capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) ( C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ008-L2Water-cooled

capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) ( C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ008-L2Water-cooled

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Dedicated Controller Series LC1 Uniaxial Type

Interactive input display Programming with the same language as PC software ACTUATOR & CONSTRUCTION SYSTEM L c /BS HOLD STOP CONTROLLER POWER ALARM L R UP ENT DOWN /ESC MODE Able to execute operations such as programming, test runs and parameter changes, which up until now have been performed from a PC.

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l

capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ008-HWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHFluorinertTM FC-40/GALDEN?

rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ008-L2Water-cooled refrigerationR134a (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHClear water, Deionized water10 to 408.0 (at 20C)1.25 (at 20C)?

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted parts

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted

Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temperature stability Note 4) (C)Pump capacity Note 5) (50/60 Hz) (MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l)Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature rangePressure rangeRequired flow Note 9) (50/60 Hz) (l/min)Power supplyBreaker capacityRated currentAlarmCommunicationsHRZ008

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Note 5)(MPa)Rated flow Note 6) (l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted parts materialTemperature

/humidity Note 1)Circulating fluid systemCooling water systemElectrical systemMass Note 10) (kg)Safety standardsCirculating fluid Note 2)Temp. range setting Note 1) (C)Cooling capacity Note 3) (kW)Heating capacity Note 3) (kW)Temp. stability Note 4) (C)Pump capacity Note 5) (50/60 Hz)(MPa)Rated flow Note 6) ( l/min)Main tank capacity Note 7) ( l )Sub-tank capacity Note 8) ( l )Port sizeWetted

capacity Note 8) ( l )Port sizeWetted parts materialTemperature range (C)Pressure range (MPa)Required flow Note 9) (50/60 Hz) (l /min)Power supplyBreaker capacity (A)Rated current (A)AlarmCommunicationsHRZ004-HWater-cooled refrigerationR404A (HFC)PID controlTemperature: 10 to 35C, Humidity: 30 to 70%RHFluorinertTM FC-40/GALDEN?