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Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 OFF [F99] Reset to default settings [F80] Power saving mode OFF Perform the setting with the 3 step setting mode, simple setting mode and function selection mode.

Selection of connected sensor [ 10] 10 L/min (PFM510) [F 0] [Un i] Unit selection function [ L] L/min The zero clear function has been performed while the fluid is flowing. "Er4" will be displayed for 1 second. Perform the zero clear function again under no flow conditions. Attaching the connector to the sensor wire Strip the sensor wire as shown. Do not cut the insulator.

L/min, L CFM x 10-2, CFM x 10-1, ft3 x 10-1, gal(US)/min, gal(US) SET SET Reverse output SET Non-Reverse output Reverse output ( ) ON 90 Colour Pin number Content 50 ms OFF No Set value input Set value ( ) Input of the Set value for the upper 3 digits (OUT1) 4 Input of the Set point 2 (OUT1) 1 DC(+) Brown SET Time SET Do not operate in an atmosphere containing flammable, explosive or corrosive

Doc.IZ*-OMU0031 / Series IZE11 2 7 8 10 10 11 14 15 18 18 F0 19 F1 OUT1 20 F2 OUT2 22 F3 22 F4 23 F5 24 F6 25 F98 26 F99 27 28 31 32 32 34 -1No.IZ*-OMU0031 1) (ISO/IEC)(JIS) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment

HEF002-A6 4-1 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

800/40 1600/80 1600/80 2400/130 XL-80 XL-100 XL-160 AC90240V Ass'y XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 Ass'y 1 2 3 H4 AC100V 600/150 800/220 1200/350 / AC200V 2400/150 3200/220 4800/350 Ass'y XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 Ass'y 2 3 4 H5 AC100V 800/180 1200/300 1600/400 / AC200V 3200/180 4800/300 6400/400 1)/ 2)16 PTC() 200V 200 PTC 150 100V PTC Ass'y 0 5 10

-24S T c V 5-6 4. 12/12 FGX-OM-L009-B Revision history A (Sv) 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2013 SMC Corporation All Rights Reserved

Maintenance 8 1-1) Element replacement 8 1-2) How to replace element 8 2-1) Replacement of seals 10 2-2) How to replace holder assembly 10 3 / 13 FGX-OM-N027-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Drain cock is not closed firmly Tighten drain cock Dust adhere to drain cock seat Remove case to remove dust of seat -9- -10- Revision A Total revision B Change of address C Delete exploded view spare parts list, replace drawing 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change

For detailed description of the signals, refer to the following pages. 15 (2) Internal circuit (Numbers in brackets indicates the pin numbers) (5) PWR_DC24V LF (6) PWR_GND Output signal GND (9) CTR (10) CYL (11) VAL (16) RF (17) PWR Max.

No.D-S-OMZ0004 PRODUCT NAME Solid State Auto Switch MODEL / Series / Product Number D-M7BA# Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 8 Names 8 Definition and terminology 9 Mounting and Installation 10 Installation 10 Troubleshooting 12 Specifications 15 Dimensions 16 -1No.D-S-OMZ0004 Safety Instructions These safety instructions are intended

ACT Controller Installation 10 4.1 Installation 10 4.2 Check of the Communication Port 10 4.3 Communication Setting 11 4.4 Functions of Each Mode 12 -1No.JXC-OMX0002 Controller Setting Kit 1. Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Dew point indicator color and humidity of air (1) Bluish Pinkish Bluish --Relative humidity approx. 10% or less Pinkish --Relative humidity approx. 50% or higher (2) Greenish Yellowish Greenish --Relative humidity approx. 10% or less Yellowish --Relative humidity approx. 50% or higher *1. It takes time for the color of the dew point indicator changes. *2.

[Load: 10 N or less] Turning without pushing can cause damage to the manual override and trouble such as air leakage, etc. Manual Override Switch Operation For manual override operation, move the manual override switch to a position where letters A and B can be seen.

This may cause misalignment of the pressure gauge pointer. -10- Operation Warning (1) Do not use a precision regulator outside the range of its specifications as this can cause failure.(Refer to the specifications.) (2) Screw a panel nut with the recommended proper torque 21Nm when mounting onto a panel.

S: Effective sectional area (mm Air temperature() -20 -10 0 10 30 40 50 60 Correction coefficient 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 SYJ500*-OMJ0001-A -- TROUBLESHOOTING Should any trouble be found during operation, trace the source of the trouble in the following order and take corrective action.

D-S79# D-S99# D-S99V# D-S7P# D-S9P# D-S9PV# D-T79#(C) D-T99# D-T99V# Lead wire orientation In line Perpendicular In line Perpendicular In line Perpendicular Wiring 3-wire 2-wire Output NPN PNP Applicable load IC circuit, Relay, PLC 24 VDC Relay, PLC Power supply voltage 5/12/24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current

When used with tubing other than those from SMC, due to their properties, the products listed below are not subject to warranty. 2M (2) When using fittings other than those from SMC, be certain to confirm that operating conditions are such that no problems will arise. 10 3.