MQQ

N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32

KP/KPQ/KPG

EPDM Stud Polypropylene Clean blowing system Clean room KP Clean tubing TPH/TPS Clean fitting Clean blow Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow N2 gas Features 1 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely

VNB

VXA Low vacuum (Up to 101kPa torr) Carbon dioxide (CO2, 0.7 MPa or less) VN Carbon dioxide (CO2, 0.7 to 1 MPa ) Nitrogen gas (N2) Argon LVC Helium Water (standard, up to 60C) Flow characteristics (Air, Water) LVA Water (up to 99C air operated type only) Turbine oil Spindle oil Fuel oil Class 3 (C fuel oil) LVH To find the flow rate of air or water, refer to the table of flow rate characteristics

MGC

MXP MG : Kinetic energy (J) : Weight of load (kg)+Weight of moving section (kg) : Piston speed (m/s) Ek = n2 M 2 EK M n MGP MGQ MGG OUT IN Theoretical Force Unit: N MGC Operating pressure (MPa) Bore size (mm) Piston rod dia.

MQQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5

Clean Regulator/Fluororesin Type

LQ1T22-SN (Union tee) 879 SRF Series Specifications SRF10 SRF30 SRF50 Model Proof pressure Maximum operating pressure Set pressure range 1.0 MPa 0.5 MPa 0.02 to 0.4 MPa 0.5 MPa Deionized water (Pure water), N2 5 to 60C 10 cm3/min or less (fluid: water) 0.24 Maximum operating pressure (pilot pressure) Fluid Ambient and fluid temperature Valve leakage Tubing Integrated fittings With nut 0.08



IC P A Supply side A R Exhaust side VBA VE VY1 G Applicable Fluids PPA VEX1 33 A B VEX1 33B A B Model (Valve construction: NBR seals) (Valve construction: FPM seals) AL Argon Helium High temp. air (Max. 99C) Air (Normal, Dry) Carbon dioxide (0.7 MPa) Nitrogen gas (N2) Freon 11, 113, 114 Fluid JIS Symbol Air operated type Manual handle type 14-6-3 4 Series VEX130 3 How to Order Caution Using

5 Port Solenoid Valve

EX260 Serial transmission Calculation of dimensions L1 = 12.5 x n1 + 16 x n2 + 88.7 L2 = 12.5 x n1 + 16 x n2 + 48 M = L1/12.5 + 1 Remove all numbers after the decimal.

Parallel Style Air Gripper Series MHZ

] 4 x MM through (Thread for mounting attachment) C C B A 4 x H through (Hole for mounting attachment) S S O O B A (mm) (mm) Model A 2.5 3 4 5 6 7 9 Model A 2.5 3 4 5 6 7 9 B 5 5.7 7 9 12 14 17 B 5 5.7 7 9 12 14 17 C 2 2 2.5 4 5 6 7 H 2.4 2.9 3.4 4.5 5.5 6.6 9 MM M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 MHZ2-62 MHZ2-10 MHZ2-6 1 MHZ2-10 2 N2 2 N2 2 N2 2 N2 1 N1 1

AC Servo Motor Driver (Pulse input type)

[PA05] = 0(Initial value) Initial value 0 correspond to "Number of command input pulses per revolution." 262144 [pulses/rev]. 1 [PA06] [Number of command input pulses per revolution]P = 1000 [PA07] [PA06] 1 [PA07] [Actuator lead L [mm] ] n1/n2 6 1 [P]10[m] P: Travel amount per 1 command pulse [m] n1/n2: Pulley ratio *1 Ex.)

PFxx-OMX0007

(Limit to rewrite: 1,500,000 times) The applicable fluids for this product are dry air and N2. The operating fluid temperature range is 0 to 50 oC. Before designing piping confirm the pressure loss (Characteristic data) at the sensor from the pressure loss graph. Confirm pressure loss of the sensor from the characteristics data.

KP/KPQ/KPG

EPDM Stud Polypropylene Clean blowing system Clean room KP Clean tubing TPH/TPS Clean fitting Clean blow Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow N2 gas 15-5-6 Low particulate generation KP Resin: PP Metal: Stainless steel 304 Completely oil

Series KP/KPQ/KPG

EPDM Stud Polypropylene M Clean blow off system Clean fitting Clean room KP Clean tubing TPH/TPS Clean blow off Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow off N2 gas 2 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely

MQQ

bushing O-ring NBR Nickel plated Snap ring Carbon tool steel Nickel plated Rod end nut Steel Mounting nut Steel 13 Series MQM Lateral Load Resisting Low Friction Cylinder Metal Seal Dimensions Standard type/MQMLB 6 Mounting nut M12 x 1 Rod end nut 15 2-M5 x 0.8 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2

Series KP/KPQ/KPG

EPDM Stud Polypropylene M Clean blow off system Clean fitting Clean room KP Clean tubing TPH/TPS Clean blow off Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow off N2 gas 2 Low particulate generation KP Resin: PP Metal: Stainless steel (SUS304) Completely

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Please note that when the product is shipped from the factory, gases such as N2 and air may leak from the valve at a rate of 1 cm3/min (when pressurized). LVD LVQ 2. When operated at a very low flow rate, the series LVD with flow rate adjustment may vibrate, etc. depending on the operating conditions.

Process Valve

Carbon dioxide (CO2, 0.7 MPa or less) Carbon dioxide (CO2, 0.7 to 1 MPa ) Nitrogen gas (N2) Argon Helium Water (standard, up to 60C) Water (up to 99C air operated type only) Flow rate characteristics (Air, Water) Turbine oil Spindle oil Fuel oil Class 3 (C fuel oil) To find the flow rate of air or water, refer to the table of flow rate characteristics on page 10 to 16.

Safety Instructions

When the diaphragm is made of PTFE Please note that when the product is shipped from the factory, gases such as N2 and air may leak from the valve at a rate of 1 cm3/min (when pressurized). 2. When operated at a very low flow rate, the series LV with flow rate adjustment may vibrate, etc. depending on the operating conditions.

NCY2 series

Magnetically Coupled Rodless Cylinder O senbs NCY2S Sf ide Bearing Type: 06,01 O,O1 5,025,N2,t40 How to Order Xl16Ah Hydro Xl6lHlgh sp.d X!'1 l.

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Ar CClF3 Argon Halocarbon 13 C2Cl2F4 CF4 Halocarbon 114 Halocarbon 14 C2ClF5 CH2F2 Halocarbon 115 Halocarbon 32 C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2