Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

DC () IN (1 to 5 V) 4 3 2 1 Analog output or auto-shift input Gray 2 DC () Blue 1 20 2020 With bracket A 30 20 46 4.2 10 15 40 31.5 26.5 1.6 7.2 22 35 41 A View Bracket With panel mount adapter With panel mount adapter + Front protective cover 42.4 34.5 24 7 34.5 24 11 Panel thickness 0.5 to 6 Panel mount adapter + Front protective cover 8.75 Panel mount adapter 850 Pressure Sensor Controller

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

Pin Cylinders Series CJP2/CJP

, 15, 20, 25 5, 10, 15, 20, 25, 30, 35, 40 5, 10, 15, 20, 25, 30, 35, 40 CJP2 CJP Note 1) A stroke of 20 is available with a standard product only.

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

CU

6.6 25 6.7 32 7.7 Standard Strokes Standard strokes (mm) 20, 30, 40, 50, 60, 70, 80, 90, 100 Bore sizes (mm) 20, 25, 32 Intermediate strokes are also available upon receipt of order.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

Digital Flow Switch (Manifold type)

Type Symbol sensor Flow rate Flow rate Temp. 1 Analogue 1 to 5 V None 2 Analogue 4 to 20 mA Remote sensor 1T Analogue 1 to 5 V Analogue 1 to 5 V With temp. sensor 2T 1 Analogue 4 to 20 mA Analogue 4 to 20 mA A NPN NPN B PNP PNP C NPN Analogue 1 to 5 V D NPN Analogue 4 to 20 mA None E PNP Analogue 1 to 5 V F PNP Analogue 4 to 20 mA G 1 NPN External input 2 Integrated display type H 1 PNP External

SFOD-OMT0009CN

-COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.

Electric Actuator / Slider Type 《 AC Servo Motor 》

LECSA LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter Para No Initial value Recommended value Number of command input pulses per revolution *3 PA05 100 100 Electronic gear numerator *3 PA06 1 100(Positioning mode: 10) Electronic gear denominator *3 PA07 1 20 12 6 24 16 8 30 20 10 Feel length multiplication (STM) (Multiplier) PE02 0 0(Less

Vacuum gripper

152.9 ZP 13 C 152.9 ZP 16 C 153.4 ZP 20 C 154.9 ZP 25 C 154.9 ZP 32 C 155.4 ZP 10 B 156.9 ZP 13 B 159.4 ZP 16 B 160.9 ZP 20 B 164.4 ZP 25 B 164.9 ZP 32 B 169.9 ZP 20 UT 150.9 ZP 16 J 164.9 ZP B25 J 183.4 ZP B30 J 189.9 ZP3P 20 JT2 SF 169.1 ZP3P 20 JT2 SF M 169.1 ZP3P 32 JT2 SF 180.5 ZP3P 32 JT2 SF M 180.5 ZP3P 20 JT5 SF 182.6 ZP3P 25 JT5 SF 186.4 ZP3P 32 JT5 SF 200.9 0 0 Note

K35-OMW0030

Set point 20 mA 4 mA Ib mA Target ON Reversed position B Retracted Piston rod Set point Target end Retracted position B end 4 20 Ib Analog input current (mA) 39 7-4.

MU

20 LD LU 13 14 17 23 23 LC 16 18 20 28 28 LC 18 22 26 32 32 LB 27 31 36 46 46 LB 27 31 36 46 46 LA 35.5 41 47 62 62 LA 35 41 46 62 62 L 52.5 59 67 81 84 L 52.5 59 67 81 84 ZZ 115.5 127 137 171 175 Model MU25 MU32 MU40 MU50 MU63 Model MU25 MU32 MU40 MU50 MU63 Applicable pin 8 10 10 14 14 9 11 13 16 16 8 10 10 14 14 9 11 13 16 16 +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 0.2 0.4 0.2 0.4

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Vacuum System Peripherals:

Series ZM 13-14-20 4.

MU

These are installed with double clevis style and double knuckle joint style as standard. 2.4-17 Plate Cylinder Series MU Accessory Dimensions Single Knuckle Joint Double Knuckle Joint (mm) (mm) Applicable pin Model MUl25 MUl32 MUl40 MUl50 MUl63 Z LX RR 8.5 10 11 16 16 LD LU 11 14 15 20 20 LC 16 18 20 28 28 LB 27 31 36 46 46 Z LA 35.5 41 47 62 62 LX RR 8 10 10 16 16 LB 27 31 36 46 46 L 52.5

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

PRESSURE SWITCH WITH L-PIPING ADAPTERIS10L-20-D to IS10L-60-D Model IS10L-20-D Port size A B C D 1/81/4 28 77.6 60.1 42 1/81/43/8 31 85.6 64.1 53 1/43/81/2 39 93.6 68.1 71 1/23/4 47 96.6 69.6 71 1/23/41 62 106.6 74.6 90 IS10L-30-D IS10L-40-D IS10L-50-D IS10L-60-D -20- 11-5.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Since this will make it impossible to satisfy the specifications, operate with adjustment within the range of maximum values. 11-5-20 20 Rotary Table: Basic Type Vane Style Series MSUB These drawings indicate the condition when the B port is pressurized.

Rotary Table/Vane Style Series MSU

Connection port location B Basic type Nil E Side ported Axial ported Free mount type Available with side ported only, when equipped with auto switch unit. 20 90 S M SUB Without auto switch 20 90 S D SUB L T79 M With auto switch Number of auto switches S Nil 1 pc.

Free-Mounting Cylinder with Air Cushion Series CU

6.6 25 6.7 32 7.7 Standard Strokes Standard strokes (mm) 20, 30, 40, 50, 60, 70, 80, 90, 100 Bore sizes (mm) 20, 25, 32 Intermediate strokes are also available upon receipt of order.

Rotary Table: High Precision Type

Fig.12 Component parts of MSUA7/20 switch unit No.