Process Pump

Diaphragm B moves to the right, and at the same time diaphragm A also moves to the right Air exhaust port (AIR EXH) Switching valve Air supply port (AIR SUP) Pilot valve B Pilot valve A Discharge port (FLUID OUT) Pump chamber A Pump chamber B Check valve Shaft Suction port (FLUID IN) Diaphragm A Diaphragm B Drive chamber A Drive chamber B Control unit pushing pilot valve A. 3.

VZS2000

For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS2000 Model VK 1 4/2 (P A/B) C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Flow characteristics Max. operating cycle (CPM) Response time (ms) (1) (2) (3) Weight (kg) Port size Rc Model Type of actuation VZ C [

ZB-OM00301

JIS B 8370: JIS B 8361: JIS B 9960-1: -((1 :) JIS B 8433-1993: *2) : : : 1 2. 3. 1. 2. 3. 4. 2 2 - No.ZB-OM00301 3 1 1 *3) 1 1 () () () 3 - No.ZB-OM00301 () () 4 - No.ZB-OM00301 () * JIS B 8392-1 2.4.32.6.3 () 5 - No.ZB-OM00301 * F.G.

AMX-OM-Q018E

B AR20-B AR40-B AR25-B Differential pressure gauge GD40-2-01-X29 Y30(T)-A Y30(T)-A Y20(T)-A Y40(T)-A Spacer Y40(T)-A Y20(T)-A Fluid Compressed Air Range of operating conditions Inlet air pressure MPa 0.3 to 1.0 0.3 to 0.85 0.3 to 1.0 0.3 to 0.85 Inlet air temperature oC -5 to 55 -5 to 50 -5 to 55 -5 to 50 *Note1 Ambient temperature oC -5 to 55 -5 to 50 -5 to 55 -5 to 50 *Note1 Standard Performance

LFE-OMZ0012

The proof pressure is double the operating pressure range. -28No.LFE*-OMZ0012 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out of range -29No.LFE*-OMZ0012 Dimensions 2XPort size Note) The electrical

High Vacuum L Type Valve

A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

3 Port Direct Operated Solenoid Valve Rubber Seal Series SY100 For details about certified products conforming to international standards, visit us at www.smcworld.com.

SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 100 kPA to 0 0.14 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 0.22 100 kPA to 0 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.O. Note 1) SY123/SY1243 4 and SY123/SY1243 4A: Supply pressure to 1(R) port and exhaust air from 3(P) port. Note 2) Value for DC.

Mini Free Mount Cylinder ø4, ø6, ø8, ø10 Series CUJ

Mini Free Mount Cylinder 4, 6, 8, 10 Series CUJ How to Order Bore size 4 6 8 10 4 mm 6 mm 8 mm 10 mm Made to Order Refer to pages 2 and 24 for details. 6 D 10 CUJ B D 10 F8N With auto switch CDUJ B 6 With auto switch (Built-in magnet) Number of auto switches 2 pcs. 1 pc. Nil S Mounting B Basic (Through-hole) M9: with 1 pc.

TUS

Yellow (Y) Green (G) Translucent (N) (1) Yellow brown (YB) Soft polyurethane tubing Fluid Air 20C 40C 0.6 Max. operating pressure MPa 0.6 Iner sleeve 60C 0.4 One-touch fitting, Insert tube fitting, Miniature fitting (Hose nipple type) (3) Applicable fittings 8 15 15 22 29 Min. bending radius (mm) (2) One-touch fitting 20 to +60C (No freezing) Operating temperature Model Material Tube drawing

High Precision Stroke Reading Cylinder Non-rotating Piston Type CEP1 Series ø 12, ø 20 Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the multi-counter operation manual for details. Note)

CEP1 CEP1 CE1 CE1 How to Order CE2 B CEP1 12 50 M9BW ML2B Made to Order Refer to page 648 for details. High precision stroke reading cylinder Mounting type B L F Direct mounting rod side tapped type Foot type Rod side flange type Number of auto switches 2 pcs. 1 pc. n pcs.

