 a1Note) d 10.5 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 52 60 68 73 75 75 92 92 30 34.5 39 41 2.3 2.3 2.3 2.3 6.5 6.5 6.5 6.5 10.5 10.5 10.5 10.5 31 35 43

Compact Cylinder

45 37 39 10 10 10 12 36 40 5.5 5.5 M6 x 1.0 M6 x 1.0 43 48 8 10 6 6 22 26 4.5 4.5 M5 x 0.8 M5 x 0.8 7.5 7.5 13 13 10 10 5 5 0.8 0.8 20 25 6 Series C55 Dimensions [First angle projection] 32 to 63 G1/8 (2 positions) Port size OB counterbore RB (4 positions) (The same four-place size) Auto switch H thread effective depth C Z Q F N through (4 positions) (The same four-place size) J E I T D

Compact Cylinder Series CQS

49 63 93 100 113 147 36 29 107 16 397 355 313 271 73 229 56 64 82 128 145 187 47 119 38 136 201 g 20 627 562 498 434 101 114 127 370 88 153 178 306 75 140 63 166 25 794 952 715 636 557 139 155 171 478 107 123 202 234 399 1110 186 91 218 Mass/With Auto Switch (Built-in magnet) (g) Bore size (mm) Cylinder stroke (mm) 250 300 200 175 5 10 15 20 25 30 35 40 50 75 100 150 125 45 12 313 280 37 43

17

less Over 100 st 200 st or less 82.5 92.5 77.5 77.5 Over 200 st 0 0 0 0 50 st or less Over 50 st 100 st or less Over 100 st 200 st or less Over 200 st 30 st or less Over 30 st 100 st or less Over 100 st 200 st or less Over 30 st or less 55 65 76 81.5 Over 30 st 100 st or less Over 100 st 200 st or less 84.5 94.5 100 100.5 Over 200 st 1 3 6 12 200 st 12 16 20 25 12 16 20 25 42 46 53 53.5 43