TKS

D1 D2 L TKS-06 Orange TRB0604, TRBU0604 16 58 45 TKS-08 Yellow TRB0806, TRBU0805 18 TKS-DPH00071 (10 replacement blades) 35 TKS-10 Blue TRB1075, TRBU1065 20 62 50 TKS-12 Green TRB1209, TRBU1208 22 Inner tubing material/TRB: Nylon, TRBU: Polyurethane Dimensions D2 D1 L 9.7 (3/8") Able to strip without damaging the inner tubing The outer tube can be stripped without damaging the inner tube

Clean Room Rodless Cylinder Series CYP ø15, ø32

operating pressure of 0.3 MPa for the clean rodless cylinder is exceeded, the magnetic coupling can be broken, causing a danger of malfunction or degradation of particulate generation characteristics, etc. 10-AS2001F-04-X214 10-AS1001F-04-X214 In-line type (throttle valve) 10-AS2001F-06-X214 10-AS1001F-06-X214 10-ASD330F-01-06 10-ASD230F-M5-04 Dual type (speed controller) 10-ASD330F-01-08

C92

Applicable load Auto switch model Special function Style Electrical entry Wiring (Output) 0.5 () 3 (L) 5 (Z) 32 BT-03 AC DC 40 BT-03 3 wire (Equiv. to NPN) 5V A56 IC 50 BT-04 Yes Reed switch Solid state switch A53 A54 A67 A64 A59W F59 F5P J51 J59 F59W F5PW J59W F5BA F5NT F59F 12V 5V,12V 100V,200V 63 BT-04 Grommet Relay PLC 80 BT-06 24V 2 wire 5V,12V IC No 100 BT-06 200V or less 12V 125 BT-08

Compact Proportional Solenoid Valve Series PVQ

03 04 06 08 With / Without lead wire 8 ) , * 8 * , Nil O % 2 3 8 $ , % 2 0 3 + 8 ' , Specifications Valve construction Orifice diameter (mm) * + Standard specifications Coil specifications Fluid Max. operating pressure differential (MPa) $" ) * $ ' Seal material Max. operating pressure (MPa) ' , Characteristic specifications Body material Min. operating pressure (MPa) (Vacuum)

AS

Note) Inch size Metric size KE 23 01 1 8" 3.2 4 6 8 10 12 5 32" Control type 04 06 08 10 12 03 05 07 09 11 13 3 16" Meter-out Meter-in 0 1 AS-FG 1 4" 5 16" AS-FP 3 8" 1 2" With One-touch fitting AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 630. Use 1/8" tube.

Compact Manifold Regulator Common Supply Type ARM11A Series Made to Order (Refer to page 746 for details.)

Stations Symbol IN side Straight 6 8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight Elbow Straight Elbow Note) OUT side Mounting position 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1/4 3/8 5/32 1/4 5/32 1/4 07 08

Compact Manifold Regulator Centralized Supply Type ARM5A Series

Metric size Inch size Stations Symbol 1 2 3 4 5 6 7 8 9 M Elbow Straight Elbow OUT side Mounting position Elbow Straight Elbow OUT side Mounting position IN side Straight 6 IN side Straight 1/4 1 station Fitting type Fitting type 2 stations 8 6 8 6 4 6 4 1/4 1/4 1/4 Symbol Symbol 5/16 5/16 5/32 5/32 3 stations 07 08 09 10 19 20 21 22 26 27 28 29 33 34 35 36 57 58 59 60 69 70 71 72 76

AS

to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Push-lock type Example) AS2002F-04A-X21 Not particle-free Applicable tubing O.D.1 Metric size Inch size 23 3.22 01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Restrictor (Without check valve) 04 4 06 6 08

AS_FS Inline

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08 8

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Series VQ1000 10- Base Mounted 21- Plug-in Unit

[Option] How to Order Manifold VV5Q 1 1 08 C6 U1 F 10 CE compliant Series Nil CE compliant VQ1000 1 Q Note) For CE compliant models, DC-type only.

