Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: SI Unit Only, Fixed Unit: kPa, MPa, Piping Specification: Female Thread, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: D [Panel Mount Adapter + Front Protection Cover, (ZS-46-D)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: A1 [Bracket A, Vertical Mounting (ZS-46-A1)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: D [Panel Mount Adapter + Front Protection Cover, (ZS-46-D)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: -, Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: B [Panel Mount Adapter, (ZS-46-B)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: D [Panel Mount Adapter + Front Protection Cover, (ZS-46-D)], Operation Manual: w/o Operation Manual, w/o Calibration Certificate

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: w/o Operation Manual, Calibration Certificate

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover, Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: w/o Operation Manual, Calibration Certificate

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: B [Panel Mount Adapter, (ZS-46-B)], Operation Manual: -

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: A2 [Bracket B, Horizontal Mounting (ZS-46-A2)], Operation Manual: -

SV

0 V 0 V 24 V G D G D SI unit SI unit Master unit D 0 V24 V G D 0 V24 V G D 0V 24V G D 0V 24V L2 L1 G LINE1 LINE2 SHIELD L1 L2 Power supply 24 V 0 V 0 V 24 V SHIELD SHIELD Transmission line L1 L2 FG 24 V 0 V L1 L2 FG 24 V 0 V Black White Brown Blue Terminal resistor Main transmission line Transmission line Crimped connector SL-J1A Power supply 24 V 0 V 0 V 24 V Type 3 ground Type 3 ground

Vacuum Unit

V V p. 13 Pressure switch for vacuum V Manifold Manifold p. 14 V V V With valve V V Single unit p. 15 V V Pressure sensor Vacuum Pump System V V V V With valve V V For Manifold p. 16 V V Pressure sensor V Manifold Manifold p. 17 7 C O N T E N T S Vacuum Unit ZK2mA Series VEjector System Single Unit Ejector + With Valve + Without Energy Saving Function p. 9 Single Unit Ejector

LEC-OM071xx

The SigmaWin+ main window will appear. 2-13 2 P a n e l D i s p l a y a n d SigmaWin+TM Enter the necessary settings for communication setup. (1) Click Search. (2) Click V. Then Click Search.

LEC-OM069xx

The SigmaWin+ main window will appear. 2-13 2 P a n e l D i s p l a y a n d SigmaWin+TM Enter the necessary settings for communication setup. (1) Click Search. (2) Click V. Then Click Search.

&snac

i n o f e a c n s e p a r a t 0 t i n s t a l l e d i n l D G 3 * M ( V ) , i DGSxl.l(v ) at teast 0nce a rn0nth ' f o l t o v i n g t h e c l e a n i n g P r o c e d u r e b e l o w , t 0 G 5 l ( M ( v ) , s h o u l d b e d o n e a f t e f o p e r a t i o n o f a o P r o x i m a t e 2 Y e a r s ' R e f e r t o t h e r e P t a c e i n s P r o c e d u f e b e l o v / . l f P r e s s u r e

2/3 Port Valve

M G H J K A H G, J S Q E P K K A H B J V M V M E, X N, P Polyacetal B Stainless steel L Stainless steel, Silver Trichloro ethane Trichloroethylene Polyacetal M (Non-leak) N P Q S T Perchloroethylene Brake oil Helium Non-leak(105atm cc/sec) Water Stainless steel H Brass, Copper (High temperature) B Polyacetal X V (Non-leak) Note 1) The leakage amount(105atm cc/sec) of "V", "M" option is

Step Motor Controller

P C Regeneration option U C V Servo motor power (U) Servo motor power (V) Servo motor power (W) U V W W Connect to motor cable (U, V, W) Control Circuit Power Supply Connector: CNP2 Accessory 24V Terminal name Function Details 0V 24 V side of the control circuit power supply (24 VDC) which supplies the driver.