VEX1

VEX350 2 x C (Mounting hole) Silencer (P2) 2 x M6 x 1 x 9 AN210-02 (Option: N) (Except VEX3 00) Bracket mounting thread h (Grommet terminal) i (Conduit terminal) j (DIN terminal) 5 7 g (Grommet) A (Air operated) Port size Port 3 (R) Port 1 (P), 2 (A) 2 x port size Dimensions Port size A Model B C D E F G H J K L M N O 1 (P), 2 (A) 3 (R) VEX350 , , 1 1 2 3 4 123 96 107 112 26 30 70 90 50 60

IZx-OMT0049

) Note 40) Note 40) Note 40) ION BALANCE OFF ON Display Ions are generated (green) Note 40) OFF ION/HV ON 1Hz 1Hz 1Hz 1Hz 1Hz Incorrect high voltage (red) Note 45) Note 44) Note 42) Note 43) Note 44) Note 44) OFF ON Product type IZTP41(green) IZTP42(blue) DAC/AC OFF ON Maintenance (green) NDL Note 47) Note 47) Note 47) Note 47) OFF ON Built-in sensor (green) SNSR Note 48) Note 48) Note 48

Electric Actuator / Guide rod Slider

50 CCW CW Stroke[mm] Origin 50mm 10 20 30 40 50 60 CCW CW Stroke[mm] Origin 50mm -50 -40 -30 -20 -10 0 CCW CW Stroke[mm] Origin 50mm -40 -30 -20 -10 0 10 CCW CW Stroke[mm] Origin 50mm -60 -50 -40 -30 -20 -10 CCW CW Stroke[mm] -25- 4.

Silencer Series AN

(1 8 NPT) NAN101-N01 (1 8 NPT) Model NAN101-01 NAN110-01 NAN120-M3 NAN120-M5 Port Size 18* 18* M3 M5 Noise Reduction (dB) 16 21 13 18 Max Operating Pressure 1MPa / 145PSI Ambient & Fluid Temperature 5~150C / 40~300F Effective Orifice mm2 (Cv) 20 (1.1) 35 (1.9) 1 (0.05) 5 (0.27) Weight (gf) 9.5 20 1 3.3 H O W T O O R D E R SERIES AN SILENCER *Tapered thread ISO7/1 AN120-M3 (M3) AN120-M5 (

Single Axis Electric Actuator Serriies LJ1S Slider Guide

(T-slot pitch) 36 45 3-5H10 depth 5 9.4 4.5 10 18 Stroke + 145 80 40 30 T-slot dimensions The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

CRQ2

40 Contents Description P473010-1 P473020-1 P473030-1 P473040-1 P473050-1 19, 20, 21, 23 Seal kit 4 Compact Rotary Actuator Rack-and-Pinion Type Series CRQ2 With auto switch With auto switch Sizes 10, 15 Sizes 20, 30, 40 With cushion Sizes 20, 30, 40 With auto switch and cushion Sizes 20, 30, 40 5 Series CRQ2 Dimensions 3H9 effective depth 2 Sizes 10, 15 TA 0.6 30 BU 2-M5 x 0.8 through (

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2 Piping can be installed from one end Body can be used as a flange Compact design saves mounting space Uses internal cushioning 10, 15 : Rubber bumper 20, 30, 40: Air cushion 10: 17mm 15: 20mm 20: 29mm 30: 33mm 40: 37mm 2 auto

Plate Cylinder with Lock Series MLU

Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 Size 25 32 40 50 Part no.

Air Cylinder

7 19 14 M22 x 1.5 26 1/4 83 159 100 Up to 500 40 37 110 41 87 26 50 10 14 66 16 M10 x 1.25 12 23 14 M26 x 1.5 28 3/8 88 168 Rod end nut (Standard) 30 d D C H B [mm] Part no.

Soft Start-up Valve

04 1/2 1(P), 2(A) 06 3/4 10 1 a Mounting NIL Without mounting option B With bracket Option b Pressure gauge NIL Without pressure gauge G Round type pressure gauge (with limit indicator) c Silencer NIL Without silencer S Silencer (Built-in) h Flow direction NIL Flow direction: Left to right Semi-standard R Flow direction: Right to left i Pressure unit NIL Name plate and pressure gauge in

REGULATOR

AR-OMT0015 PRODUCT NAME REGULATOR MODEL/ Series AR20K-(F,N)01 (F,N)02(B,E,G,H,M)(-1,N,R,Y,Z)-B AR25K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR30K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)02 (F,N)04(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)06(B,E,G,H,M)(-1,N,R,Y,Z)-B AR50K-(F,N)06 (F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B AR60K-(F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B Contents PAGE 1.

