High Purity Chemical Valve

S) PB PA PB SMC B PA A A B SMC SMC Dimensions (Max. T) (mm) S Model LVC2m LVC3m LVC4m LVC5m LVC6m Dimensions 12.5 (mm) T 24 Model LVC3m LVC4m LVC5m 29 49.5 34.5 54.5 36 60.5 With indicator With flow rate adjustment & bypass (Max. S) PB W PA A B SMC A B Dimensions (Max.

Information

protective earth (PE) terminal to the control panel,s protective earth (PE).

AMX-OM-F005-C

D . ) , 2. 8 m or l ess ( overal l l engt h) Instal l i t i n w here pressure i s hi gher and tem perature i s l ow er. 2W ARN I N G Fol l ow i ng envi ronm ent s l ead t o cause breakage.

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

C95Series

l S.

•

:; HS 71 .5 77 84 1.5 0 1.5 A 24.5 23 24.5 B DA4 type o 82.5 95 ~ H s 88 c==._~M~a~jo~r~D~im~e~n~s~io~n~s~_ ___ (mm) Clamp Cylinder: Series CK1 SpCpd controller Cushion valve N s-t-Strok.e ___ _ -, ...!t ,r' M -1 6X 1. 5 \ ~~-.~. . I~r ~ 1~ -~ -~t l -,? ~ . ~ I 'S " .. ! /'Vvf..>---'---r-'-~ /i . -l ,~ -0 I .. .i ~ l d1h across flatsl]" 4M6 Screw depth 1 3 ~J:"!

SMC Pneumatic Clean Series

WH E-0.05 E-0.05 I 0 0 KA AL G port 8-J F K C-0.1 A NA F H S + Stroke ZZ + Stroke (mm) A AL Bore size Standard stroke range B1 C D E F GA GB H H1 I J K KA MM NA P RA S WA WB WH 20 20 20 W ZZ 40 30 27 Up to 300 50 35 32 Up to 300 63 35 32 Up to 300 19 27 27 6 7 7 44 55 69 139 162 162 26 32 38 14 18 18 1/8 1/4 1/4 16 20 20 8 9 9 25 30 32 87 102 102 2 2 2 25 30 30 22<19> 26<24> 26<24> 15 17

CL

MNB CNA Maximum piston speed: 500 mm/s It can be used at 50 to 500 mm/s provided that it is within the allowable kinetic energy range. (The lock-up cylinder can operate at 50 to 200 mm/s.)

MU

M CQS J79W S B 25 10 S M MDU With auto switch CQM CQ2 Built-in magnet Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Mounting style RQ Nil S n 2 pcs. 1 pc. n pcs.

IP8101 Series

Fork lever-type fitting M P368010-24 Fork lever-type fitting S P368010-25 Example of side mounting using fork lever-type fitting M Example of back mounting using fork lever-type fitting S. Fig. 8 For side mounting, the mounting dimensions of fork lever-type fitting M can be adjusted to be interchangeable with IP610.

LEC-OM005xx

Speed 000 Absolute Is selected 000 100mm/s 001 Relative 001 200mm/s ESC keySET key ESC keySET key AX IS. Step 1 Step 1 No. Move mode No.

Soft Start-up Valve

AV*-OMZ0091-A PRODUCT NAME Soft Start-up Valve MODEL / Series / Product Number AV2000-(F,N)02(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV3000-(F,N)03(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV4000-(F,N)04(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV5000-(F,N)06~10(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AVA2000-(F,N)02(B,G,S)(-R,Z)-A AVA3000-(F,N)03(B,G,S)(-R,Z)-A AVA4000-(F,N)04(B,G,S)(-R,Z

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Piston speed V (mm/s) 9-14-3 Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C 25, 32, 40 How to Order Hy-rodless cylinder (With brake) ML1C G 25 300 M5BW Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Piston speed V (mm/s) 9-14-3 4 Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C 25, 32, 40 How to Order Hy-rodless cylinder (With brake) ML1C G 25 300 M5BW Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

21

switch Series Bore size (mm) Action Rod Basic, Foot, Double acting Trunnion CM3 20, 25, 32, 40 25 to 300 Single rod D-M9l(W), D-A90 Flange, Clevis, Features 1 Air Cylinder Short Type Standard: Double Acting, Single Rod Series CM3 20, 25, 32, 40 RoHS How to Order CM3 L 40 150 M9BW With auto switch CDM3 L 150 40 With auto switch (Built-in magnet) Number of auto switches Rod end thread Nil S

Booster Regulator Series VBA1110 to 4200 1

Then, the charging time (T) for a 100 l tank, T = t x = 49 x = 49 (s). V 10 10 10 T = t x = 110 x = 110 (s). V 10 10 10 T = t x = 2.4 x = 24 (s).

Prevents Micro-Bubbles

S) PB PA PB SMC B PA A A B SMC SMC (mm) Dimensions (Max.

5 Port Solenoid Valve Series VQZ1000/2000/3000

C M S C C S M C S M NI NI IN IN OUT OUT B B 2 To CYL port To CYL port 4 P.960 P.961 P.962 P.974 Connector assembly SY3000-37-80AHousing (1 set: 8 pcs.)

0.55

M Grommet or L/M-type 2 V 1 1 5 G Z Light/surge voltage suppressor DC AC Nil S Z R U Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor With surge voltage suppressor (Non-polar) Note) V211 Pilot valve assembly With light/surge voltage suppressor (Non-polar) Note) There is no S option for AC mode, since a rectifier prevents surge voltage

AC Servo Motor Driver (SSCNET Type)

Rotations per Second Distance of movement per second Distance of movement per rotation Rotation Speed (rpm) = Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) -36- 6.6.3 Acceleration/deceleration Time Configuration < Acceleration/deceleration Time Configuration> Acceleration/deceleration time (ms) configuration: The acceleration/deceleration time sets the amount