T/TIA

TEL: 317-899-4440 FAX: 317-899-3102 GERMANY SMC Pneumatik GmbH Boschring 13-15 D-63329 Egelsbach, Germany TEL: 06103-4020 FAX: 06103-402139 CANADA SMC Pneumatics (Canada) Ltd. 6768 Financial Drive Mississauga, Ontario, L5N 7J6 Canada TEL: 905-812-0400 FAX: 905-812-8686 ITALY SMC Italia S.p.A.

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

VH Series, 4 Way Hand Valve

+0.5 0 B0.1 4-1/4,3/8NPT 4 (B) Max. panel thickness D (mm) A 3.2 3.2 3.2 B 40 51 64 C 35 41 51 D 3.5 6 8 VH200 type VH300 type VH400 type 8 Panel Mount/Dimensions Series VH (mm) / Panel mount type Dimensions VH41 -N02/N03/N04 VH41 -N06 Scale: 35% 2 (A) 4 (B) 4 (B) 2 (A) 25 25 3 (R) 1 (P) 3 (R) 1 (P) 88 102 89 107.5 19 102 46.6 46.6 88 81 94 148 144 97 97 67 1.5 65 1.5 123 105.5 25 3 (R)

Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

AME

5 Super Mist Separator Series AME AME450 to AME850 Dimensions Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket 2-port size (Option) HA Maintenance space AT ID AMG AFF M Dimensions with mounting bracket Model Port size (Nominal size B) A H B C D E F G AM I 221

Series 10/11-C(D)A2, available for clean environment, prevent particle generation in a clean room. 21/22-C(D)A2 series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The CDA2 clean series is auto switch capable.

Type: Straight, Material: Urethane, Cutting Service: Not Available, Color: [Black] Black (opaque), Outer Diameter Class: ~8, Compatible Fluid: Water / Air, Outer Diameter D(Ø): 8, Inner Diameter Class: ~5, Inner Diameter d(Ø): 5, Material: Urethane: [Polyurethane] Polyurethane, Minimum Bending Radius(mm): 20, Operating Environment: Standard, Coil Winding Length(m): 200, Applicable Tube Size

MLU

Plate Cylinder with Lock Series MLU 25, 32, 40, 50 How to Order Without Auto Switch B 25 30 D F MLU B 25 30 D F J79W S MDLU With Auto Switch Number of auto switches Built-in magnet 2 pcs. 1 pc. "n" pcs.

Air Cylinder: Standard Type Double Acting, Single Rod Series CM2 ø20, ø25, ø32, ø40 How to Order Mounting style Cylinder stroke (mm) T B Basic style (Refer to “Standard Stroke” on page 129.) Head side trunnion style Clevis integrated style Axial foot styl

D-A9/M9/M9W auto switches are shipped together (not assembled). (However, auto switch mounting brackets are assembled when being shipped.) Solid state auto switches marked with are produced upon receipt of order. D-A9V/M9V/M9WV and D-M9A(V)L cannot be mounted. Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models.

SI unit for EtherCAT

Revision D: Limited warranty and Disclaimer are added.

Rotary Actuator Vane Type CRB2 Series Size: 10, 15, 20, 30, 40

D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m Symbol Shaft type Shaft-end shape Long shaft Short shaft S Single shaft Single at* W Double shaft Single at* Single at J** Double shaft Round shaft Single at K** Double shaft Round shaft Round shaft T** Single shaft Round shaft Y** Double shaft Single at* Long shaft with single at* w Mounting Symbol Mounting B Basic type

Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control VNA Series VNA 2 1 1 A A 1 0 15A 1 15A T Bracket (Valve size: 1/2/3/4.) Nil B Note) None With bracket Manual override Rated voltage 1 1 1 2 N.C. N.O. C.O. Port size Rc ø15 ø10 ø2

VAC 50/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz 3 Note 2) 2 1 Orifice dia.

Process Valve: 2 Port Valve For Flow Control VNB Series

Process Valve: 2 Port Valve For Flow Control VNB Series [Option] Electrical entry: D or DZ only. How to Order Pilot system option Seal material Body material option Nil V Standard Vacuum pilot type NBR seals FKM seals EPR seals Nil Standard A B C Bracket (valve size: 1/2/3/4.)

2/3 Port Solenoid Valve for Chemicals

Series LVM090 Series LVM200 Valve width: 9.5 mm Valve width: 20 mm Specifications LVM090 LVM200 LVM100 Series 0.2 MPa 0.3 MPa 0.25 MPa Max. operating pressure 1.1 mm 2 mm 1.4 mm Orifice diameter Flow characteristics (Cv factor) 0.018 0.065 0.03 LVM090 and 200 are rocker type 2/3 port valves. C For detailed dimensions, specifications, and delivery, please contact SMC.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

E L type has 300 mm and 600 mm only. 3 C ATEX Compliant 5 Port Solenoid Valve Series 52-SY Safety Instructions Specifications 1) This product is not suitable for Zone 0.

VX31/32/33

Nil Z Nil T F N Rc NPTF G NPT Electrical entry (AC/DC) G -Grommet GS-With grommet surge voltage suppressor C -Conduit Rated voltage 6 7 8 J 1 2 3 4 5 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC T -With conduit terminal TS -With conduit terminal and surge voltage suppressor TL -With conduit terminal and

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series ø 25, ø 32, ø 40

-X 5 to 60 Operating temperature range (C) The shock absorber service life is different from that of the MY1H cylinder depending on operating conditions. Refer to the RB series Specific Product Precautions for the replacement period. 1209 Technical Data A

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications 2 21 01 1 G 0 R 1 VXK AC 0 2 21 01 1 G 5 VXK DC Model Bracket Orifice size Refer to the Table (1) None Nil Fo

Thread type Suffix Nil T F N Oil-free Rc NPTF G NPT Nil Z Electrical entry G -Grommet GS-With grommet surge voltage suppressor C-Conduit Select nil because the solenoid valve option V is the oil-free treatment.

Magnet: D (Built-in), Mounting: C (MP4, Single Detachable Rear Clevis), Bore Size: 200 (2"), Stroke: 2000 (20"), Air Cushion: Both Ends (Air Cushion), Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewired Connector: L (3m), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC6 (Stainless Steel Rod)