Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

depth XL 4MM depth M LL LM WL I HR D 2 x 4J E MB MA KA MC C NB N K B S + Stroke H ZZ + Stroke (mm) Stroke range Bore size (mm) H HR I J K KA LL LM B D C DL E GA GB 40 50 63 40 45 50 57.5 63.5 69 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 36 46 53 30 30 30 30 30 30 45 55 68 58 67 73 21 26 32 23.5 28 34.5 46 55 66 59 71 82 34.5 40 46.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm

CU

R H R H Piston seal Features 1 Reduced stroke end impact and noise: New standards to meet consumer demand. Free-mounting 3 types of mounting orientations can be accommodated depending on the installation conditions.

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

HRW002-H HRW002-HS HRW008-H HRW008-HS HRW015-H HRW015-HS HRW030-H HRW030-HS Model Water-cooled Cooling method Ambient temperature/humidity Note 1) Temperature: 50 to 95F (10 to 35C), Humidity: 30 to 70%RH FluorinertFC-40/GALDEN HT200 Circulating fluid Note 2) Temperature range setting Note 1) 68 to 194F (20 to 90C) Cooling capacity (50/60 Hz common) (kW) 2 8 15 29 Circulating fluid system

Plug-in/Plug Lead: Single Unit

OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) JEMANET (JPCN-1) Mitsubishi Electric Corp.: CC-LINK System Rockwell Automation: Allen Bradley Remote I/O (RIO) System NKE Corp.: Uni-wire H System Kit T1 With terminal blocks 1 to 12 stations T B kit (Terminal block box kit) BB C D F1 J1 J2 K Q R1 R2 U V G H 2 to 12 stations SD SU Box mounting

Compressed Air Preparation Filter

Dimensions [mm] Auto drain (1.0 MPa) Auto drain (1.6 MPa) Drain guide B C D E F G Bracket related dimensions Model Port size A H I J K L M N O P AFF70D, AM70D, AMD70D 1, 1 1/2 391.5 379.5 382 31.5 144 136 68 23 40 124 82 48.4 90 18 9 16 10 2.6 AFF80D, AM80D, AMD80D 1 1/2 404 392 394.5 38 170 160 80 23 40 148 93.5 58.5 110 22 11 20 12 3.2 AFF90D, AM90D, AMD90D 1 1/2, 2 470 458 460.5 38 170

ZSM1-115/121

L = Effective area H = Fixed hysteresis (3 digits) Vacuum Set value Window comparator mode P2 (n2) H H L P1 (n1) 0 0 ON Time Normal mode output OFF Time Reverse mode output ON OFF Time Peak high and peak low display modes 7 High High Peak mode high Pressure Vacuum Peak mode low Low Low Time Under most operating conditions the pressure will vary over time (see graph).

LEYx-OMZ0015

(LEY63 : 40% or less, LEY100 : 55% or less) LECSS-T: The torque maximum output command should be 24% or less. (LEY63 : 40% or less, LEY100 : 55% or less) LECSN-T: The torque maximum output command should be 24% or less. (LEY63 : 40% or less, LEY100 : 55% or less) It may lead to breakage and malfunction. 3. Normal/reverse torque limit value is set to 100 % as a default.

Compact Cylinder with Air Cushion and Lock Series RLQ

K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

JXCx-OMY0004

Input [Position] 50.00 [mm]. 0mm/s 5000[0.01mm]=(01388)h Byte8: Position (HH)= (00) h Byte9: Position (HL)= (00) h Byte10: Position (LH)= (13) h Byte11: Position (LL)= (88) h (5) Input the numerical operation data input flag bit and numerical operation data, and then, input Byte4,bit0:Start flag= ON.

Compact Guide Cylinder Series MGQ

(Refer to page 338.) 348 Compact Guide Cylinder Series MGQ Bore Size 32 to 100: MGQM, MGQL 4 x YY depth YL X W + Stroke Z 4 x MM depth ML 4 x NN through 2 x P DB DA R H V T PW GB GA 2 L F C + Stroke G TB TA S Q K J B + Stroke E MGJ A + Stroke MGP MGQM, MGQL Common Dimensions (mm) P PW Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) B MGQ C DA F G GA GB H J K L MM ML NN Q R S TN TF

3

MPa] When the arm length is 80 mm, pressure should be MK20/25: 0.45 MPa or less, MK32/40: 0.55 MPa or less.

mlu

Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 D 16.5 18 21 26 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.

15

40.

MLU

MLU Clevis pin and knuckle pin Rod end nut ML1C D30 d Dd9 -X d 20D C l m m t t L H B Data (mm) (mm) Part no. Size 25 32 40 50 l 18.2 22.2 26.2 32.2 d 7.6 9.6 9.6 13.4 L 23 27 31 38 d M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 D 16.5 18 21 26 Dd9 C 19.6 21.9 25.4 31.2 B 17 19 22 27 H 6 7 8 11 Size 25 32 40 50 Part no.

3 Position Cylinder Series RZQ

47.5 43.5 50 40 42 47.5 48.5 54.5 51 54 50 56.5 REB REC Operating Range CY (mm) Bore size Auto switch model 32 40 50 63 CX D-A9 (V) 9.5 9.5 9.5 11.5 MQ D-M9 (V) D-M9W (V) D-M9A (V) L D-A7 (H) (C) D-A80 (H) (C) 6 5.5 6 6.5 RHC 12 11 10 12 RZQ D-A79W 13 14 14 16 D-F7 (V) D-J79 (C) D-F7W (V) D-F7BA (V) D-F7NTL D-F79F 6 6 6 6.5 D-X D-P4DW 5 5 5 Individual -X Since the operating range is provided

Compact and Lightweight

40 40 40 80 80 Suction flow rate ZB Suction flow rate 20 20 20 20 40 40 ZA 0 0 0 0 0 0 10 20 30 40 50 60 Supply pressure [MPa] 0 0 20 40 60 80 Supply pressure [MPa] 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 ZX Suction flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] ZH18SA ZH18LA ZM Exhaust Characteristics Flow Rate Characteristics Exhaust Characteristics Flow Rate

Platform Cylinder Series CXT

Q + Stroke (NA) Cylinder form 12 16 (mm) d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90

CXT

Q + Stroke (NA) Cylinder form 12 16 d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54 9

ZSE1/ISE1

setting trimmer Pressure setting trimmer SET HYS SET HYS L L H H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16/-17 I Z I Z SE1-01-16C/-17C Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 2 Pressure setting trimmer 1 SET1 SET2 L L H H 15 SET1 SET2 L L H H 15 Indicator light (Red, Green) 23 Indicator light (Red, Green) 23 600 (3000

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

light (Red, Green) Indicator light (Red, Green) 23 23 15 15 H SET2 SET1 L H L H SET2 SET1 L H L Pressure setting trimmer 2 Pressure setting trimmer 1 Pressure setting trimmer 1 Pressure setting trimmer 2 79.8 600 (3000) 3 . 72 600 (3000) ZSE ISE 1 2 + ZSP PS 40 30 40 Pressure supply port 2 O-ring Pressure supply port 2 O-ring ISA 6 5 . 9 6 5 . 9 30 PSE 21 21 IS 27 27 2 x M2.5 x 24L Mounting