Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

R.

Miniature Regulator

fitting R1/8, M5 x 0.8 2 1 6 One-touch fitting 5/32" One-touch fitting NPT1/8, M5 x 0.8 1/4" One-touch fitting M5 x 0.8 female thread is cut inside the pipe.

Precision Regulator

1/4 to 1/2 Port size IR IR 66 IRV 36 Female thread for bottom mounting 4 x M5 x 0.8 depth 7 VEX Bottom bracket is not available as an option.

Series: 25A-ISE20, Rated Pressure Range: B (-0.1 TO 1 Mpa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 04 (1/2), Option: BM (B + M), Semi-Standard: R (Flow Direction: Right to Left)

Body Size: 40, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 04 (1/2), Option: M (Round Pressure Gauge w/ Color Zone), Semi-Standard: R (Flow Direction: Right to Left)

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 04 (1/2), Option: DM (D + M), Semi-Standard 1: Standard, Semi-Standard 2: R (Flow Direction: Right to Left)

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: BM (B + M), Semi-Standard 1: Standard, Semi-Standard 2: R (Flow Direction: Right to Left)

Body Size: 20, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 01 (1/8), Option: BM (B + M), Semi-Standard: R (Flow Direction: Right to Left)

Body Size: 25, Thread: Rc (Rc: for Sizes 20, 25, 30, 40; M5: for Size 10), Port Size: 02 (1/4), Option: BM (B + M), Semi-Standard: 1R (1 + R)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A2 (Bracket B, Horizontal Mounting)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Slit Valve

0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Manifold Regulator ARM1000/2000 Series

52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103 160 151 6 131 122 188 179 7 150 141 216 207 8 169 160 244 235 9 188 179 272 263 10 207 198 300 291 L1 L2 L1 L2 ARM1000 PVQ ARM2000 VY1 VBA VBAT AP100 753

Manifold Regulator Modular Type ARM2500/3000 Series

Bonnet Common IN Individual IN Common IN Individual IN Polyacetal 2 Regulator Regulator ARM2500-A-02 ARM2500-B-02 ARM3000-A-03 ARM3000-B-03 9 1 Replacement Parts End plate R 10 1 Description Material Part no. End plate L 11 1 No.

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads, F/R MAINTENANCE KIT, AIRLINE EQUIPMENT, AW MASS PRO, C1, AW MASS PRO 1/8 PART, .02200 lb

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads, F/R MAINTENANCE KIT, AIRLINE EQUIPMENT, AW MASS PRO, D1, AW MASS PRO 1/4 PART, .04840 lb

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads, F/R MAINTENANCE KIT, AIRLINE EQUIPMENT, AW MASS PRO, 21, AW MASS PRO NO SIZE RATING, .00660 lb

This series is available in four body sizes with piping from M5 to 3/4 in Rc, NPT or G thread types.Modular type filter regulator , Rated filtration ( m): 2, 10, 20, 40 , 70 or 100 , Optional embedded pressure gauge , Available with built-in backflow mechanism , Rc, G(PF) or NPT threads, F/R MAINTENANCE KIT, AIRLINE EQUIPMENT, AW MASS PRO, E1, AW MASS PRO 3/8 PART, .04400 lb