Cooling Capacity: 050 [5500/5900 W (50/60 Hz)], Pipe Thread: F [G (w/Rc-G Conversion Fitting Set)], DI Water Piping: None, High Pressure Pump: Inverter Pump Mounted, Feet: -, Flow Sensor: -

High Pressure Coolant Valve

1 r t !1 !0 Port 1 Port 2 Port 1 Port 2 Valve element A t q q o o w Valve element B y w Port 3 3 Port valve 2 Port valve Working Principle When the pilot operated solenoid valve !2 is not energized, the valve element A t connected to the piston u is closed by the return spring i. Then valve element B y connected to the valve element A t is open. When the pilot operated solenoid valve !

1

DIN terminal: D Applicable cable O.D.: 6 to 12 G F G F Width across flats 22 G1/2 32 H (44) H 31.5 25 C C J G1/2 J Dimensions [mm] Model A B C D E F M P Q Grommet: G Grommet: GS Conduit: C Flat terminal: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-1P(N) 30 30 66 30 11 20 8 1/8 19 27 56.5 30 43 47.5 50.5 23 56.5 64.5 48.5 52.5 99.5 50.5 68.5 XSA2-2P(N) 36 36 79 35 14 22

CEx-OMG0106

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 60

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ZS-20-5A-50 . 1 pc.

Series HAW Water Cooled Aftercooler 1

HAW75-20 HAW110-30 B C D E F G H J K L M N P Q R S T U V W Y Z 473 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139 195 60 60 60 66 66 66 70 120 140 140 140 120 140 140 140 220 60 60 90 100 100 100 200 193 193 238 289 289 289 357 293 293 326 354 354 354 428 159 159 215 219 219 219

“Going to

Length per roll Length per roll Symbol Roll size 20 33* 100 153* 305* 500 Symbol Roll size 20 33 153 305 500U Size Size 20m 100 ft. 100m 500 ft. 1000 ft. 500m 66 ft. 100 ft. 500 ft. 1000 ft. 1640 ft.

CYPSeries

43 Clear hard anodized NBR Plate A O-ring Aluminum alloy 21 44 Clear hard anodized Carbon tool steel Plate B C type snap ring for shaft Aluminum alloy 22 45 NBR Cushion seal O-ring NBR 6 Clean Room Rodless Cylinder Series CYP Dimensions (mm) 1in = 25.4mm E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counter bore dia B Counter bore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke

CYPSeries

43 Clear hard anodized NBR Plate A O-ring Aluminum alloy 21 44 Clear hard anodized Carbon tool steel Plate B C type snap ring for shaft Aluminum alloy 22 45 NBR Cushion seal O-ring NBR 6 Clean Room Rodless Cylinder Series CYP Dimensions (mm) 1in = 25.4mm E Depth ED 4-MM Thread depth M T Y L T K PA 4-Counter bore dia B Counter bore depth C F 4-LD QW PB N E depth EK Q + Stroke Z + Stroke

5 Port Air Operated Valve Series SYA3000/5000/7000 1

40 SYA 5 1 Base mounted P, R port thread type Series 3 SYA3000 5 SYA5000 Nil Rc G F 40 SYA 7 1 Base mounted N NPT NPTF T P, R port thread type Type of actuation Nil Rc 2 position single G F Port size 1 N NPT Symbol Applicable series Nil Port size Without sub-plate NPTF T 2 position double 1 8 01 SYA3000 Port size With sub-plate 2 Symbol Nil Port size Without sub-plate Without sub-plate (

Series LQ3 High Purity Fluororesin Fitting

F (E) L H G F E B M L 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 9.5 12 18 20 28 36 4.8 6 9 10 14 18 10 17 22.5 24.5 27 30 3.5 4 5 6 7 8 14 20 25 29 37 49 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3T1A LQ3T2A LQ3T3A LQ3T4A LQ3T5A LQ3T6A M 1/4 (E) (E) G H L L Panel Union : LQ3P J Panel Thickness (Max. t) (mm) Inch Size H W2 W1 Model Tubing O.D.

ZSE40/ISE40

This function prevents such momentary pressure drops from being detected as abnormal pressures by allowing the response time selection to be changed. t (ms) t (ms) Time (Averaging) (Averaging) Switch output operation when normal ON [Selectable response times: t] 2.5 ms (normal), 24 ms, 192 ms or 768 ms The normal setting is selected when shipped from the factory.

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: B + J + M

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: B + M

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: Automatic Water Supply Function

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: M [Applicable to DI Water (Deionized Water) Piping]

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: Rc, Option: M + T

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: G w/PT-G Conversion Fitting Set, Option: Automatic Water Supply Function

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: Earth Leakage Breaker

Cooling Capacity: Cooling Capacity: 1100/1300W, 50/60 Hz, Cooling Method: Air-cooled Refrigeration, Thread: NPT w/PT-NPT Conversion Fitting Set, Option: B + J