Digital Flow Switch for Deionized Water and Chemicals Series PF2D Real-time switch output ( ) Unit switching Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES OFF P-1 P-2 GPM gal (US) Real-time flow rate GPM = gal (US)/min "P" Window comparator mode H : Hysteresis Note ) Fixed SI unit (l/min, l, m3 or m3x10) will be set for the type without the unit switching function.
) 2n x 1/4 Applicable cable O.D. 6 to 12 L Dimension n: Stations Stations Formula L1 = 46 x n + 29 L2 = 46 x n + 14 2 121 106 3 167 152 4 213 198 5 259 244 6 305 290 7 351 336 8 397 382 9 443 428 10 489 474 L L1 L2 Precautions Be sure to read this before handling the products.
= 280 l = 300 25 D side U side Stations 1 2 3 4 5 n (Front ported) IN port 2-3/8 72 55 38.5 42 37 25 P = 28.5 24.5 12.5 OUT port n-1/4 25 19.5 Mounting valve: for conduit terminal (P = 34.5) Side ported: L1 = n x 28.5 + 10.5 L2 = n x 28.5 + 20.5 Front ported: L1 = n x 28.5 + 50.5 L2 = n x 28.5 + 60.5 Dimensions (mm) L n 8 238.5 248.5 278.5 288.5 9 267 277 307 317 10 295.5 305.5 335.5 345.5
): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil
Mounting Amplifier Single mounting Ho.izontally Q r A vertica,,y F Multiple mounting + -f -t] + -ti n n n h n t t t l t t l t I i u ! L l !
R R L1 L3 L2 PE TB N PE L TB PRR ILS THR ILS MC THR MC MC PRR CM C01 MC OLR OLP1 CM OLP2 C11 FM PRS MOV P M C11 FM PRS M P IDF55E-30 IDF75E-30 GFCI R GFCI R GFCI GFCI TB TB PRR PRR THR THR CM CM MC2 MC2 FM FM THP THS THP MC1 MC1 MC2 MC2 PRS1 PRS1 P P PRS2 THR PRR PRS2 THR PRR P P M M CM PRS OLR FM PRS1 PRR MC PRS2 TB MC1 ILS GFCI MC2 THR MOV C01 CM THS OLP1 C11 FM THP
20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601
Axial piping available (6, 10) Compact Type Dual-Rod Cylinder Series CXSJ 6, 10, 15, 20, 25, 32 How to Order Piping Standard piping (6 to 32) Axial piping (6, 10) Nil Nil TN TF Standard piping Axial piping Port thread type Nil Port position M thread Rc1/8 NPT1/8 G1/8 6 to 25 P Port position 32 CXS P 6 M 50 F9BW J S Number of auto switches Compact type Nil S n 2 1 n M L Bearing type Slide
13-5 IDU3E/4E-10-T IDU3E/4E/6E-20/23-T AC200 / 200,220V (50,60Hz) AC100/100,110V (50/60Hz) PE N L 1 2 or AC230V (50Hz) TB 3 PE N L 1 2 TB 3 TDR MC TDR MC TDR ILS TDR ILS MC MC OLR OLR MC MC CM MC CM MC PTC PTC C11 PRS FM FM PRS P P MC TDR MC TDR IDU6E-10-T AC100/100,110V (50/60Hz) L N 1 3 2 PE TB MC TDR ILS TDR MC OLR MC C01 CM PTC MC FM C11 PRS P TDR MC CM PTC PTC C01 FM PRS C02
size (mm) CW CX CZ L L1 N RR 32 18 36 7 28.5 M6 x 1.0 10 20 L CU CW RR 40 22 18 36 7 28.5 M6 x 1.0 10 CX +0.4 +0.2 0.1 0.3 CZ B + Stroke CL + Stroke A + Stroke 50 28 22 44 8 33.5 M8 x 1.25 14 Refer to page 11 for details on rod end nut and accessories.
A XLAV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLAV-16-2 41 18.5 8.5 2.7 3 XLAV-25-2 45.5 22.5 8.5 2.7 3 XLAV-40-2 54.5 35 8.5 2.7 3 XLAV-50-2 61 39.5 8.5 2.7 3 XLAV-63-2 80.5 44 12 4 2 XLAV-80-2 90.5 60 12 4 2 6 Aluminum High Vacuum Angle Valve Double Acting, Bellows Seal RoHS XLC Series How to Order q w e r t y u XLC 2 M9N 16
(Roller center position) Conveyor lower limit position V Y U CD T R Stroke A H B FT GA 2 x P D QA Head side pressure port (When piping on flange side) Rod side pressure port (When piping on flange side) 2 x P QB W WB E GB A (mm) Circumscribed circle O QA Stroke A B CD CT CZ D E FT FX FZ GA GB H L N 212.5 LANote 5) Model RS2H50 RS2H63 RS2H80 30 84.5 20 8 36 32 64 20 73 93 16 16 128 85 44
): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil
/N.C.), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT)
/N.O.), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT)
Actuation: 2 (2-Position Double), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT)
Actuation: 1 (2-Position Single), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: E (Push-turn Locking Lever Type), A,B Port: 01 (1/8), Thread Type: N (NPT)
Actuation: 1 (2-Position Single), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT), Bracket: F1 (w/Foot Bracket, 2-position, Single Only)
Actuation: 3 (3-Position Closed Center), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: D (Push-turn Locking Slotted Type), A,B Port: 01 (1/8), Thread Type: N (NPT), Bracket: F2 (w/Side Bracket)
Actuation: 4 (3-Position Exhaust Center), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: N (NPT)