SMC Corporation of America
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For tool mounting 3 x 3.4 depth 12.5 MHY MHW Magnet for tool stand sensor -X Air pressure port 6 x M3 x 0.5 Applicable shaft diameter d Model D Mass (g) MRHQ 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 MA3 1-YNM5 MA3 1-YNM5-R1 MA3 1-YNM5-R2 MA3 1-YNM5-R3 MA3 1-YNM5-R4 MA3 1-YNM5-R5 MA3 1-YNM5-S6 MA3 1-YNM5-R6 MA3 0-AM3 MA3 0-AM5 500 MA Air pressure port 6 x M5 x 0.8 10 11 D35 AHC unit (Double

Enable Generates an error. 1 Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Sets the analogue input device range per channel. Analogue input range (Range) Selects the analogue input range. -10..10 V 2 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to PLC per unit.

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

Applicable blanking plate assembly DXT199-22-1A Applicable individual EXH spacer assembly DXT199-29-1A Type 21 How to Order VF VV5Z5 05 21 1 4(A), 2(B) port VFR Stations P, R port thread type VP4 02 2 stations 1(P) port NPT G Nil Rc Rc 1/4 20 VZS 20 stations 00F 00N 3/5(R) port NPTF 00T VFS Rc 1/4 Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both

Principles . 7 2 Chapter 8 Specification for Option C 8 1 Specifications . 8 1 8 2 Precautions for the installation and handling of the product . 8 1 Chapter 9 Specification for Option K 9 1 Safety instructions . 9 1 9 2 Specifications . 9 1 Chapter 10 Specification for Option L 10 1 Safety instructions . 10 1 10 2 Specification . 10 1 10 3 Installation of heavy duty auto drain . 10 2 10

SET MODE SD SG RD RS-232C COM S.STOP OUT1 OUT2 OUT3 OUT4 OUT5 AC100~240V 1 t 1 10 x 10-6 Counting speed f = = = 10Hz (Approx:100kHz) 7 10 44.5 33.5 Note 2) UP / DOWN input Input wave form conditions: At a maximum of 100kHz, the UP/DOWN wave form should be as shown below. 104 113 0.2 125 +12V 10% UP pulse +12V 10% DOWN pulse 5sec 5sec 5sec 64 59 Note 3) 15mA when BCD is output. 18 Series

Example) AC30-F03DE1-KSTV-136NR Body size Description Symbol 10 20 25 30 40 50 55 60 Metric thread (M5) Rc NPT G Nil Thread type N Note 1) F Note 2) + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil C D a Without auto drain Float type auto drain (N.C.) Float type auto drain (N.O.)

8 1/4 M5 x 0.8 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 31.5 35.5 39.5 34 39 43 43.5 47.5 52.5 54 57 59.5 8 10 14 8 10 14 12 14 15.3 21.1 25.5 15.8 22.3 26.7 23.5 27.9 29.4 30.8 32 36.2 6 13 19 7 14 20 14 22 29 39 41 68 D1 M 4 17 4 4 19.7 10.4 KQB2 M L1 10 L2 A 8 D1 KS KX 6 D2 18.5 10 10 21.8 12.8 10 H Connection threads 8 15.2 20.5 26 18 25.3 12 KM (R) (R) 2 x Applicable tubing 10 18.5 23 41 29

HRS050--20-(BJM) . 9-8 9.7 Required facility water flow (For water-cooled type) . 9-8 9.8 Compliance . 9-9 HRS Series HRX-OM-O021 Contents 9.9 Sample DoC. . 9-10 9.10 Daily Check Sheet . 9-11 Chapter 10 Product Warranty . 10-1 HRS Series HRX-OM-O021 Contents HRS Series HRX-OM-O021 Chapter 1 Safety Instructions Chapter 1 Safety Instructions Before using the product be sure to read and understand

. 10-1 10-2 . 10-2 10-3 . 10-3 10-4 . 10-3 11 R 11-1 . 11-1 11-2 . 11-1 11-3 . 11-1 11-4 . 11-2 11-5 . 11-2 12 S 12-1 . 12-1 12-2 . 12-2 12-3 . 12-2 2 13 T 13-1 . 13-1 13-2 . 13-1 13-3 . 13-1 13-4 . 13-2 13-5 . 13-3 14 V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i

