Bowls on size 30 or more are now covered with a transparent bowl guard, completely protecting them from the environment, and making the inside visible from 360 degrees. 

0.5

g) 260 g (With bracket: 340 g) 280 g (With bracket: 360 g) 260 g (With bracket: 340 g) Applicable standard/directive CE (EMC directive: 2004/108/EC) CE (EMC directive: 2014/30/EU) CE (EMC directive: 2004/108/EC) CE (EMC directive: 2014/30/EU) *1: Based on ANSI/ESD-STM3.1-2006 standards AC Adapter (IZF10/10R-CG1, IZF10/10R-CG2) Input voltage 100 to 240 VAC, 50/60 Hz Output voltage 24 VDC

Industrial Filters

44 04 FGDTB 210 1200 23 46 50 56 50 63 06 FGDFB FGESA Note 2) 410 3000 45 90 120 140 100 160 10 FGELA Note 2) 410 3600 50 120 140 170 110 210 20 FGETA FGESB Note 2) 800 3300 70 140 150 160 120 170 10 FGELB Note 2) 800 4200 90 170 180 210 140 230 20 FGETB FGESC Note 2) 1100 3400 83 150 160 170 120 170 10 FGELC Note 2) 1200 4400 120 190 200 220 150 230 20 FGETC FGGSB 160 270 300 320 290 360

Modular Design with Uniform Body Style

Body sizes 30 and larger The inside is visible from 360. The bowl is completely protected from the environment, allowing for improved safety. Inner bowl Material: Polycarbonate Transparent bowl guard Material: Polycarbonate A right angle square type pressure gauge and a cross adapter attachment have been added.

Support Guide/11-LEFG Series

11-LEFG25-S-300 430 307 410 8 3 360 11-LEFG25-S-350 480 357 460 11-LEFG25-S-400 530 407 510 35 528 Support Guide 11-LEFG Series Dimensions: Ball Screw Drive 11-LEFG32-S 42 70 (122) 5H9 (+0.030 0 ) depth 5 4 x M6 x 1 thread depth 9.9 LEF 44 60 LEJ 5.5 5H9 (+0.030 0 ) depth 5 LEL 48 70 A (Table traveling distance) L 61 (62) 10 10 LEM 60 46.8 LEY (60) 32 30 LES Vacuum port Rc1/8 n x 5.5 LEPY

Environment

Operating condition Model LC3F2 A LEC-MR-RB-032 B LEC-MR-RB-12 Allowable Stroke Speed [mm/s] Model AC servo motor Lead Stroke [mm] Symbol [mm] Up to 100 Up to 200 Up to 300 Up to 400 Up to 500 Up to 600 Up to 700 Up to 800 Up to 900 Up to 1000 Up to 1100 Up to 1200 H 20 1500 1200 900 700 550 A 12 900 720 540 420 330 B 6 450 360 270 210 160 LEFS25 100 W /l40 (Motor rotation speed) (4500 rpm

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 2 (2) AS121F-M3 AS131F-M3 M3 x 0.5 (2) AS121F-M5 AS131F-M5 M5 x 0.8 AS121F-U10/32 AS131F-U10/32 10-32UNF Tube swivels 360 Universal type permits 360 piping swivel. (2) AS221F-01 AS231F-01 R1/8 AS221F-02 AS231F-02 R1/4 2 size added to applicable tubing sizes Metric size (Release

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8"1/2" 2.5, 4, 6 AS131F-M3 AS121F-M3 M3 x 0.5 6, 10, 16, 20 AS131F-M5 AS121F-M5 M5 x 0.8 6, 10, 16, 20 AS121F-U10/32 AS131F-U10/32 10-32 UNF Tube swivels 360 Universal type permits 360 piping swivel. (1) 20, 25, 32 AS221F-01 AS231F-01 R 1/8 20, 25, 32,