FILTER REGULATOR

H J H J P1 P2 F J M28X1 30 27 63.5 AW20K-B 40 87.6 72.4 26 40 26 5 28 37.5 62.5 37.5 1/81/4 1/8 M38X1.5 M42X1.5 M42X1.5 75.7 67.9 AW30K-B 53 115.1 85.6 29.4 55 29.4 3.5 28 37.5 66.9 37.5 1/43/8 1/8 38.4 AW40K-B 70 147.1 91.7 37.3 80 37.3 1.5 28 42.5 75.7 42.5 1/43/81/2 1/8 1/8 44.3 38.4 80.8 75.7 AW40K-06-B 75 149.1 93.2 37.3 80 37.3 1.2 28 42.5 75.7 42.5 3/4 AW60K-B 95 234.1 175.5 47.5 30

Series H, DL, L, LL Self-align Fittings

Solid piece moves fittings up from workpiece. 103 Series H, DL, L, LL Self-align Fittings Male connector: H Applicable tube O.D. (mm) M Effective orifice (mm2) Thread R(PT) Part No. H1 (Hex.) H2 (Hex.)

Cylinder with Turntable Series MGT

MGQ 1 2 3 4 5 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 Eccentric distance l (mm) Eccentric distance l (mm) MGG MGC MGTL100 300 300 MGTM100 200 200 P = 0.5 MPa MGF 100 P = 0.5 MPa Larger than 75st Larger than 50st Load mass m (kg) Load mass m (kg) MGZ 40 50 100 25st 50st 30 25, 50st MGT 20 50 40 10 30 5 4 3 20 2 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 30 40 50 100

AC Servo Motor Driver (MECHATROLINK-II type)

Refer to LECYM Operation Manual, Section 4 and Section 5 and Section 10 for details. 6.1 The recommended value of the parameter [LEF] LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para.

HRX-OM-X010

Circulating Fluid: Fluorinated Fluid Operating Temperature: 20 deg C At maximum frequency operation by inverter HRZ008-L-F [ 6 0 H z ] 1.2 [ 6 0 H z ] 1.1 1.0 [Supply Port] [ 5 0 H z ] 0.9 Pressure [MPa] 0.8 [ 5 0 H z ] 0.7 0.6 0.5 0.4 0.3 [Return Port] 0.2 0.1 0.0 0 5 10 15 20 25 30 35 40 Flow Rate [L/min] Fig. 8-14 Pump Performance Curve ( HRZ008-L-F ) When circulating fluid flow rate lowers

LV50-OMQ0002

Hysteresis H 1 Hysteresis mode LLL Instantaneous flow Normal output Hysteresis H 1 Hysteresis H 1 Window comparator mode LLL Instantaneous flow Hysteresis H_1 Hysteresis mode LLL Instantaneous flow Reversed output Hysteresis H 1 Hysteresis H 1 Window comparator mode LLL Instantaneous flow -49No.LV50***-OMQ0002-G [F33] Close proximity setting Use this setting when multiple products are installed

SFOD-OMT0005CN

Word0:IN05(bit05) )No.1 bit0:IN0=ON 15:IN15=OFF (3)Word1,bit415: No. bit ON bit OFF ) [] Word1, bit6=ON Word1,bit45715=OFF (4)Word2,bit89 Word317 )[]50.00[mm] 5000[0.01mm]=(01388)h Word4:(L)= (1388)h Word5:(H)= (0)h (5)bit Word2,bit0:=ON ON (6)Word0:BUSY=ON (7)Word0:INP=ON (INP ON INP(P.34)) Word0:BUSY=OFF Word0:INP=ON Word0:BUSY=OFF 24V 0V (2) ON OFF IN05 SVON (DRIVE ) OFF DRIVE

LEC-OM032xx

ID 14 Pushing force 1 0 to 30 10% 15 Trigger LV 1 0 to 30 10% 16 Pushing Numerical data speed 1 0 to 255 mm/s ID1 input 17 Positioning Data writing thrust 1 0 to 30 10% 18 H 19 L In pos 2 0 to 65500 0.01mm ID2 20 to 39 Same as ID1 ID3 40 to 59 Same as ID1 ID4 60 to 79 Same as ID1 ID5 80 to 99 Same as ID1 ID6 100 to 119 Same as ID1 ID7 120 to 139 Same as ID1 ID8 140 to 159 Same as ID1 ID9

2 Phase Stepper Motor/Without Motor Brake Series LXS

(A contact) Operating temperature range Work load Speed 5 to 40 (with no condensation) 10 (4) horizontal/5 (4) vertical Note 1) N.C.