Current (% for chiller main breaker volume) HRS100-A/W-20 4 h 2 h 1 h 4 min 6 min 10 min 14 min 20 min 30 min 2 min 1 min Operating time 20 s 30 s 10 s Max. 5 s 2 s 1 s Min. 0.5 s 0.2 s 0.1 s 0.05 s 0.02 s 0.01 s 100 125 200 300 500 400 600 700 1000 2000 3000 4000 5000 6000 7000 10 1500 Current (% for chiller main breaker volume) 28 Series HRS100/150 Specic Product Precautions 5 Be sure to

C10 M5 02 One-touch fitting for 3.2 v v v v Configuration One-touch fitting for 4 2 position single One-touch fitting for 6 (A) 4 (B) 2 One-touch fitting for 8 1 One-touch fitting for 10 M5 thread Rc(PT)1/4 5 (R1) 1 (P) 3 (R2) 2 position double (A) 4 (B) 2 (A) 4 (B) 2 Note 1) Refer to p.1.12-27 for inch size and One-touch fitting. 2 5 (R1) Metal Rubber 5 (R1) 1 (P) 3 (R2) 1 (P) 3 (R2)

10 16.5 163 43.5 96.5 1(P), 5(R1), 3(R2) port 3-Rc 1/2 (Pilot EXH port) Rc 1/8 SMC 1 P 5 3 R2 R1 42 17.5 PE 18 18 38 72 L n Dimensions Formula L1 = 25n + 63, L2 = 25n + 198 n: Stations In the case of DI unit, 1 pc., 54 mm is added per 1 pc. 9 288 423 10 313 448 7 238 373 11 338 473 6 213 348 12 363 498 5 188 323 13 388 523 4 163 298 14 413 548 3 138 273 15 438 573 8 263 398 L1 L2 2 113

5 10 15 4 6 10 15 10 12 19 27 11.5 13.9 22 31 Variation Action Mounting Note 2) Bore size (mm) Mounting Series Bore size (mm) Standard stroke (mm) 5, 10, 15 (20) Note 1) Series Action Standard stroke (mm) 5, 10, 15 5, 10, 15 5, 10, 15 5, 10, 15 4 6 10 16 4 6 10 15 Basic Flange Foot Clevis Trunnion Panel mount type, Embedded type Single acting, Spring return Double acting, Single rod 5, 10

silencer) ZH05B 6/Rc 1 8 6/Rc 1 8 ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 12/Rc 3 8 Body ported type (Without silencer) 8/Rc 1 8 10/Rc 1 4 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 6/Rc 1 8 8/Rc 1 8 8/Rc 1 8 10/Rc 1 4 10/Rc 1 4 3 8 12/Rc 10/Rc 1 4 12/Rc 3 8 12/Rc 3 8 16/Rc 1 2 16/Rc 1 2 13-5-2 3 Series ZH Vacuum Ejector: Box Type (Built-in Silencer)/Body Ported Type Ejector

Enable Generates an error. 1 -10..10 V -5..5 V -20..20 mA 0..10 V 0..5 V 1..5 V 0..20 mA Set the analogue input device range per channel. 2 Analogue input range (Range) Selects the analogue input range. -10..10 V 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to PLC per unit. 2s complement 2s complement.

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% Response Time Response time ms (at 0.5 MPa) 7 or less Mass Valve model Number of solenoids 1 pc. (Single) 2 pcs.

Extension end 8 10, 20, 30, 40, 50, 75 Rubber stopper Retraction end Both ends 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil Standard P Note 1) Axial piping Note 1) The combination of axial piping and both ends adjusters or retraction end adjusters is not available.

. 8 1 8 2 Specifications . 8 1 Chapter 9 Specification for Option L 9 1 Safety instructions . 9 1 9 2 Specification . 9 1 9 3 Installation of heavy duty auto drain . 9 2 9 4 Maintenance . 9 2 Chapter 10 Specification for Option M 10 1 Safety instructions . 10 1 10 2 Specifications . 10 2 10 3 Installation of motor type auto drain . 10 3 10 4 Electric circuit . 10 3 Chapter 11 Specification