A

-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Title not found

E 03 05 07 09 't't 5132" 1l4', 5/16' 3t8" 1/2" 6mm 8mm H , T , U , X , N 1 3 06 08 t0 1 2 1 6 32 i10-32 UNF Thread 3 5 I l t N P r H ' L . W , r .

Soft Start-up Valve AV2000/3000/4000/5000

-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5

NCQ8

"), 250 (2-1/2") RCSK-015 RCSK-02 RCSK-03 RCSK-04 RCSK-05 RCDK-015 RCDK-02 RCDK-03 RCDK-04 RCDK-05 Rod Clevis Pin Applicable bore size Including Kit no.

Modular Type Regulators Series AR

Example) AR30-03BG-NR-X425 Symbol Body size Description 25 30 40 50 60 Body size Description Symbol Nil N F Thread type Rc NPT G 20 25 30 40 50 60 Nil N F Thread type Rc NPT G + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 + 01 02 03 04 06 10 Port size 1/8 1/4 3/8 1/2 3/4 1 + Port size Nil B Note 2) Without mounting option With bracket With set nut (for panel fitting) H Mounting a + Note 1) Semi-standard

7

(1/2) (With bracket) M B 2 x P Port size I F L K J (D) e d 1.6 f IN OUT a b 18 f Conduit terminal e d 2 x P Port size E (U2) (V2) 34 32 T 3 A VXD2 C F 25 3 A Note) Only the VXD2 with port size of 04 (1/2) has threads on the bottom of the body.

Electric Actuator

Pushing force (N) Size Stroke (mm) Pushing force (N) Size Stroke (mm) Pushing force (N) Size Stroke (mm) Pushing force (N) 25 32 Up to 400 Up to 500 485 588 25 32 63 25 32 485 588 300 25 32 485 736 485 736 1910 Up to 400 Up to 500 Up to 800 300 Features 16 SMC Electric Actuators Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Slide Table Compact type Series LES High rigidity type Series LESH

ZFC Series

size 5/32" Element Part Numbers 07 1/4" 09 5/16" Part No.

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

size 5/32" Element Part Numbers 07 1/4" 09 5/16" Part No.

IDG

Unit (Refer to page 14-19-32.) AM Misc. Step 4 Confirmation of purged air flow rate Refer to Selection in Specific Product Precautions on page 14-19-7. Read out from the graph on the purged air flow rate (page 14-19-14).

VXA21/22

Manifold Series VVXA31/32 Common (C.O.) Refer to p.4.1-74, 4.1-75 for specifications and models.

Vacuum Unit

ZK2 CH A 2 04 L A KQ2P 06 Applicable stations 02 For 2 stations manifold 04 For 4 stations manifold 06 For 6 stations manifold 08 For 8 stations manifold 10 For 10 stations manifold d Models and Dimensions D Symbol Applicable size d A L D Weight [g] Note 06 6 18 35 8 1 White 08 8 20.5 39 10 2 White 07 1/4" 18 35 8.5 1 Orange 09 5/16" 20.5 39 10 2 Orange Connector type 1 D sub-connector (25

Stations: 05, A, B Port Size: C4 (One-touch Fitting for ø4)

Stations: 12, A, B Port Size: C4 (One-touch Fitting for ø4)

Stations: 05, A, B Port Size: One-touch Fitting for ø4

Stations: 12, A, B Port Size: One-touch Fitting for ø4

One-touch Fittings

KQ2 Series Model Applicable tubing Connection thread Part number 3.2 M3 x 0.5 KQ2H23-M3G1 3.2 M5 x 0.8 KQ2H23-M51 4 M3 x 0.5 KQ2H04-M3G1 4 M5 x 0.8 KQ2H04-M51 4 M6 x 1.0 KQ2H04-M61 6 M5 x 0.8 KQ2H06-M51 6 M6 x 1.0 KQ2H06-M61 6 R1/8 KQ2H06-01S1 1/8 10-32UNF KQ2H01-321 5/32 10-32UNF KQ2H03-321 3/16 10-32UNF KQ2H05-321 5/32 NPT1/16 KQ2H03-33S1 1/8 M5 x 0.8 KQ2H01-M51 3/16 M5 x 0.8 KQ2H05-M51

Digital Flow Switches

Fixed SI unit Note) Nil N F Rc NPT G 3m lead wire with connector Without lead wire Nil N Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Port size Output specification Applicable models Flow rate (l/min) Port size Applicable models Output specification Symbol Symbol 100 200 500 50 10 PF2A710/PF2A750 PF2A711/PF2A721, PF2A751 27 NPN open collector 2 outputs 01 02 03 04

AW

(This is not applicable to VHS40) Body Size Symbol Port Size Body Size 20 30 40 02 03 04 1/4 3/8 1/2 Effective area (mm2) 5 5 Model VHS20 VHS30 Note: Other sizes, thread forms, options, etc. may be possible, please contact SMC for availability.