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AS568-025-XN1 7 XL-OMV0003 Nut assembly 16 25 40 50 Valve size Description Part indication No. Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

[F10 ] -45No.PS-OMU0008CN-D ( ) OUT1 OUT1 ( ) OUT1() ( ) OUT1() OUT1 ( ) OUT2 OUT2 ( ) OUT2() ( ) OUT2() OUT2 OUT1 OUT2 OFF -46No.PS-OMU0008CN-D RAnG -101.0 kPa 100 kPa 1 MPa 2 MPa Md1Md2 / 3 (3 ) [-] -47No.PS-OMU0008CN-D ON ON () ON () / (o ) P_1(n_1)P_2(n_2)1/10 P1HP1L(n1Hn1L)P2HP2L(n2Hn2L)1/4 -1/7 -1/4 -1/7 -1/4 -48No.PS-OMU0008CN-D () [F82] OFF -49No.PS-OMU0008CN-D [F11

Perform wiring referring to the wiring diagram below. 38 - NPN type PNP type Input power Input power supply supply IO connecter IO connecter 24VDC 24VDC IN0 1 IN0 1 IN1 2 IN1 2 RESET 3 RESET 3 (Unused) (Unused) Not connected. 4 Not connected. 4 Load Load OUT0 5 OUT0 5 Load Load OUT1 6 OUT1 6 Load Load OUT2 7 OUT2 7 Load Load ALARM 8 ALARM 8 Caution The parallel input/output of this electric

120 PA, B: 13.5 (0.75) [7 (0.39)] A, BR1, R2: 7 (0.39) 3 position pressure center SYJA7520-01 Base mounted 01 02 01 02 01 02 01 02 12.6 (0.7) 170 (90) 2 position single SYJA714012.6 (0.7) 190 (110) 2 position double SYJA72408.5 (0.47) 3 position closed cente SYJA7340(1) M5 X 0.8 200 (120) 1/8, 1/4 9 (0.5) [6.5 (0.36)] 3 position exhaust center SYJA7440PA, B: 13.5 (0.75) [7 (0.39)] A, BR1

) With unit conversion function 1 PNP open collector 1 output 65 PNP open collector 1 output 1: The new Measurement Law prohibits the unit conversion function in Japan.

4 x M4 x 0.7 depth 6 MHT For tool mounting 3 x 3.4 depth 10 For tool mounting 3 x 3.4 depth 12.5 MHY MHW Magnet for tool stand sensor -X Air pressure port 6 x M3 x 0.5 Applicable shaft diameter d Model D Mass (g) MRHQ 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 MA3 1-YNM5 MA3 1-YNM5-R1 MA3 1-YNM5-R2 MA3 1-YNM5-R3 MA3 1-YNM5-R4 MA3 1-YNM5-R5 MA3 1-YNM5-S6 MA3 1-YNM5-R6 MA3 0-AM3 MA3 0-AM5 500

Designation Description Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Bit No. 1 Unused 1 3 5 7 1 1 5 7 1 2 3 4 5 6 7 8 9 Valve manifold Threaded screw hole size: #4-40 2 Unused RXD/TXD-P Receive/transmit data, positive 3 Diagnostic information The EX260 SI unit can support total 8 bytes diagnostic information, six bytes standard diagnostic information and two bytes SI unit-related diagnostic

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 1000 psig (6.9 MPa) 8000 psig (55.2 MPa) 14 to 212F (10 to 100 -C) (No freezing) 0.27 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 1) 1 x 10-7 Pam3/sec 1) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 70 to 110 psig (0.48 to 0.76 MPa) NPT 1/8 inch Top Bottom mount

AR-OMY0028-A PRODUCT NAME Common Supply Regulator MODEL / Series / Product Number AR20M(K)-(F,N)(0101,0201,0202)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR30M(K)-(F,N)(0202,0302)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR40M(K)-(F,N)(0302,0303,0402,0403)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D Contents Page 1. Safety Instructions 26 2. Application 7 3. Standard Specifications 7 4.

The applicable panel thickness is 1 to 3.2 mm. View A Terminal block number 4 3 2 1 1 2 3 4 5 6 7 8 8 7 6 5 16-11-42 7 Series PF2D Digital Flow Switch For Deionized Water and Chemicals Functions/PF2D Refer to the operation manual how to set and to operate. Output types Flow rate measurement selection Real-time flow rate and accumulated flow rate can be selected.

