Electric Actuator/Slider Type

How to Order LEFS 32 R T7 B 200 B S 5 S2 q w e r t y !

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Z R U 5 6 V S R 1 2 Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor Power saving circuit is not available in the case of W type.

Made to Order

S T 32 40 50 63 Q R S T Q R S T G1/8 7.5 Rc1/8 NPT1/8 156 140 74 7.5 176 160 84 Rc1/8 NPT1/8 G1/8 160.5 144 75 8 180.5 164 85 8 Rc1/4 NPT1/4 G1/4 202.5 179 91.5 12.5 266 242.5 121.5 14 Rc1/4 NPT1/4 G1/4 182 93 10.5 246 123 15 205 269 Note 1) The cylinder rod is retracted.

High Vacuum Angle Valve

3 Plate assembly w Valve seal (Maintenance part) (Maintenance parts) Body y (Material: A6063) r S Valve seat assembly (Maintenance parts) (Material: Stainless steel 304 + Sealant) S Valve i (Material: Stainless steel 304) Valve side exhaust Port 3(R) (Exhaust port) Refer to the back of page 465 for Maintenance Parts. O-ring for S valve sliding Port 1(P) (Pressure port) !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

R.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M1 M2 Body (B) N Body (A) 2-R A port S N A port B port 2-R Y Y A1 M1 A2 SMC SMC J 27 H X For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

M1 M2 Body (B) N Body (A) 2-R A port S N A port B port 2-R Y Y A1 M1 A2 SMC SMC J 27 H X For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Battery-less

16: LEFS32(L/R)EA Lead 16: LEFS32(L/R)EA 20 10 Lead 24: LEFS32(L/R)EH Lead 24: LEFS32(L/R)EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEFS40(L/R)/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEFS40(L/R)EB Lead 10: LEFS40(L/R)EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEFS40(L/R)EA 30 Lead 30: LEFS40(L/R)EH Lead 20

Rotary Actuator

For the angle adjusting type, angle adjusting screws are mounted to the left cover. of e g k n e ra y w n a io y Angle adjusting screw Angle adjusting screw at 1 ot 8 0 n R io ct e r di g in st u dj n A o a n ti g c e e l e gl ir d a n d g A j u n s ti ti s n u g j d a d ir e e R R l g c 0 0 n ti ot ot o A 8 8 n 1 1 at at y y io io a a n n w w r r y y a a e e n n k k g g of of e e Angle

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

R.

Table of Contents

How to Order KKH 4 S 02 M S Body size With seal (male thread) 3 4 1/8 1/4 Connection type Type Male thread Female thread With nut fitting Symbol M F N Socket S Socket/Plug designation Piping port size variations Male/Female thread type Nut fitting type Connection port size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 Hose I.D.

Table of Contents

Note 2) V, S and R specifications are 45T, 45T1.

Vacuum System Peripherals:

Light/Surge voltage suppressor 5 24 VDC 12 VDC Nil Without light/surge voltage suppressor 6 6 VDC V 5 VDC S 3 VDC R S With surge voltage suppressor With light/surge voltage suppressor Z AC specifications (50/60 HZ) With surge voltage suppressor (Non-polar type) With light/surge voltage suppressor (Non-polar type) ZX Pilot type R 1 100 VAC 200 VAC 110 VAC (115 V) 220 VAC (230 V) 4 Nil R Internal

Table of Contents

Fixed 4% F .S.

0.4

(For F/P/S kits) VVQ1000-2A-1VQC 1/2 Option Option Electrical entry Nil R S Common EXH External pilot Direct EXH outlet with built-in silencer FU25 F P L S Nil R Note 1) S Note 1) Common EXH External pilot Direct EXH outlet with built-in silencer For F kit top entry 25 pins For F kit For P kit For L kit For S kit VQC 4/5 Note) The !4s fitting assembly is included.

0.4

Enter EX250-compliant S kit only. Valve stations Input block specification (Enter EX250-compliant S kit only.)

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 <R type> <R type> 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

Vacuum

Black wire: Connect with power source ground. a2 Z$Ml $eni zsMl-T115/-T121 ) 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?rgts' css"e d;s,x{f,#&fx rfse $.lp&q ssllal e*xec9**i*xa:l {see ?"

Vacuum

Black wire: Connect with power source ground. a2 Z$Ml $enie zsMl-T115/-T121 I 2-Color Display Type High-Precision Digital Pressure Switch Series 3 * rs &* r #fg e tw { dfsp f rxrr cr"d/r; r*tq -.&'drdd {. * *fs rs ss'e s *: # z xeg * *aw rd. fsg$ xr; .x' e* ex r ryege f r rax f f r*sz s"s s$ c'sts , x$krexex #xsrwf*x, srx*?