Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Piston Speed Standard Stroke Bore size (mm) 16 25 40 63 20 32 50 Bore size (mm) Max. manufacturable stroke (mm) Standard stroke (mm) 80 to 500 mm/s Without stroke adjustment unit (MY3A) 80 to 1000 mm/s Without stroke adjustment unit (MY3B) 16, 20, 25 32, 40, 50 63 100, 200, 300, 400, 500, 600 700, 800, 900, 1000, 1200 1400, 1600, 1800, 2000 3000 80 to 1000 mm/s (16, 20 L unit: 80 to 800 mm

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

Note 2) 4-position dual 3 port valves are available for 53-SY5000 only. 600 mm Maximum length for L-type 1000 mm Terminal type 1500 mm Nut 2000 mm TT Note) Warning 3000 mm 10 mm Semi-standard The solenoid must be connected to a safety barrier located in a non-hazardous area. The safety barrier must meet the specifications listed in the Installation Instructions section.

AQ

pressure Ambient and fluid temperature How to Order JIS Symbol AQ 0 0 02 2 0 Standard size Option 1 8 1 2 3 5 High temperature (5 to 80C) Low temperature (30 to 60C) H L 1 4 8 3 Note) AQ1500 and AQ1510 are not available. 3 4 Type Port size Type Applicable model Diaphragm Lip AQ2 to AQ5 AQ1 Only Symbol Port size Applicable series 0 5 M5 01 02 03 04 06 M5 x 0.8 AQ1500 AQ1510/2000 AQ2000/3000

Speed Controller: Standard Type In-line Type AS Series

Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A

AV2000/3000/4000/5000

Soft Start-up Valve AV2000/3000/4000/5000 How to Order AV 00 1 G 20 02 Flow direction Nil R Left to right Right to left Soft start-up valve Manual override Nil: Non-locking push type (Flush) B: Locking type (Tool required) C: Locking type (Lever) Body size 20 30 40 50 1/4 3/8 1/2 3/4,1 Thread type Rc G NPT Nil F N Light/Surge voltage suppressor None Nil S Z With surge voltage suppressor (

Soft start up valve with lock out

Dimension AVL2000 to AVL5000 Soft start up valve with lock out AVL2000/3000/4000/5000 (mm) Port size A B Model C D E F G H Lockable soft start valve. Gradual increase of supply pressure and rapid exhaust of system air when the supply is shut off.

Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series * 1

*1 Soft Start-up Valve AV2000-A/3000-A/4000-A/5000-A Series 2(A) Symbol How to Order (P)1 3(R) *1 CE compliant AV 00 20 02 B B 1 D q w e r t y u i o A Electrical entry Grommet DIN terminal AC V DC V V V q Body size 20 30 40 50 Symbol Description w Thread type Nil Rc V V V V N NPT V V V V F G V V V V + 02 1/4 V 03 3/8 V 04 1/2 V 06 3/4 V 10 1 V + e Port size 1(P), 2(A) a Mounting Nil

EX180

Integrated Type/For Output Series EX180 SJ2000/3000 How to Order SI Unit DN1 EX180 S Communication protocol Communication connector configuration DN1 DN2 MJ1 DeviceNet (32 outputs) T branching type Nil A DeviceNet (16 outputs) Straight type CC-Link (32 outputs) Note) Communication and power supply connectors are included.

EX120/121/122

Integrated Type/For Output Series EX120/121/122 Series EX120 Series EX121 Series EX122 SV1000/2000/3000/4000 SY3000/5000 SY3000/5000 D D D D D D VQ1000/2000 How to Order SI Unit DN1 EX12 S 0 Dustproof Valve interface 0 1 2 Plug-in Non-dustproof Nil -XP Flat ribbon cable DIN rail mounting Dustproof Plug-in DIN rail mounting Note) XP is not available for DN1 and DN1-X26.

Note) ® Series EX260 SI Unit Integrated-type/For Output

(Only for units compatible with M12 PROFIBUS DP , CC-Link communication connectors) SY3000/5000 VQC1000/2000/4000 S0700 SV1000/2000/3000 D D D D Note) The SY3000/5000, VQC1000/2000/4000, and S0700 are not yet UL-compatible.

