VQC

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VQC2000 800 700 600 500 400 300 200 100 0 VQC4000 Values at extension of a directly coupled cylinder when meter-out speed controllers are used with the needle full open.

Plug-in/Plug Lead: Single Unit

P SMC 6-Rc 3/4 1(P), 5(R1), 3(R2) port 133 106 46.8 9 9 59.2 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port Manual override B 2 A 4 6 Indicator light B 2 A 4 A B SMC SMC SMC SMC SMC 5 A B B B B B B 2 A 4 A B 4 A L2 P = 41 58.5 L1 B 2 A 4 A B 3 A B 2 A 4 A B 2 A P = 41 68.5 46 34.5 B 2 A 4 A 1 A X 12 Stations D side R4.5 15.5 17 22 51 69 117 Cable length (600

Low Differential Pressure Sensor

(not including sensor accuracy), Response speed: 150 ms or less Resistance Weight Analog output 0.6% F.S. or less 1.0% F.S. or less 1.5% F.S. or less Accuracy (to display value) (25C) Output current: 4 to 20 mA (within rated pressure range) Current output Note 2) Maximum load impedance: 300 (at 12 VDC), 600 (at 24 VDC), Minimum load impedance: 50 Linearity: 0.2% F.S.

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ZSE40(F)/ISE40W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET 6.5 R 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 4 6 * For splash proof use (IP65), insert an air tube into the atmospheric release port. (Refer to Specific Product Precautions 4 on the back cover for details.)

ARJ1020F

Inch size ARJ310F-N01 5/32" 1/4" 03 07 14-4-11 9 Series ARJ310 Flow Characteristics Inlet pressure: 0.7 MPa ARJ310-01 ARJ310F-01-04 ARJ310F-01-06 0.7 0.7 0.7 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0.0 0.0 0.0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Flow

PSE550/300

(Not including sensor accuracy), Response speed: 150 ms or less Resistance Weight Analog output 0.6% F .S. or less 1.0% F .S. or less 1.5% F .S. or less Accuracy (To display value) (25C) IS Output current: 4 to 20 mA (Within rated pressure range) Current output Note 2) Maximum load impedance: 300 (at 12 VDC), 600 (at 24 VDC), Minimum load impedance: 50 ZSM Linearity: 0.2% F .S.

ZSE40/ISE40

(Refer to Precautions on page 16-2-24 for details.) 1.5 01: R 1/8 T1: NPT 1/8 Data ZSE40(F)/ISE40-W1 2-M4 x 0.7 thread depth 4 20 30 Rc 1/8 MPa 7 19 20 30 OUT2 OUT1 SET 6.5 R 6.4 18.35 Atmospheric release port Lead wire length 600 (3000) 3.5 12.4 7.8 7 2.5 2.6 30 15.2 42 10.7 4 6 For splash proof use (IP65), insert an air tube into the atmospheric release port.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VQZ3000 0.9 1.2 Bore size (mm) Cv Cylinder speed (mm/s) Series CJ2 Series CM2 Series CA1 Base mounted (With sub-plate) 6 10 16 20 25 32 40 40 50 63 80 100 150 300 V V VQZ1000 Body width 10 450 0.35 V V V 600 750 150 300 VQZ2000 Body width 15 0.7 450 V V V V V 600 750 150 300 VQZ3000 Body width 18 1.2 450 V V V V V 600 750 Cylinder speed marked with V can be controlled by speed controller.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

ZX

Table (2) Valve Unit/Valve Plug Connector Assembly Table (3) Vacuum Switch/Plug Connector Assembly How to order If ordering vacuum module with 600 m or the longer lead wire, specify both vacuum module and connector assembly part numbers.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(Including insulating material) 2.35 mm 2.35 mm Rated current 10 A 8 A Rated voltage 600 V 600 V Contact resistance 5 mW or less Insulation resistance 100 MW or more Withstand voltage 1.4 kV Rating/Performance Ambient temperature Connector 25 to 80C Cable 30 to +105C 10 to +105C Min. bending radius (Fixed) 94 mm 110 mm Protection class IP67 (Only with screw tightened) Allowable repeated insertion

3 Port Solenoid Valve/

10% Power consumption 0.45 W Surge voltage suppressor Varistor Indicator LED Manufacturer OMRON Rockwell Automation Electrical wiring G1/2, M12 connector M12 connector Contact resistance 25 m or less 50 m or less Min. applicable load 5 VDC, 1 mA (Load resistance) 5 VDC, 5 mA (Load resistance) Max. voltage 24 VDC Max. load current 50 mA Max. load inductance 0.5 H Insulation voltage 300 V 600

Thermo-chiller

Operating time 20 s 30 s Voltage 10 s 5 s Min. 2 s dV dt 1 s = Voltage increase ratio 0.5 s dV 0.2 s 0.1 s Time 0.05 s 0.02 s dt 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 1500 < For option B [With earth leakage breaker]> 3. This product is installed with a breaker with the following operating characteristics.

Booster Regulator/Air Tank

VBA2lA: Qb = 600 [L/min (ANR)] VBA4lA: Qb = 1050 [L/min (ANR)] Refer to Flow-rate Characteristics on pages 3 and 4. Avoid pulsation. (Max. 0.05 MPa) NO: Need no tank The VBA4lA can supply necessary pressure. NO Judgement of flow rate YES YES The VBA2lA cannot obtain necessary pressure. Select the tank from table below.

2-Color Display

Min. load impedance: 50 Analog current output Max. load impedance: Power supply voltage 12 V: 300 Power supply voltage 24 V: 600 Min. load impedance: 50 The FUNC terminal is connected using a dedicated lead wire (ZS-38-5L or ZS-38-U) when the copy function is used.

Magnetically Coupled Rodless Cylinder/ Basic Type CY3B Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

, 700, 800 25 3000 32 3000 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke type (XB11) applies to the strokes exceeding 2000 mm.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 *Please consult with SMC for non-standard strokes as they are produced as special orders.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

Applicable Stroke Table : Standard Model Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] LEFS16 50 to 500 LEFS25 50 to 600 LEFS32 50 to 800 LEFS40 150 to 1000 * Please consult with SMC for non-standard strokes as they are produced as special orders. The actuator and controller/driver are sold as a package.

Peltier-Type Chiller Thermo-con (Air-cooled) Series HEC-A

W Note 2) 230 W Note 1) Cooling capacity 900 W Note 2) 600 W Note 1) Heating capacity Temperature stability Note 3) 0.018 to 0.054F (0.01 to 0.03C) Pump capacity Refer to performance chart.

Guide Cylinder/Compact Type ø 20, ø 25, ø 32, ø 40, ø 50 Series MGC

bearing) 40 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 Intermediate strokes and short strokes other than the above are produced upon receipt of order.