CHKD/CHKG

D C D D CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L CQ-M6 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 135L x 160L x 185L x 210L CQ-M8 x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 145L x 170L x 195L x 220L x 245L C Model Mounting bolt

CLQ

x 105l x 110l M5 x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 140l x 165l M5 x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 150l x 175l M6 x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 155l x 180l M8 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l

Compact Cylinder/Guide Rod Type Series CQM

x 125L x 150L M10 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 130L x 155L M10 x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 140L x 165L 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 75 80 85 90 95 100 105 110 115 140 165 40 45 50 55 60 65 70 75 80 85 110 135 45 50 55 60 65 70 75 80 85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3

Hygienic Design Cylinder Series HY

175L HY-M4 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L HY-M5 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 110L HY-M6 x 100L x 105L x 110L x 115L x 120L x 125L x 130L x 135L x 140L x 165L x 190L HY-M6 x 100L x 105L x 110L x 115L x 120L x 125L x 130L x 135L x 140L x 165L x 190L 65 70 75 80 85 90 95 100 105 110 65 70 75 80 85 90 95 100 105 110 75 80 85 90 95 100

FGX-OM-K003_e

Air flow capacityNote 1) 100L/min(ANR) 500L/min(ANR) Filtration rating 0.0199.99 MAX Operating pressure 1.0MPa (0.99MPa for Nitrogenat 20 Operating temp. 5 to 45 Initial pressure oss 0.03MPa or less (at primary pressure of 0.7MPa and max. air flow capacity) Clean room (class 100) Note 1) The air flow capacity is the flow rate at a primary pressure of 0.7MPa.

PF-OMN0009_C

) 10 m DC(-)() -7No.PF-OMN0009CN-F * ( ) () CE -8No.PF-OMN0009CN-F * 3 * -9No.PF-OMN0009CN-F * , *PVC PVC PVC () PVC PVC , -10No.PF-OMN0009CN-F PF3W5 48 () 3 A : 04 20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L

Multistage Ejector Series ZL

G H L LN LO M MN MO Lead wire length 0.3m Lead wire length 0.6m Lead wire length 0.3m Without lead wires Without connector Lead wire length 0.3m Without lead wires Without connector Grommet L type plug connector M type plug connector 1 Series ZL Ejector Specifications Standard ZL112 Model Nozzle diameter Maximum suction flow rate Air consumption Maximum vacuum pressure 1.2mm 100l/min (ANR

Compact Cylinder

155 65 70 75 80 85 90 95 100 105 130 155 CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L CQ-M6 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 130L x 155L CQ-M8 x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 105L x 130L x 155L 6.1 6.1 7 7.5 7.5 9 11 12.5 8 10 13.5 40 to 63: The C, and D, dimensions are the same as those of C and D. 11 7.5 98

Hydraulic

x 100l x 115l 115 50 (M) 100 50 (M) M5 x 55l x 140l 140 75 (M) 55 CHKDB25 5 (M) x 60l x 165l 165 100 (M) 60 10 (M) x 65l M12 x 75l 75 CHKDB63 5 (M) 65 15 (M) x 70l x 80l 80 10 (M) 70 20 (M) x 75l x 85l 85 15 (M) 75 25 (M) 10.4 x 80l x 90l 90 20 (M) 80 30 (M) x 85l x 95l 95 25 (M) 85 35 (M) x 90l x 100l 100 30 (M) 90 40 (M) 16 x 95l x 105l 105 35 (M) 95 45 (M) x 100l x 110l 110 40 (M) 100

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 125l x 150l M6 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 130l x 155l M8 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 130l x 155l M10 x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 135l x 160l M10 x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 145l x 170l CU 6.1 CQS 13.5 6.5 CQM 7.5 CQ2 Courtesy of Steven Engineering, Inc.-230 Ryan

Compact Cylinder with Air Cushion and Lock Series RLQ

Model C D Mounting bolt M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l M6 x 130l M6 x 140l M6 x 165l M6 x 190l M8 x 125l M8 x 135l M8 x 145l M8 x 170l M8 x 195l RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75

IDG

Note AM IDG30/30H/30L IDG50/50H/50L IDG60/60H/60L/60S IDG75/75H/75L/75S IDG100/100H/100L/100S q w e r t Body Aluminum alloy Platinum silver coated Misc. Case Stainless steel Orifice Stainless steel Holder Aluminum alloy Aluminum Silencer Resin + Copper alloy Replacement Parts Part no. No.

Series IDG

Note IDG30, 30H, 30L IDG5, 50H, 50L IDG60, 60H, 60L, 60S IDG75, 75H, 75L, 75S IDG100, 100H, 100L, 100S 1 2 3 4 5 Body Aluminum alloy Platinum silver coating Case Stainless steel Orifice Stainless steel Holder Silencer Aluminum alloy Aluminum Resin + Copper alloy Replacement parts Part number No.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

x 125l x 150l M6 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 130l x 155l M8 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 130l x 155l M10 x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 135l x 160l M10 x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 145l x 170l CU 6.1 CQS 13.5 6.5 CQM 7.5 CQ2 RQ MU 12.5 9 7 D-X 20Data 8 13 12.5 7-6-31 32

Slider Type Ball Screw Drive/11-LEFS Series

[mm] Dimensions Model L A B n D E Without lock With lock 11-LEFS32l-50l 332 384 56 180 4 11-LEFS32l-100l 382 434 106 230 4 11-LEFS32l-150l 432 484 156 280 4 11-LEFS32l-200l 482 534 206 330 6 2 300 11-LEFS32l-250l 532 584 256 380 6 2 300 11-LEFS32l-300l 582 634 306 430 6 2 300 11-LEFS32l-350l 632 684 356 480 8 3 450 11-LEFS32l-400l 682 734 406 530 8 3 450 11-LEFS32l-450l 732 784 456

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Use 0.75kW per 100l/min of air consumption as a guide for the relationship of the air consumption to the compressor.

PAB-OM-K007

If required output of compressor is calculated from air consumption, consider the output is 0.75 kW per air consumption of 100L/min (ANR) for reference. 0.5 SUP=0.5MPa 0.4 Discharge pressure (MPa) 0.4MPa 0.3 0.3MPa 0.2 0.2MPa 0.1 0 0 10 20 30 40 50 Discharge rate (L/min) 7 - 2) Viscosity characteristic With reference to viscosity characteristic graph (shown below), discharge amount of transported

PAB-OM-K008

If required output of compressor is calculated from air consumption, consider the output is 0.75kW per air consumption of 100L/min (ANR) for reference.

Multistage Ejector (N)ZL Series

MN MO Lead wire length 0.3m Lead wire length 0.6m Lead wire length 0.3m Without lead wires Without connector Lead wire length 0.3m Without lead wires Without connector Grommet L type plug connector M type plug connector 4 Multistage Ejector Series (N)ZL Ejector Specifications Standard (N)ZL112 Model Nozzle diameter Maximum suction flow rate Air consumption Maximum vacuum pressure 1.2mm 100l

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Use 0.75kW per 100l/min of air consumption as a guide for the relationship of the air consumption to the compressor.