Series VQ1000 10- Base Mounted 21- Plug-in Unit

[Option] How to Order Manifold VV5Q 1 1 08 C6 U1 F 10 CE compliant Series Nil CE compliant VQ1000 1 Q Note) For CE compliant models, DC-type only.

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Symbol Symbol Nil 2 3 4 6 5 Application Ports A & B same size N PPS PFA Ammonium hydroxide compatible Metric sizes 03 04 06 08 10 12 19 25 3 4 6 8 10 12 19 25 Pilot port thread type Refer to the applicable tubing table to the left. Different diameter tubings can be selected within the same body class.

Integral Fitting Type (Hyper Fittings) Series LVD How to Order LVC LVA LVD 1 0 03 S LVH Body class Option LVD Orifice dia. Body class Nil None Symbol 1 Valve type 1 1 ø2 With flow rate adjustment LVQ 2 2 2 ø4 With bypass 0 N.C. 3 3 With flow rate adjus

LVN Material Body Diaphragm Note Actuator section End plate Symbol TL/TIL Applicable tubing size PFA PPS PTFE Nil Body class LQ3 Connecting tubing outside diameter Symbol Ammonium hydroxide compatible 2 1 3 4 5 PFA PPS PTFE N Metric sizes 03 04 06 08 10 12 19 3 4 6 8 10 12 19 Pilot port thread type Symbol Body class 1 2, 3, 4, 5 1, 2, 3, 4, 5 Thread type 4 One-touch fitting 6 One-touch fitting

PVQ10

03 04 06 08 With / Without lead wire 8 ) , * 8 * , % 2 3 Nil O 8 $ , % 2 0 3 + 8 ' , Specifications Valve construction * + Orifice diameter (mm) Standard specifications Coil specifications Fluid ) * $ ' Max. operating pressure differential (MPa) $" Seal material ' , Max. operating pressure (MPa) Characteristic specifications Body material ' , -" Min. operating pressure (MPa)

Clean Regulator/Fluororesin Type SRF Series

Metric size Inch size Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Applicable tubing size Applicable tubing size Symbol Symbol 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 04 06 08 10 12 19 03 05 07 11 13 19 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" : Basic size : With reducer : Basic size : With reducer Note) Tubing size is interchangeable

Series VQ1000 Body Ported Plug-in Unit: Flip Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Series VQ1000 Body Ported Plug-in Unit: Flip Type How to Order Manifold VV5Q1 N S1 F 3 08 Option Series VQ1000 Kit type None DIN rail mounting style Special wiring specifications (Except double wiring) Nil D (2) Manifold K (3) 3 Plug-in unit/Flip With name plate Built-in silencer, direct exhaust N S (4) Stations When two or more symbols are specified, indicate them alphabetically.

The use of 34 pin connectors allows up to 16 stations with double solenoids.Decentralized serial wiring, Tie rod base, 4000 series, IP67 protection, Number of outputs: 16, Maximum number of stations: 16 (over 8 requires manifold spec. form), SS5V 08 Station Manifold, Tie-Rod Base, 4/5 PORT SOLENOID VALVE, VVM, 1.11 lb

This is a legacy product, and replaced byZH13BSA-08-10, VACUUM EJECTOR, VACUUM SERIES, ZH VACUUM EJECTOR, DE, ZH NOZZLE SIZE 1.3, .11234 lb, ModelConnection (One-touch/Screw-in) SUPVACEXHZH13B?8/Rc 1 8?10/Rc 1 4?

Resin parts for one-touch series KPQ/KPG (for drive system air piping) are polypropylene.Clean One-touch fitting, Plug, Applicable fitting sizes: 04, 06, 08, 10, 12, FITTING, CLEAN PLUG, CONNECTORS, KP FITTING, CLEAN ONE TOUCH, 2P, KP PLUG, NO SIZE RATING, .01241 lb