7

CK1A40-75YZ CK1A50-75YZ CK1A63-75YZ CKA-K075 69 167 75 70 132 35 222 59' 0 360 365 360 CK1A40-100YZ CK1A50-100YZ CK1A63-100YZ CKA-K100 K 83 177 75 90 142 45 232 58' 0 395 CK1A40-150YZ CK1A50-150YZ CK1A63-150YZ DCKA-K150 108 202 85 140 167 70 267 55' 10 480 -X Note) Only available for the CK1A series (Clevis width 16.5 mm) 431 CK1 Series Auto Switch Mounting (Rod Mounting Type) Auto Switch

Cylinder with Lock

R1 S5 XD Z 32 E5032 32 10 11 47 26 0.2 0.6 21 18 31 8 38 51 7 10 10 6.6 200 222 40 E5040 36 12 11 54 28 0.2 0.6 24 22 35 10 41 54 9 10 11 6.6 226 250 50 E5050 45 12 15 66 32 0.2 0.6 33 30 45 12 50 65 11 12 12 9 245 277 63 E5063 50 16 15 77 40 0.2 0.6 37 35 50 12 52 67 11 14 15 9 269.5 301.5 80 E5080 63 16 18 99 50 0.2 0.6 47 40 60 14 66 86 12.5 18 15 11 320 360 100 E5100 71 20 18 118 60 0.2

Micro Mechanical Valve Series VM1000

Loosen the hexagon socket head cap screw to adjust through 360. Loosen the hexagon socket head cap screw to adjust the lever. 2314 3 Port Mechanical Valve : Heavy Duty Type Series VM800 Construction Non-actuated Actuated Force Component Parts POM ADC Material No.

Manifold Specifications

16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 8 223 212.5 200 11.5 9 248 237.5 216 16 10 260.5 250 232 14 Stations EVS L1 L2 L3 L4 (Station n)(Station 1) VFN (mm) Stations 11 273 262.5 248 12.5 12 298 287.5 264 17 13 310.5 300 280 15.5 14 323 312.5 296 13.5 15 335.5 325 312 12 16 360.5 350 328 16.5 17 373 362.5 344 14.5 18 385.5 375 360

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Drain HAW22 to 110 Air inlet Air outlet Screw-in Cooling water outlet Cooling water inlet Mounting holes Drain ZA HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 B C D E F G H J K L M N P Q R S T U V W Y Z 473 Model A 360 570 948 1354 1612

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 320 340 360 380 400 Allowable end load F (N) CX DMGGM80Stroke -X 8 (Slide bearing type) 207 Data 6 Deflection Y (mm) 1200 st 5 1100 st 4 1000 st 900 st 3 800 st 700 st 2 600 st 400 st 500 st

MXF

250 210 MXF16 690 500 360 MXF20 1370 1060 750 600 8-6-3 4 Series MXF Table Deflection (Reference values) Table Displacement due to Pitch Moment Load Table Displacement due to Yaw Moment Load Table Displacement due to Roll Moment Load Table roll deflection arrow A due to static roll moment applied at arrow F when Lr = (see table) and table is retracted.

Model: 360 (Size 1 1/2"; Flow Rate 360 scfm; Dryer Configuration Duplex)

Model: 360 (Size 1 1/2"; Flow Rate 360 scfm; Dryer Configuration Duplex), Options: DL (with Dewpoint Management Control and Low Dewpoint Cartridges)

.· Tube can be mounted in any direction through 360°.· Universal type allows piping direction to be freely set through 360°.· Can be used up to a maximum operating pressure of 1 MPa.

Bowls on size 30 and up are now covered with a transparent bowl guard, completely protecting them from the enviromnent, and making the interior contents visible from 360 degrees. The base color of the new AC-B is uban white, maintaining a clean, modern look.

Bowls on size 30 and up are now covered with a transparent bowl guard, completely protecting them from the enviromnent, and making the interior contents visible from 360 degrees. The base color of the new AC-B is uban white, maintaining a clean, modern look.