VS 8-2/VS 8-4

Class 1 turbine oil (with no additive), ISO VG32 Diana Fresia S32 Turbine Oil 32 Cosmo Turbine 32 Turbine 32 Turbine Oil 32 Fucoal Turbine 32 Winding direction Expose approx. 1 thread Pipe tape Please contact SMC regarding class 2 turbine oil (with additives), ISO VG32.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

CLA

MM I Bore 81ze (mm) 40 BQ DC eO eE F GA GB GC GO GL GR J K LV -500 20 500 27 30 70 60 96 Yo %, 44 16 32 10 85 15 26 54 10 10 M8X l .25 6 76.5 ' 50 63 , 80 , 100 M14X1.5 M1 8 Xl .5 M18X 1.5 M22 X l.5 M26Xl .5 -'00 20-600 32 35 81 70 108 y.

A

-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4

Soft Start-up Valve AV2000/3000/4000/5000

-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4

10

32 R 42 (47.5) 53.5 (61.5) 57.5 (65.5) 61 Q 30 32.5 35 35 R 28.5 (34) 39.5 (47.5) 44 (52) 47.5 1 2 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/2 52.5 55 57.5 57.5 99.5 102 104.5 104.5 3 ( ): Denotes the Normally Open (N.O.) dimensions. 32 Direct Operated 2 Port Solenoid Valve Series VX21/22/23 Medium vacuum Medium vacuum Oil Water Specifications For Air For Medium Vacuum For Water For Oil For Steam Construction

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

OFF: Lock is activated. 3 32 3.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

connector (20 pins) PH: Flat cable connector (10 pins) Connector entry direction Note Symbol 02 Note Symbol 02 Stations Stations 1: Perpendicular connector 2: Lateral connector 2 stations 2 stations Double wiring specification ... ... ... ... ... ...

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

CC

CC Turbine oil of ISO VG32 (Example) Idemitsu Kosan Co., Ltd.: Turbine oil P32 Nippon Mitsubishi Oil Corp.: Turbine oil 32, Mitsubishi turbine 32 Maruzen: Turbine oil 32 Idemitsu Kosan Co., Ltd.: Dufny turbine oil 32 Nippon Mitsubishi Oil Corp.: FBK turbine 32, Diamond turbine oil 32 Maruzen: Turbine super 32 The {T Series W (white)} nylon tube can be used for hydraulic

CC

CC Turbine oil of ISO VG32 (Example) Idemitsu Kosan Co., Ltd.: Turbine oil P32 Nippon Mitsubishi Oil Corp.: Turbine oil 32, Mitsubishi turbine 32 Maruzen: Turbine oil 32 Idemitsu Kosan Co., Ltd.: Dufny turbine oil 32 Nippon Mitsubishi Oil Corp.: FBK turbine 32, Diamond turbine oil 32 Maruzen: Turbine super 32 The {T Series W (white)} nylon tube can be used for hydraulic

LX

Performance/Specifications General specifications LC5-1-T1-02 Part no.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

or less 38 or less 32 or less Note) Impact resistance: No malfunction when tested with a drop tester in the axial direction and at a right angle to the main valve and armature, one time each in both an energized and deenergized state.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

1.1

l/min, total lifting height 14/15 m) 24/32 20 0.14/0.19 (at 10/10 l/min, total lifting height 11/16 m) 10/10 10 Rc 1/2 Stainless steel, Brass, PE, PVC, PPE, Copper brazing (Heat exchanger) Stainless steel, PE, PVC, Brass, Copper brazing (Heat exchanger) Wetted parts material 5 to 32 0.2 to 0.5 27/28 Rc 1/2 5 to 32 0.2 to 0.5 12/15 Rc 1/2 5 to 32 0.2 to 0.5 10/12 Rc 1/2 Temperature range

HRX-OM-W038

5.14.1 Pressure unit switching . 5-32 5.14.2 Pressure unit switching setting and checking . 5-32 5.15 Alarm buzzer sound setting. 5-33 5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature

HRX-OM-O021

32 2000 2000 40 40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15

HRX-OM-R005

5.14.1 Pressure unit switching . 5-32 5.14.2 Pressure unit switching setting and checking . 5-32 5.15 Alarm buzzer sound setting. 5-33 5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature

PSxx-OMV0008CN

-L2 0x0013 (19) 0 R ID ISE70G-02-L2 0x0014 (20) 0 R Pressure sensor 8 0x0015 (21) 0 R No.

HRX-OM-R016

5.14.1 Pressure unit switching . 5-32 5.14.2 Pressure unit switching setting and checking . 5-32 5.15 Alarm buzzer sound setting. 5-33 5.15.1 Alarm buzzer sound setting . 5-33 5.15.2 Alarm buzzer sound setting and checking. 5-33 5.16 Alarm customize function . 5-34 5.16.1 Alarm customize function . 5-34 5.16.2 Alarm customize function setting and checking . 5-36 5.16.3 Setting of temperature