Silencer Compact Resin Type/Male Thread Series AN05 to 40

Construction/Parts/Dimensions AN05/10/20 AN15/30/40 No hexagonal part in AN05 and AN10 B Dimensions (mm) B Port size R, NPT A B D Model Sound absorbing material (Resin sintered body) AN05-M5 AN10-01 AN15-02 AN20-02 AN30-03 AN40-04 6.5 15 M5 x 0.8 Body (Resin) A 23 1/8 11 A 32 1/4 14 16 Hexagonal flats D 14 45 1/4 16.5 17 58.5 3/8 20 Port size 21 68 24 1/2 2

Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 ø6, ø10, ø16 How to Order Bore size 6 6 mm Built-in Magnet Cylinder Model 10 10 mm Suffix the symbol “-A” (Rail mounting style) or 16 16 mm “-B” (Band mounting style) to the end of part Mo

, 30, 45, 60 CS2 10 15, 30, 45, 60, 75, 100, 125, 150 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Manufacture of intermediate strokes at 1 mm intervals is possible.

Knob Cover

Please prepare the padlock at the customers site. -8- 6Dimensions A B E D Piping Center C E D Piping Center AR-D,ARM-D series AW-D,AWM-D,AWD-D series A B C D E AR20(K)-D,AR20M(K)-D AW20(K)-D,AWM20-D,AWD20-D Applicable Part No.

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

Dimensions/40 to 100 Basic/CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G D E H1 AL B1 K A N F N B C M S + Stroke H ZZ + Stroke (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Standard strokes (mm) Bore sizes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 32, 40 50, 63 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Example) For CQ2XB40-57D, an 18mm spacer is installed inside a standard stroke CQ2XB40-75D cylinder. Specific Product Precautions Be sure to read before handling. Refer to pages 15 to 24 for safety instructions and precautions.

Series LX Construction and Mounting

Description Material Aluminum alloy Stopper B Motor 1 10 Sensor plate Direct acting guide 2 11 Chromated Mild steel Coupling 3 Resin/Alloy steel Aluminum alloy 12 Nut Alloy steel Magnet Rolled screw 4 13 Bumper Body Rubber Anodized 5 14 Aluminum alloy Resin Motor cover Anodized Aluminum alloy Table 6 15 Anodized Aluminum alloy End plate Photo micro sensor 7 16 Anodized Aluminum alloy

HAW

) Q R Cooling water outlet 87 G (H) K J Cooling water inlet S T 2 x 2 x U Mounting holes D N Drain C (A) B (M) W Rc (mm) B C D E F G H J K L M N P Q R S T U V W Y Z 473 ZA HAW2-04 HAW7-06 HAW22-14 HAW37-14 HAW55-20 HAW75-20 HAW110-30 Model A 360 570 948 1354 1612 2112 1724 1 2 3 4 1 2 1 2 3 4 3 4 3 4 3 4 1 2 1 2 3 4 395 10 10 12 18 18 18 18 4.5 4.5 4.5 6.0 6.0 6.0 8.0 94 94 150 139 139 139

Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

Miniature Regulator

(OUT) Metric size None Bracket Nil B G ARJ310-01 4 mm 6 mm 04 06 Pressure gauge Note 2) For products with pressure gauge, pressure gauge is shipped together with product.

Unit Manifold Valve

Solenoid valve No. 3 4 3 2 1 15 (For C2: 16) 2 No. 4 No. 3 No. 2 No. 1 21.6 4 3 (2) 26 6 2 1 1 No.1 Groove side Barb fitting [1(P), 2(A), 3(R) port] Applicable tubing O.D. 4, I.D. 2.5, Polyurethane tubing (made by SMC) Soft nylon tubing (made by SMC) Connector (For C2) (33.3) (L = 300 to 1000) Lead wire length Cut dimension for panel mount (mounting surface) 32.6 31 25 20 (10) (10) 6 (15)