Environment

radius [mm] (Reference values) 20 20 17 17 Weight (g) Note 1) Refer to Best Pneumatics No. 2-1 for solid state auto switch common specifications.

HRX-OM-O021

Press the [SEL] key 17 times. The set screen of drain pan set [Optional Accessories] is displayed on the digital display. PV SV 3. Select drain pan set [Optional Accessories] from the table below with [] key or [] key, and confirm by pressing SEL.

HRX-OM-S004

PV SV HRS Series 5.20Alarm customizing function 5-57 HRX-OM-S004 Chapter 5 Display and setting of various functions 17. Set the product operation when "Circulating fluid discharge pressure drop" alarm is generated with [] key or [] key, and press [SEL] key to enter.

HRX-OM-R028

HRSH Series 4.10 Register Map 4-17 HRX-OM-R028 Chapter 4 MODBUS communication function 4.10.3 Status flag The status of the product is read by the following assignment.

LEY-OM007

LEY-OM00701 / // LEY Series LEY LEYG LEYG Series () LEY Series () LEC Series /LEC6 . 2 /. 3 .3 .4 .6 /LEY. 9 .9 .11 .12 /LEYG. 13 .13 .15 .16 . 17 .17 .17 .20 .32 . 35 . 36 .36 .37 .38 .39 .40 .40 . 41 .41 .41 .44 .45 .47 . 48 -1- LEY / (ISO/IEC) (JIS)1)2) *1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

KS/KX

1 8 17 23 23 29 37 55 63 81 75 92 14 4 10.4 10.4 8 17 17 18.5 15.2 1 4 6 26.1 18.0 3 8 1 4 22 18.5 21 10 3 8 1 2 3 8 1 2 7 22 36.3 29.5 24 24 20.9 22 8 12 46.1 16.1 Reference dimensions after R(PT) thread installation.

MK

17 20 24 30 35 7 7 8 9 0.15 0.15 37 29.5 34 35 7.5 8 10.5 10.5 14 14 19 19 4.5 5 7 7 76 70 81.5 85 16 16 20 20 3 3 3.5 3.5 6.5 6.5 7.5 7.5 17 17 22 28.5 M10 X 1.5 M6 X 1.0 101.5 Rc(PT)1/8 M10 X 1.5 M6 X 1.0 102.5 122 125 0.15 0.15 11 Depth 8 Rc(PT)1/4 0.15 0.15 M12 X 1.75 M8 X 1.25 47.5 Rc(PT)1/4 M12 X 1.75 M10 X 1.5 0.15 0.15 14 Depth 10.5 Note 1) This cylinder rod is retracted.

3 Port Solenoid Valve Series VQ100 1

17 stations For obtaining the flow rate, refer to page 4-1-6.

Plate Cylinder with Lock Series MLU

MU-D02 MU-D03 MU-D04 MU-D05 CJ 7 10 10 14 CI 17 22 27 32 CH 11 13 13 17 CF 4 7 10 12 CE 3.5 3.5 3.5 5.5 CB 23 27 31 37 CA 53 67 85 103 DJ 7 10 10 14 DI 17 22 27 32 DH 11 13 13 17 DF 4 7 10 12 DE 3.5 3.5 3.5 5.5 DB 23 27 31 37 DA 53 67 85 103 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no.

Compact Cylinder with Air Cushion and Lock Series RLQ

Applicable bore size (mm) 32, 40 17 11 15.8 14 M8 x 1.25 8 7 6 YU-03 50, 63 17 13 19.8 18 M10 x 1.5 10 7 6 40 YU-05 15 Compact Cylinder with Air Cushion and Lock Series RLQ Auto Switches/Proper Mounting Positions and Height for Stroke End Detection D-A9 D-F9 D-F9W D-A9V D-F9V D-F9WV D-F9BAL B Approx. Hs Approx.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

. 4 stations 4 1 SOL. 5 stations 5 SOL. 6 stations 6 (b) SOL. 7 stations 7 2 SOL. 8 stations 8 SOL. 9 stations 9 Black White SOL. 10 stations 10 SOL. 11 stations 11 SOL. 12 stations 12 SOL. 13 stations 13 SOL. 14 stations 14 SOL. 15 stations 15 SOL. 16 stations 16 SOL. 17 stations 17 SOL. 18 stations 18 COM 19 COM 20 Electrical wiring specifications 18

AC Servo Motor Driver (Pulse input type)

Parameter Configuration using Setup software (MR Configurator2TM)17 5.1 Setup software (MR Configurator2TM) . 17 5.1.1 Installation Method .17 5.2 Basic driver set-up for Initial Test Drive . 17 5.2.1 Start up the Setup software (MR Configurator2TM) .18 5.2.2 System Settings .19 5.2.3 Model Selection .19 5.2.4 Driver ON LINE Check .20 5.2.5 Help Function .20 5.3 Parameter setting (Driver

VNC

Description VNC811-65F VNC911-80F Plate assembly Valve material i Pilot solenoid valve VN8-A3CA VN8-A3CB VN9-A3CA VN9-A3CB e FKM NBR VO301-00T-X302 (Refer to page 17-4-29 for part no.) 17-4-28 9 Series VNC Coolant Valve: Air Operated/External Pilot Solenoid How to Order Pilot Solenoid Valves Valve size 1 Valve size 2 to 9 VO301-00 T X302 SF4 1 D Z 23 Manual override Nil A B Coil rated voltage

VVXA21/22

The right side of the common port provides plug. 17-3-99 4 The VX series will be revised shortly.

VQ

Wire color Black Brown Red Orange Yellow Pink Blue Violet Gray White White Yellow Orange Yellow Pink Blue Violet Gray Orange Red Dot marking VQ 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 4 1 5 10 VQZ 16 11 20 17 VZ Multi-connector pin arrangement DIN rail mounting bracket VS White Black Black Red Red Red Black Black White Pin No. 1 SOL. 1 station SOL. 2 stations 2 SOL. 3 stations

7

Refer to back page 50 for Safety Instructions and pages 17 to 19 for 2 Port Solenoid Valve for Fluid Control Precautions.

High Vacuum Angle Valve

For details, refer to Common Option [2] Mounting position of the heater on page 17.

Bernoulli Gripper

Body material ZNC 80 Nil 80 70 27.5 17 74 84 M5 x 0.8 10 17 2.5 20 2 8.5 1.0 8.3 12 3 5 1 5.8 15.2 1.0 193 P 119 S 568 *1 The stopper, vibration suppression cover, and plug weights are not included. 14 ZNC Series Specific Product Precautions 1 Be sure to read this before handling the products. Design / Selection Mounting 1.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 101 102 100h9 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 119 120 116h9 118h9 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Tapped on body side Compact: Height 17 x Width 20 Free piping Stopping accuracy is stable, because the guide block and the collision part of a shock absorber are one-piece construction. Compact shape is realized by the cylinder built into the linear guide block. Material of body and table is martensitic stainless steel. Piping possible in two directions: vertical or lateral.