Solid State Vacuum Regulator Series ITV2090/2091

Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)

Electric Actuators

Model IX IY W H Sectional secondary moment Top entry Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60 177 48 374 836 52 402 1000 70 122 151 70 122 151 Left entry Brake Right entry Axial entry Bottom entry Table traveling accuracy T-slots enable highly flexible mounting.

Clean Air Module

0.2 MPa 50 60 40 40 30 20 20 10 0.1 MPa 0 2 4 6 8 10 0 0.1 0.2 0.3 0.4 0.5 Number of needle rotations Fluid pressure (MPa) LLB4-1-P1R1VSF: High Flow Type (500 L/min) 500 600 Set pressure 0.4 MPa 0.3 MPa 500 Flow rate {L/min (ANR)} Flow rate {L/min (ANR)} 400 400 300 0.2 MPa 300 200 200 0.1 MPa 100 100 0 1 2 3 4 5 6 7 8 9 11 10 0 0.1 0.2 0.3 0.4 0.5 Number of needle rotations Fluid pressure

Booster Relay Series IL100

IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58

Lock-Up Valve IL201/211/220 Series

4 IW 2 x 6.6 2 52 10 1301 AW 137 62 31 21 5 IL1 SIG OUT IN1 OUT1 SIG 2 IL2 IL2 IN2 OUT2 IT OUT 5 x Rc1/4 CP 60 IS IL220 VFN 14.5 INT Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 173

4-channel Flow Monitor (Remote type monitor unit)

If the minimum setting unit is 1 L/min, the display will change in 1 L/min steps, e.g. 10..11..12 L/min. O Operating humidity range The ambient humidity range within which the product will meet all published specifications. Operating temperature range The ambient temperature range within which the product will meet all published specifications.

Trimmer Auto Switch

Series 10 16 20 25 32 40 50 63 80 100 125 MHZ2 3.0 5.5 6.5 8.0 7.5 MHZJ2 3.0 5.5 6.5 MHS2 (2 fingers) 1 4.0 4.0 6.5 6.5 8.0 6.5 MHS3 (3 fingers) 1 5.0 4.0 6.5 6.5 8.0 6.5 7.5 7.5 7.5 MHS4 (4 fingers) 1 5.0 3.0 6.5 6.5 8.0 6.5 MHC2 2 -10 to -10 to 11 16 Air cylinder Unit: mm Tube I.D.

PIROT OPERATED 2 PORT SOLENOID VALVE

Refer to page 13 for ordering coil only. 11 Construction/Principle Parts Material 12 Solenoid Coil Assembly 13 Trouble shooting If abnormal operations occur while in use, please check the following flowchart and take the appropriate measures.

Thomas Oil-less Diaphragm Compressor / Vacuum Pump Flow Rate: 1.15 CFM / 33 LPM , 1.15 CFM / 33 LPM, Max Pressure: 30 PSIG / 2.1 bar , 30 PSIG / 2.1 bar, Max Vacuum: 23.8 in HgV / -807 mbar , 23.8 in HgV / -807 mbar, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 7.81 in / 198 mm Width: 4.75 in / 121 mm Height:

Thomas Oil-less WOB-L Piston Compressor / Vacuum Pump Flow Rate: .78 CFM / 22 LPM , .78 CFM / 22 LPM, Max Pressure: 100 PSIG / 6.9 bar , 100 PSIG / 6.9 bar, Max Vacuum: 25.6 in HgV / -868 mbar , 25.6 in HgV / -868 mbar, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 7.89 in / 200 mm Width: 5 in / 127 mm Height:

Thomas Oil-less WOB-L Piston Compressor / Vacuum Pump Flow Rate: 1.22 CFM / 35 LPM , 1.22 CFM / 35 LPM, Max Pressure: 50 PSIG / 3.4 bar , 50 PSIG / 3.4 bar, Max Vacuum: 26.8 in HgV / -908 mbar , 26.8 in HgV / -908 mbar, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Item Dimensions: Length: 7.89 in / 200 mm Width: 5 in / 127 mm Height:

Thomas Oil-less WOB-L Piston Compressor / Vacuum Pump Flow Rate: 2 CFM / 57 LPM , 2 CFM / 57 LPM, Max Pressure: 45 PSIG / 3.1 bar , 45 PSIG / 3.1 bar, Max Vacuum: 27 in HgV / -915 mbar , 27 in HgV / -915 mbar, Voltage (60 Hz): 115, Frequency (Hz): 60, Phase: 1-phase, Net Weight: 11 lbs. / 5.0 Kg Series Configured Datasheet.

Thomas Oil-less WOB-L Piston Compressor / Vacuum Pump Flow Rate: 1.94 CFM / 55 LPM , 1.94 CFM / 55 LPM, Max Pressure: 40 PSIG / 2.8 bar , 40 PSIG / 2.8 bar, Max Vacuum: 27 in HgV / -915 mbar , 27 in HgV / -915 mbar, Voltage (60 Hz): 230, Voltage (50 Hz): 220 - 240, Frequency (Hz): 50 / 60, Phase: 1-phase, Net Weight: 11 lbs. / 5.0 Kg Series Configured Datasheet

ø6, ø8, ø12, ø16, ø20, ø25 Series MXQR Air Slide Table/Reversible Type

(N) Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.7 0.6 0.5 0.4 0.2 0.3 40 34 29 11 23 17 57 OUT 6 3 29 25 21 8 17 13 42 IN 71 61 51 20 40 30 OUT 101 8 4 53 45 38 30 15 23 IN 75 158 136 113 90 45 68 OUT 226 12 6 119 102 85 68 34 51 IN 170 281 241 201 161 80 121 OUT 402 16 8 211 181 151 121 60 91 IN 302 440 377 314 251 126 188 OUT 628 20 10 330

Compact Guide Cylinder JMGP Series ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

Refer to pages 10 and 11 for cylinders with auto switches.

Size: 60, Voltage: 11 (Single-phase 115 VAC, 60 HZ), Thread Type: N (NPT)

Size: 60, Voltage: 11 (Single-phase 115 VAC, 60 HZ), Thread Type: N (NPT), Options: L (w/Heavy-duty Auto Drain, Max. Operating Pressure 1.6 MPa)

Size: 60, Voltage: 11 (Single-phase 115 VAC, 60 HZ), Thread Type: R (Male), Options: L (w/Heavy-duty Auto Drain, Max. Operating Pressure 1.6 MPa)

Size: 60, Voltage: 11 (Single-phase 115 VAC, 60 HZ), Thread Type: N (NPT), Options: C (Anti-corrosive Treatment for Copper Tube)

Size: 60, Voltage: 11 (Single-phase 115 VAC, 60 HZ), Thread Type: N (NPT), Options: V (w/Time Type Solenoid Valve w/Auto Drain; Max. Operating Pressure 1.6 MPa)