EX500

" # $ % $& ' ($ % $& ) Input unit GW unit SI unit VQC1000 2000 4000 SI unit Input unit SV1000/2000/3000/4000 How to Order GW Unit GW Unit DN1 EX500 G Communication protocol DN1 PR1A MJ1 EN1 DeviceNet PROFIBUS DP CC-Link EtherNet/IP 1680

HAA

Outlet Air Temperature 50C 70C 100C Inlet air temperature (C) Correction factor Air flow (l/min (ANR)) Model 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 35 40 44 35.5 40 42 37 40 41.5 38 40 42 34.5 38 40 33 36.5 38 34 36 37 34 35 36 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 HAA7 Air inlet Air outlet Air cooled style after cooler HAA15 HAA22 Auto-drain HAA37 Min.

Thermo-chiller

Model HRS200-Am-46-mS Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.65 Control method PID control Ambient temperature/Altitude1, 7 C Temperature: 5 to 45, Altitude: less than 3000 m Circulating uid1, 2 Tap water, 15% Ethylene glycol aqueous solution, Deionized water Set temperature range1 C 5 to 35 Cooling capacity3, 7 kW 20.5 Heating capacity4 kW

Thermo-chiller Basic Type HRSE Series

Model HRSE012-A-10-(T) HRSE018-A-10-(T) Cooling method Air-cooled refrigeration Refrigerant R407C (HFC) Refrigerant charge kg 0.3 0.32 Control method Compressor ON/OFF Ambient temperature/Humidity/Altitude Note 1), 11) Temperature: 5 to 35C, Humidity: 30 to 70%, Altitude: less than 3000 m Circulating uid Note 2) Tap water, 15% ethylene glycol aqueous solution Set temperature range Note 1)

Thermo-chiller Air-cooled 200 V Type Inverter Type HRSH Series (UL Standards)

Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Specications Model HRSH100-Al-20-l HRSH150-Al-20-l HRSH200-Al-20-l HRSH250-Al-20-l HRSH300-Al-20-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.27 2.1 2.1 2.8 2.8 Control method PID control Ambient temperature/Altitude Note 1), 9) C Temperature: 20 to 45, Altitude: less than 3000

Thermo-chiller

Model HRS018-A-20--R HRS030-A-20--R Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge [kg] 0.39 Control method PID control Ambient temperature/Humidity/Altitude1 [C] Temperature: 5 to 45C, Humidity: 30 to 70%, Altitude: less than 3000 m Circulating fluid2 Tap water, 15% ethylene glycol aqueous solution4 Set temperature range1 [C] 5 to 40 Cooling capacity3

LMU100/200 Series Mist Spray Unit

ALF ALT Model LMU100 LMU200 Inlet air pressure Oil tank set pressure range Oil Dynamic viscosity of oil (40C) 0.1 to 1.0 MPa 0.05 to 0.2 MPa Turbine oil, Non-water soluble cutting oil (JIS, N1 type) 2 to 200 mm2/s Total capacity: 3000 Effective capacity: 2500 5 to 50C 100 VAC 50/60Hz, 200 VAC 50/60Hz, 24 VDC ALD ALB Oil tank capacity (cm3) Ambient and fluid temperature Solenoid valve voltage

IR1000/2000/3000

IR1000/2000/3000 Series How to Order IR 2 0 0 02 0 Precision regulator Thread type Body size Nil N Note 2) Rc NPT Suffix 1 1 2 3 IR1000 series IR2000 series IR3000 series Nil G F For high temp. environments (5 to 100C) For low temp. environments (30 to 60C) T Note 4) Semi-standard Type of setting L Note 5), 6) 0 1 Note 1) Basic type (Knob) Air operated type Suffix 2 Set pressure range

IR1000-A/2000-A/3000-A

Precision Regulator IR1000-A/2000-A/3000-A Series How to Order 0 0 0 IR 1 01 BG r t y u e w q A ARJ Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

MQR

size Male R1/8 Female M5 x 0.8 M5 x 0.8 Flow rate C[dm3/(s.bar)] b Cv characteristics 0.50 0.40 0.17 Lubrication Not required Min. operating pressure -100kPa Max. operating pressure 1.0MPa Ambient temperature and operating fluid temperature Note 1) -10 to 80C Allowable torque Note 2) 0.003 Nm or less 0.03 Nm or less 0.05 Nm or less 0.10 Nm or less 0.20 Nm or less Allowable rotation speed 3000