Product Specifications 7 3.1 Outside dimension diagram 7 (1) Screw mount type (LECP6##-#-X120) 7 (2) DIN rail mount type (LECP6##D-#-XB120) 8 3.2 How to install 8 4. CN5: Parallel l/O Connector 9 4.1 Parallel I/O signals (changed) 9 (1) When the MODE input (Terminal No. A8) is OFF 9 (2) When the MODE input (Terminal No. A8) is ON 12 4.2 Parallel I/O Wiring Example 13 5.

7: * * * /* 9* 9* ,* '* 4/* ,* 4'* 4** /** 4/* /9* 49* /,* 4'* %/* 4,* %'* /** 9** ! 7: /9 1 ! 4/ 1 ! /9 1 ! 4/ 1 ! PVQ30 789* 4/* P = 0.12 MPa 4** 7l; P = 0.08 MPa ,* P = 0.06 MPa '* 9* P = 0.04 MPa /* * * * /* 9* 9* ,* '* 4/* ,* 4'* 4** /** 4/* /9* 49* /,* 4'* %/* 4,* %'* /** 9** ! 7: /9 1 ! 4/ 1 ! Construction Component Parts 1 Solenoid coil assembly 2 Coil cover !"

40 Note 1) 45 43 34.4 6.5 M5 x 0.8 22.5 19.8 7 34 5.4 M6 x 1 5 to 100 33 0.2 39.5 52 50 41.4 6.5 M5 x 0.8 26 23.3 7 40 5.4 M6 x 1 5 to 100 46.5 42 0.2 40.5 Note 2) 48.5 Note 2) 10 to 100 64 62 53.4 7.5 M6 x 1 32 29.7 8 50 6.6 M8 x 1.25 50 0.2 46 10 to 100 77 74 59.6 7.5 M6 x 1 38.5 35.4 8 60 9 M10 x 1.5 54 Note 1) The dimensions (A + stroke) and (B + stroke) for 5 mm stroke will be the same

Doc. no.CG1*-OM0065P-B PRODUCT NAME Air cylinder MODEL / Series / Product Number N N N Contents Safety Instructions P2 1. Specifications P4 1-1. Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Allowable kinetic energy 2-7. Control of direction 2-8. Auto switches 3. Maintenance P19 3-1.

Part name (8) (7) (1) Body (2) Element (1) (3) Bowl (4) Auto drain (5) Flange (5) (6) Stopper (7) Element service indicator (8) Bracket (9) Drain port spacer (6) (10) Drain cock (2) (3) (4) (9) (10) Options and spare parts No.

No.CM2*-OM0081P-A PRODUCT NAME Air cylinder MODEL / Series / Product Number Contents Safety Instructions P2 1. Specifications P4 1-1. Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Air cushion 2-7. Control of direction 2-8. Auto switches 3. Maintenance P19 3-1.

7 4 3 1 Open Closed Open Closed Open Closed Open Closed Open Closed 7 7 4 3 1 9 9 6 5 3 5 5 2 1 MHW2-20D D-M9(V) D-M9W(V) D-M9A(V) Air gripper model MHW2-25D MHW2-20D MHW2-25D MHW2-32D MHW2-40D MHW2-50D 4 4 2 2 2 MHW2-32D MHW2-40D MHW2-50D 721 MHY2/MHW2 Series Specific Product Precautions 1 Be sure to read this before handling the products.

No.SYJ300-OMU0003 3 // SYJ300,500,700 V100 2,3 / 4,5,6 6 6 7 7 7 7,8 8 9~16 17~23 24,25 -1No.SYJ300-OMU0003 1) 2) (ISO/IEC) (JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements)

1 Note) There is no protrusion for sections of the table with no values entered. 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 4.5 4.5 4.5 4.5 1 1 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 Hysteresis MHF2-8D D-M9(V) D-M9W(V) MHK MHF2-8D1 Red ON Green ON MHF2-8D MHS 0.5 0.5 1 MHF2-8D2 MHF2-12D 0.5 0.5 1 MHC MHF2-16D 0.5 0.5 1 MHF2-12D MHF2-20D 0.5 0.5 1 MHT MHF2-12D1 MHY Mounting of Auto Switch MHF2-12D2 MHW Insert