3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

actuation Port size {2(A) port} (A) 2 N.C.

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature specifications Indicator Valve size 16 25 40 50 General use Without XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 With XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 High temperature Without XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 With XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 Temperature

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

2 !3 14A 14B !5 !

CE

When bank 2 is selected 0 Decimal no. 1 2 3 4 5 6 7 8 9 Bank 2 Bank 3 Bank 4 16 17 18 19 20 BCD 0 0001 0010 0011 0100 0101 0110 0111 1000 1001 11 12 13 14 15 Ex.) 1294.53 is expressed as follows. 0001 0010 1001 0100 0101 0011 6 7 8 9 10 Bank 1 1 2 3 4 5 RS-232C 1 2 3 4 5 6 7 8 9 10 Output terminal This is the interface standard for the serial transmission method, which is standard equipment

ASP

35 38.9 15.8 48.2 15 36.7 41.7 NPT 1/4 1/2" 18.5 NPT 1/8 42.6 10.9 11/16" 68 18 20.3 23.1 25.9 26.5 107 116 220 230 55.1 19.8 41.9 46.9 NPT 3/8 1/2" 23 NPT 1/8 50.3 14.4 19 69.4 26.5 57.3 64.8 NPT 1/2 28.6 NPT 1/4 61.8 18.3 15/16" 11/16" Note 1) Reference dimensions Note 2) Reference dimensions of NPT thread after installation. 549 Series ASP Construction Component Parts Component Parts

CE

When bank 2 is selected 0 Decimal no. 1 2 3 4 5 6 7 8 9 Bank 2 Bank 3 Bank 4 16 17 18 19 20 BCD 0 0001 0010 0011 0100 0101 0110 0111 1000 1001 11 12 13 14 15 Ex.) 1294.53 is expressed as follows. 0001 0010 1001 0100 0101 0011 6 7 8 9 10 Bank 1 1 2 3 4 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

SMC Electronic Switch Series Variations

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

Vacuum Gripper

TQ1230001-OM102-B 2.

Basic Type/Direct Mount Type

2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model CY3B6 CY3B10 CY3B15 CY3B20 CY3B25

E-P HYREG ® Series VY1 1

(MPa) A port pressure (MPa) A port pressure (MPa) 0.6 0.6 0.6 0.4 0.4 0.4 0.2 0.2 0.2 VY130-5 VY140-5 VY150-5 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 V V V VY130-6 VY140-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

" 1/4" 5/16" 5/16" 3/16" 5/16" 3/16" 5/16" 3/16" 3/16" 1/2" 3/16" 1/2" 3/16" 1/2" 12.7 NPT 1/8 23.4 27.4 39.8 45.8 17.6 14.3 NPT 1/4 25.4 31.4 39.8 45.8 17.6 12.7 NPT 1/8 26.7 30.7 45.3 52.8 24.4 14.3 NPT 1/4 28.7 34.7 45.3 52.8 24.4 17.5 NPT 3/8 30.4 36.7 45.3 52.8 24.4 17.5 NPT 1/4 33.8 39.8 49.6 55.6 30 17.5 NPT 3/8 35.5 41.8 49.6 55.6 30 22.2 NPT 1/2 37.6 45.8 49.6 55.6 30 15-13-4 Flow

Suction Guard (Produced upon receipt of order) FHG Series

(16) 1/2 3/4 1 1 1/4 1 1/2 2 1/2 3/4 1 1 1/4 1 1/2 2 78 78 83 106 106 111 3.6 3.6 3.6 6.4 6.4 6.5 71 71 71 104 104 104 53 53 53 74 74 74 3.7 3.7 3.7 7.4 7.4 7.5 Weight values are for the minimum T dimension (symbol 1) in each standard T dimension.

IZT40/41/42

0 Bar bracket Symbol Length [mm] 16 160 22 220 34 340 40 400 46 460 58 580 64 640 Symbol Length [mm] 82 820 112 1120 130 1300 160 1600 190 1900 232 2320 250 2500 Symbol Inch size 5H 3/16" Straight 7H 1/4" Straight 9H 5/16" Straight BH 3/8" Straight 5L 3/16" Elbow 7L 1/4" Elbow 9L 5/16" Elbow BL 3/8" Elbow Symbol Type Nil Without bracket B With bracket 1 F With bracket 2 The number of intermediate

KA

-U02 10 13.1 13.1 3 8 KAH06-U03 17.5 11.5 16 1 8 1 4 25 21.5 20.5 15.5 KAH08-U01 KAH08-U02 11 27 14 14 8 18.5 18.0 18.0 3 8 19.5 13.5 KAH08-U03 17 33 1 8 KAH10-U01 28 23 17 1 4 3 8 22 18 17 KAH10-U02 KAH10-U03 17 10 21 29.5 29.5 24 14 1 2 KAH10-U04 22 14 28 22 16 22 1 4 3 8 30.5 25.5 24.5 19.5 KAH12-U02 KAH12-U03 19 19 12 22 46.1 46.1 1 2 KAH12-U04 24.5 16.5 22 28 Reference

VS7-6

Blank plate (Air filter, Regulator) Manifold blocks necessary for mounting 2 2 2 2 2 2 2 1 F.

Vacuum Gripper

Plate A Plug (M-3P) (2 pcs.)

KN Series Nozzles for Blowing

D L1 VMG KN KN 861 KN Series Nozzle for One-touch fitting/KN (mm) Model Nozzle size D Applicable fitting size d L1 A Weight (g) KN-Q06-100 KN-Q06-150 KN-Q06-200 KN-Q08-150 KN-Q08-200 KN-Q10-200 KN-Q10-250 KN-Q12-250 KN-Q12-300 5 5 5 9 9 16 16 23 23 18 18 18 20.5 20.5 22 22 24 24 35 35 35 39 39 43 43 45.5 45.5 6 6 6 8 8 10 10 12 12 1 1.5 2 1.5 2 2 2.5 2.5 3 D 10 A Connecting products with

Manifold Specifications

.: 6 C6 VP4 U D U side D side 2 to 8 2 to 8 9 to 16 C8 Embedded type One-touch fitting Applicable tubing O.D.: 8 D-sub connector cable assembly VZS B Both sides Stations Symbol Passage Porting specifications 5(R1), 3(R2) 1(P) Common Common VFS 02 2 stations Symbol Side 4(A), 2(B) D side 1 16 VS4 16 stations Max. 16 stations. VQ7 Refer to page 3-7-4 for wiring specifications.

Series MXP Precision Air Slide Table

Contents 10 MXP10-PS 12 2 pieces of No.19 MXP12-PS 16 MXP16-PS MXPJ6 Description Material Note Parts list No.

Support Guide/11-LEFG Series

50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [